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US4164676A
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Piezoelectric crystalline film of zinc oxide containing additive elements
Assignee: Murata Manufacturing Co Ltd
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Filing: 1978-07-24
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Granted: 1979-08-14
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Expires: 1998-07-24
Abstract
Abstract Piezoelectric crystalline film on a substrate, which is a crystalline zinc oxide film with a c-axis perpendicular to the substrate surface, the crystalline zinc oxide film containing as additive elements, vanadium, manganese and at least one element selected from the group consisting of chromium, iron, cobalt and nickel. The piezoelectric crystalline films are homogeneous and have high resistivity and a smooth surface so that they can be used as a transducer with good conversion efficiency in a wide range of low to high frequencies.
Inventors
- 👤 Hiroshi Nishiyama
- 👤 Toshio Ogawa
- 👤 Tasuku Mashio
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-02 17:21
CPC Classifications
H; H10; H10N; H10N30/00; H10N30/80; H10N30/85; H10N30/853; H10N30/01; H10N30/07; H10N30/074; H10N30/076
Claims Analysis
Total Claims: 20
Claim 1
Independent Claim
53 words
A piezoelectric crystalline film on a substrate, said film being a crystalline zinc oxide film with a c-axis perpendicular to the substrate surface, characterized in that said crystalline zinc oxide film contains, as additive elements vanadium, manganese, and at least one element selected from the group consisting of chromium, iron, cobalt and nickel.
Claim 2
Dependent Claim
53 words
A piezoelectric crystalline film on a substrate, said film being a crystalline zinc oxide film with a c-axis perpendicular to the substrate surface, characterized in that said crystalline zinc oxide film contains, as additive elements vanadium, manganese, and at least one element selected from the group consisting of chromium, iron, cobalt and nickel.
Claim 3
Dependent Claim
35 words
A piezoelectric crystalline film according to claim 1 wherein the additive elements are vanadium, manganese, and one element selected from said group, and the content of each additive element is 0.01 to 20.0 atomic percent.
Claim 4
Dependent Claim
14 words
A piezoelectric crystalline film according to claim 2 wherein said one element is chromium.
Claim 5
Dependent Claim
14 words
A piezoelectric crystalline film according to claim 2 wherein said one element is iron.
Claim 6
Dependent Claim
14 words
A piezoelectric crystalline film according to claim 2 wherein said one element is cobalt.
Claim 7
Dependent Claim
14 words
A piezoelectric crystalline film according to claim 2 wherein said one element is nickel.
Claim 8
Dependent Claim
54 words
A piezoelectric crystalline film according to claim 1 wherein the additive elements are vanadium. manganese, and two elements selected from said group, the content of vanadium and that of manganese are 0.01 to 20.0 atomic percent, respectively, and the sum of the content of said selected two elements is 0.01 to 20.0 atomic percent.
Claim 9
Dependent Claim
17 words
A piezoelectric crystalline film according to claim 7 wherein said selected two elements are chromium and iron.
Claim 10
Dependent Claim
17 words
A piezoelectric crystalline film according to claim 7 wherein said selected two elements are chromium and cobalt.
Claim 11
Dependent Claim
17 words
A Piezoelectric crystalline film according to claim 7 wherein said selected two elements are chromium and nickel.
Claim 12
Dependent Claim
17 words
A piezoelectric crystalline film according to claim 7 wherein said selected two elements are iron and cobalt.
Claim 13
Dependent Claim
17 words
A piezoelectric crystalline film according to claim 7 wherein said selected two elements are iron and nickel.
Claim 14
Dependent Claim
17 words
A piezoelectric crystalline film according to claim 7 wherein said selected two elements are cobalt and nickel.
Claim 15
Dependent Claim
53 words
A piezoelectric crystalline film according to claim 1 wherein the additive elements are vanadium, manganese, and three elements selected said group, the content of vanadium and that of manganese are 0.01 to 20.0 atomic percent, respectively, and the sum of the content of said selected three elements is 0.01 to 20.0 atomic percent.
Claim 16
Dependent Claim
18 words
A piezoelectric crystalline film according to claim 14 wherein said selected three elements are chromium, iron and cobalt.
Claim 17
Dependent Claim
18 words
A piezoelectric crystalline film according to claim 14 wherein said selected three elements are chromium, iron and nickel.
Claim 18
Dependent Claim
18 words
A piezoelectric crystalline film according to claim 14 wherein said selected three elements are chromium, cobalt and nickel.
Claim 19
Dependent Claim
18 words
A piezoelectric crystalline film according to claim 14 wherein said selected three elements are iron, cobalt and nickel.
Claim 20
Dependent Claim
50 words
A piezoelectric crystalline film according to claim 1 wherein the additive elements are vanadium, manganese, chromium, iron, cobalt and nickel, the content of vanadium and that of manganese are 0.01 to 20.0 atomic percent, and the sum of the content of the other elements is 0.01 to 20.0 atomic percent.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1982-08-13 | 1983-02-12 | 1983-08-14 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1986-08-13 | 1987-02-12 | 1987-08-14 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1990-08-13 | 1991-02-12 | 1991-08-14 | $7700.00 | Window Closed / Lapsed |