Semiconductor memory device

Claim 2

A semiconductor device having a semiconductor memory element in particular suitable for use in a random access memory, comprising a semiconductor body having a surface-adjoining surface region of mainly one conductivity type and having a first field effect transistor, which comprises two main electrode regions of one conductivity type having therebetween a channel region of said one conductivity type and a surface situated gate region of opposite conductivity type forming a part of the semiconductor body, by means of which gate region a depletion region extending at least into the channel region can be induced in the semiconductor body, said gate region forming a charge storge region in which information can be stored in the form of electrical charge, which information can be read out non-destructively by determining the conductivity in the channel region between the main electrode regions, characterized in that the memory element comprises a second field effect transistor, which is of the insulated gate variety, and which comprises two main electrode regions one of which is formed by said charge storage region and the other main electrode region is formed by a second surface region of the same conductivity type as said charge storage region, and both main electrode regions of said second field effect transistor being located between the two main electrode regions of said first field effect transistor, the second field effect transistor comprising at least a gate electrode which is insulated from the surface of the semiconductor body and which is coupled electrically to one of the main electrode regions of the first field effect transistor.

Claim 3

A semiconductor device as claimed in claim 1, characterized in that one main electrode region of the first field effect transistor is provided with an electrical connection which extends in the form of a conductive layer to at least above the channel region of the second field effect transistor, thereby forming an insulated gate electrode of the second field effect transistor.

Claim 4

A semiconductor device as claimed in claim 1, characterized in that the part of the semiconductor body which forms said charge storage region is provided at the surface with a capacitive connection in the form of a conductive region which is separated from the said part of the semiconductor body by a blocking layer.

Claim 5

A semiconductor device as claimed in claim 3, characterized in that the blocking layer is formed by a layer of insulating material which is situated at the surface of the semiconductor body and on which the capacitive connection is provided in the form of a conductive layer.

Claim 6

A semiconductor device as claimed in claim 1, characterized in that the second main electrode region of the first field effect transistor and forms a second gate electrode region of the first field effect transistor.

Claim 7

A semiconductor device as claimed in claim 4, characterized in that the conductive layer which forms the capacitive connection of the part of the semiconductor body which forms said charge storage region extends, viewed on the surface, to beyond said part of the semiconductor body to over a part of the channel region of the second field effect transistor and forms two insulated gate electrodes of the second field effect transistor together with the conductive layer which is connected to one of the main electrode regions of the first field effect transistor and extends above the remaining part of the said channel region of the second field effect transistor.

Claim 8

A semiconductor device as claimed in claim 1, characterized in that the second field effect transistor is of the depletion type.

Claim 9

A semiconductor device as claimed in claim 1, characterized in that the surface region of mainly one conductivity type is bounded on the side opposite to the surface by a part of the semiconductor body of the second conductivity type.

Claim 10

A semiconductor device as claimed in claim 1, characterized in that the first field effect transistor is a function field effect transistor whose gate region which itself forms said charge storage region is separated from the channel region by a rectifying junction.

Claim 11

A semiconductor device as claimed in claim 9, characterized in that the gate region is formed by a surface zone of the second conductivity type which is provided in the surface region of one conductivity type and which is coupled at the surface by an insulating layer on which the said electrode forming a capacitive supply for the gate region is provided in the form of a conductive layer.

Claim 12

A semiconductor device as claimed in claim 1, characterized in that the gate region of the first field effect transistor is formed by a conductive layer which is separated from the channel region by an intermediate insulating layer, whereby, by means of the insulated gate electrode, an inversion layer can be induced in the underlying channel region and extends from the surface in the channel region and forms the said charge storage region in which information can be stored in the form of minority charge carriers.

Claim 13

A semiconductor device as claimed in claim 11, characterized in that the insulated gate electrode of the first field effect transistor is formed by the conductive layer which forms the capacitive connection to the part of the semiconductor body in which the charge storage region can be formed.

Claim 14

A semiconductor device comprising a random access memory having a semiconductor body which is provided at a surface with a system of conductors of word lines and bit lines which, at the area of the crossings, are coupled electrically to memory elements provided in an underlying surface region of the semiconductor body of mainly one conductivity type which each comprise a first field effect transistor, having two main electrode regions of one conductivity type and an intermediately located channel region of said one conductivity type and having a surface situated gate region of opposite conductivity type forming a part of the semiconductor body, by means of which gate region a depletion region extending in the channel region can be formed in the semiconductor body said gate region forming a charge storage region in which information can be stored in the form of electrical charge, which information can be read out non-destructively by determining the conductivity in the channel region between said two main electrode regions, said bit lines being coupled to a first main electrode region of the field effect transistors and said word lines being coupled to a gate region of the first field effect transistors, characterized in that each memory element comprises a second field effect transistor which is of the insulated gate type and which comprises two main electrode regions of which one is formed by said charge storage region and the other main electrode region is formed by a second surface region of the same conductivity type as said charge storage region, and both main electrode regions of said second field effect transistor being located between the two main electrode regions of said first field effect transistor, the second field effect transistors each comprising at least one insulating gate electrode which is connected to an associated bit line.

Claim 15

A semiconductor device comprising a random access memory having a semiconductor body which is provided at a surface with a system of conductors of word lines and bit lines which, at the area of the crossings, are coupled electrically to memory elements provided in an underlying surface region of the semiconductor body of mainly one conductivity type which each comprise a first field effect transistor, having two main electrode regions of one conductivity type and an intermediately located channel region of said one conductivity type and having a surface situated gate region of opposite conductivity type forming a part of the semiconductor body, by means of which gate region a depletion region extending in the channel region can be formed in the semiconductor body said gate region forming a charge storage region in which information can be stored in the form of electrical charge, which information can be read out non-destructively by determining the conductivity in the channel region between said two main electrode regions, said bit lines being coupled to a first main electrode region of the field effect transistors and said word lines being coupled to a gate region of the first field effect transistors, characterized in that each memory element comprises a second field effect transistor which is of the insulated gate type and which comprises two main electrode regions of which one is formed by said charge storage region and the other main electrode region is formed by a second surface region of the same conductivity type as said charge storage region, and both main electrode regions of said second field effect transistor being located between the two main electrode regions of said first field effect transistor, the second field effect transistors each comprising at least one insulating gate electrode which is connected to an associated bit line.

Claim 16

A semiconductor device as claimed in claim 13 characterized in that the word lines comprise a number of conductive paths each forming a capacitive connection of the parts of the semiconductor body which during operation form the charge storage regions of the memory elements which are electrically coupled in common to the same word line.

Claim 17

A semiconductor device as claimed in claim 13, characterized in that the memory elements, on the sides parallel to the main direction of current of the first field effect transistors, are bounded by dielectric regions extending from the surface over at least a part of the thickness of the semiconductor region of one conductivity type into the semiconductor body.

Claim 18

A semiconductor device as claimed in claim 15, characterized in that the dielectric region is formed by an oxide layer obtained by the local oxidation of the semiconductor material of the semiconductor body.

Claim 19

A semiconductor device as claimed in claim 16, characterized in that the dielectric regions are formed by stripes which, viewed on the surface, extend mainly parallel to the bit lines and define in the surface region of one conductivity type stripe-shaped islands each comprising the memory elements associated with a bit line which are oriented so that the main direction of current of each of the said first field effect transistors is mainly parallel to the direction in which the bit lines extend.

Claim 20

A semiconductor device as claimed in claim 17, characterized in that the stripe-shaped dielectric regions, viewed on the surface, show interruptions by way of which the stripe-shaped surface regions of said opposite conductivity type and adjoining zones of said one conductivity type extend in the semiconductor body in a direction transverse to the bit lines each forming a common second gate electrode region of the second field effect transistors and a common second main electrode region of the first field effect transistors of memory elements associated with the same word line, respectively.

Claim 21

A semiconductor device as claimed in claim 18, characterized in that juxtaposed memory elements associated with the same bit line are provided mirror-symmetrically with respect to each other, the first field effect transistors of said juxtaposed memory elements sharing a common main electrode region.

Claim 22

A semiconductor device as claimed in claim 14, characterized in that the device comprises a second system of word lines which are each connected to the said other main electrode regions of the second field effect transistors of memory elements associated with the same word, each of said other main electrode regions being formed by a surface zone of said opposite conductivity type which is situated within the channel region of the associated first field effect transistor.

Claim 23

A semiconductor device as claimed in claim 13, characterized in that circuit means are present to erase, write and read each memory element, by means of which circuit means, after the erase cycle the gate region of the first field effect transistor of each memory element is brought at a potential at which a depletion region is formed in the semiconductor body and extends into the channel region of the first field effect transistor and forms a charge storage region for storing information-representing electrical charge, by which circuit means, during a write cycle input signals are applied to the insulated gate electrode of the second field effect transistor which is coupled electrically to one of the main electrode regions of the first field effect transistor so that, by way of the second field effect transistor, a quantity of electrical charge determined by the input signal can be introduced into said charge storage region which determines the size of the formed depletion region in the channel region of the first field effect transistor, by which circuit means upon reading, such voltages are applied at least periodically to the main electrode regions of the first field effect transistor that in the given charge state of the charge storage region said insulated gate electrode potential can assume values which correspond to said input signal so that by periodically repeating the erase-write cycle the charge state of the charge storage region can be refreshed periodically.

Claim 24

A semiconductor device as claimed in claim 21, characterized in that the input signals can assume two values one of which is larger and the other of which is smaller than the threshold voltage of the second field effect transistor prevailing at the applied voltages.

Claim 25

A semiconductor device as claimed in claim 21, characterized in that the depletion region which forms said charge storage region has such an extent, at least in the absence of charge supply by way of the second field effect transistor, that the underlying channel region of the first field effect transistor is pinched-off entirely so that the transistor is switched off.

Claim 26

A semiconductor device as claimed in claim 21, characterized in that means are present to switch off the first field effect transistor after information has been written in the charge storage region and to switch on said first field effect transistor when said information should be read out.

Claim 27

A semiconductor device as claimed in claim 24, characterized in that the surface zone of the opposite conductivity type which forms said other main electrode region of the second field effect transistor and is situated within the channel region of the first field effect transistor of each memory element is associated with said means by which the first field effect transistor can be switched off independently of the written information and is connected to a voltage source whereby the p-n junction between said surface zone and the channel region of the first field effect transistor can be reversely biased.