Patent US4158141A successfully refreshed from Google Patents.
US4158141A
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US
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Process for channeling ion beams
Assignee: Raytheon Co
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Filing: 1978-06-21
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Granted: 1979-06-12
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Expires: 1998-06-21
Abstract
Abstract The specification describes a process for minimizing ion scattering and thereby improving resolution in ion beam lithography. First, a substrate coated with a layer of ion beam resist is provided at a chosen spaced distance from an ion beam source. Next, a monocrystalline membrane with a patterned ion absorption region is positioned at a predetermined location between the substrate target and the ion beam source. The patterned ion absorption region may be either an ion absorption mask, such as gold, deposited on the surface of the monocrystalline membrane, or a pattern of ion-damaged regions within the monocrystalline membrane. Finally, a collimated wide area ion beam is passed perpendicular to the surface of the membrane and through crystal lattice channels therein which are exposed by the patterned ion absorption region and which extend perpendicular to the membrane surface. The parallel paths established by the channels in the membrane provide low resistance paths to the passage of ion beams and consequently minimize the angle of deflection of the ions passing from the membrane to the target resist layer.
Inventors
- 👤 Robert L. Seliger
- 👤 Paul A. Sullivan
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-26 21:09
CPC Classifications
G; G03; G03F; G03F7/00; G03F7/20; G03F7/2037; B; B82; B82Y; B82Y10/00; B82Y40/00; G21; G21K; G21K1/00; G21K1/02; G21K1/025; G21K1/10; H; H01; H01J; H01J37/00; H01J37/02; H01J37/04; H01J37/09; H01J37/30; H01J37/3002; H01J37/3007; H01J37/317; H01J37/3174; H01J37/3175; H01J37/3177; H01J2237/00; H01J2237/30; H01J2237/317; H01J2237/3175; H01J2237/31752; H01J2237/31755; H01J2237/31777; H01J2237/31788
Claims Analysis
Total Claims: 15
Claim 1
Independent Claim
37 words
A process for interrupting an ion beam while minimizing the lateral deflection thereof which comprises passing a collimated ion beam through selected areas of a thin monocrystalline membrane, whereby atomic lattice resistance to ion transmission is minimized.
Claim 2
Dependent Claim
37 words
A process for interrupting an ion beam while minimizing the lateral deflection thereof which comprises passing a collimated ion beam through selected areas of a thin monocrystalline membrane, whereby atomic lattice resistance to ion transmission is minimized.
Claim 3
Dependent Claim
16 words
The process defined in claim 1 wherein said membrane is less than 2 micrometers in thickness.
Claim 4
Dependent Claim
48 words
The process defined in claim 1 which includes passing ions through said membrane in a direction normal to the (110) crystallographic plane thereof, and disposing chosen ion masking regions adjacent to one surface of said membrane and positioned to selectively interrupt said ion beam in a desired pattern.
Claim 5
Dependent Claim
77 words
A process for selectively interrupting a collimated ion beam which comprises: (a) providing ion absorption regions at one surface of a thin membrane of a chosen monocrystalline material cut on a crystal plane presenting a minimum of atomic lattice resistance to ions passing therethrough; and (b) projecting said collimated ion beam perpendicular to said one surface and crystal plane of said membrane, whereby lateral deflection of said ion beam is minimized as it passes through said membrane.
Claim 6
Dependent Claim
77 words
A process for selectively interrupting a collimated ion beam which comprises: (a) providing ion absorption regions at one surface of a thin membrane of a chosen monocrystalline material cut on a crystal plane presenting a minimum of atomic lattice resistance to ions passing therethrough; and (b) projecting said collimated ion beam perpendicular to said one surface and crystal plane of said membrane, whereby lateral deflection of said ion beam is minimized as it passes through said membrane.
Claim 7
Dependent Claim
159 words
A process for partially interrupting a collimated ion beam in a predetermined pattern while simultaneously minimizing the scatter angle and lateral deflection of the uninterrupted ions, including in combination the steps of: (a) providing a thin monocrystalline membrane of less than 2 micrometers thickness and having an ion absorbing region adjacent to one surface thereof which is patterned to correspond to said predetermined pattern in which said ion beam is to be interrupted; and (b) projecting a collimated ion beam toward and perpendicular to said membrane and through said membrane between non-absorbing areas adjacent said ion absorbing region; the thin and monocrystalline characteristics of said membrane serving to minimize the resistance of said membrane to the transmission of ions channeling therethrough, whereby said thin membrane introduces a minimum of lateral deflection and scattering of said ion beam relative to its initial direction of movement and greatly enhances the resolution at a target on which said uninterrupted ions may impinge.
Claim 8
Dependent Claim
159 words
A process for partially interrupting a collimated ion beam in a predetermined pattern while simultaneously minimizing the scatter angle and lateral deflection of the uninterrupted ions, including in combination the steps of: (a) providing a thin monocrystalline membrane of less than 2 micrometers thickness and having an ion absorbing region adjacent to one surface thereof which is patterned to correspond to said predetermined pattern in which said ion beam is to be interrupted; and (b) projecting a collimated ion beam toward and perpendicular to said membrane and through said membrane between non-absorbing areas adjacent said ion absorbing region; the thin and monocrystalline characteristics of said membrane serving to minimize the resistance of said membrane to the transmission of ions channeling therethrough, whereby said thin membrane introduces a minimum of lateral deflection and scattering of said ion beam relative to its initial direction of movement and greatly enhances the resolution at a target on which said uninterrupted ions may impinge.
Claim 9
Dependent Claim
141 words
A process for improving resolution and minimizing ion scattering in ion beam lithography comprising the steps of: (a) providing a substrate coated with a layer of ion beam resist at a chosen spaced distance from an ion beam source; (b) positioning a thin monocrystalline membrane with an ion absorption mask thereon at a predetermined location between said substrate and said ion beam source; and (c) passing a collimated wide area ion beam normal to the surface of said membrane and through a plurality of crystal lattice channels therein exposed by said ion absorption mask and which extend perpendicular to said membrane surface, whereby the parallel paths established by said channels provide a minimum of membrane resistance to the passage of ion beams and thereby minimize the angle of lateral scattering of ions passing from said membrane to said layer of resist.
Claim 10
Dependent Claim
141 words
A process for improving resolution and minimizing ion scattering in ion beam lithography comprising the steps of: (a) providing a substrate coated with a layer of ion beam resist at a chosen spaced distance from an ion beam source; (b) positioning a thin monocrystalline membrane with an ion absorption mask thereon at a predetermined location between said substrate and said ion beam source; and (c) passing a collimated wide area ion beam normal to the surface of said membrane and through a plurality of crystal lattice channels therein exposed by said ion absorption mask and which extend perpendicular to said membrane surface, whereby the parallel paths established by said channels provide a minimum of membrane resistance to the passage of ion beams and thereby minimize the angle of lateral scattering of ions passing from said membrane to said layer of resist.
Claim 11
Dependent Claim
134 words
A process for improving resolution and minimizing ion scattering in ion beam lithography comprising: (a) providing a substrate coated with a layer of ion beam resist at a chosen spaced distance from an ion beam source; (b) positioning a membrane of monocrystalline silicon less than about 2 micrometers in thickness at a predetermined location between said substrate and said ion beam source, said membrane having a surface parallel to the (110) crystal plane, and having an ion absorption mask thereon; and (c) passing a collimated wide area ion beam normal to the surface of said membrane and through a plurality of crystal lattice channels therein exposed by said ion absorption mask and which extend perpendicular to said membrane surface, whereby the membrane ion travel distance is minimized and the membrane ion transmission is maximized.
Claim 12
Dependent Claim
134 words
A process for improving resolution and minimizing ion scattering in ion beam lithography comprising: (a) providing a substrate coated with a layer of ion beam resist at a chosen spaced distance from an ion beam source; (b) positioning a membrane of monocrystalline silicon less than about 2 micrometers in thickness at a predetermined location between said substrate and said ion beam source, said membrane having a surface parallel to the (110) crystal plane, and having an ion absorption mask thereon; and (c) passing a collimated wide area ion beam normal to the surface of said membrane and through a plurality of crystal lattice channels therein exposed by said ion absorption mask and which extend perpendicular to said membrane surface, whereby the membrane ion travel distance is minimized and the membrane ion transmission is maximized.
Claim 13
Dependent Claim
141 words
A process for improving resolution and minimizing ion scattering in ion beam lithography comprising: (a) providing a substrate coated with a layer of ion beam resist at a chosen spaced distance from an ion beam source; (b) positioning a membrane of monocrystalline silicon less than about 2 micrometers in thickness at a predetermined location between said substrate and said ion beam source, said membrane having a surface parallel to the (110) crystal plane, and containing therein a pattern of opaque regions that form an ion absorption mask; and (c) passing a collimated wide area ion beam normal to the surface of said membrane and through a plurality of crystal lattice channels therein exposed by said ion absorption mask and which extend perpendicular to said membrane surface, whereby the membrane ion travel distance is minimized and the membrane ion transmission is maximized.
Claim 14
Dependent Claim
141 words
A process for improving resolution and minimizing ion scattering in ion beam lithography comprising: (a) providing a substrate coated with a layer of ion beam resist at a chosen spaced distance from an ion beam source; (b) positioning a membrane of monocrystalline silicon less than about 2 micrometers in thickness at a predetermined location between said substrate and said ion beam source, said membrane having a surface parallel to the (110) crystal plane, and containing therein a pattern of opaque regions that form an ion absorption mask; and (c) passing a collimated wide area ion beam normal to the surface of said membrane and through a plurality of crystal lattice channels therein exposed by said ion absorption mask and which extend perpendicular to said membrane surface, whereby the membrane ion travel distance is minimized and the membrane ion transmission is maximized.
Claim 15
Dependent Claim
33 words
The process defined in claim 8 which includes forming said opaque regions in said membrane by selectively bombarding said membrane by chosen heavy ions to thereby form spaced apart ion damaged regions therein.
References Cited (Backward Citations)
No citation records indexed.
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1982-06-11 | 1982-12-11 | 1983-06-12 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1986-06-11 | 1986-12-11 | 1987-06-12 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1990-06-11 | 1990-12-11 | 1991-06-12 | $7700.00 | Window Closed / Lapsed |