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US4154870A Expired / Lapsed US ⏱️ 0.0 years remaining

Silicon production and processing employing a fluidized bed

Assignee: Texas Instruments Inc
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Filing: 1978-01-26
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Granted: 1979-05-15
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Expires: 1998-01-26
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Abstract

Abstract The disclosure relates to formation of polycrystalline silicon by the fluid bed process wherein seed crystals of silicon are entered into the reactor from the bottom thereof and by means of a pressurized feed, the product being removed from the reactor through a tube entering the reactor at its bottommost portion. The removed product passes through a closed line by gravity into a closed vessel, the vessel being movable to a crystal puller apparatus without handling or exposure. The closed line is also tapped, as desired, to remove product on-line for test during operation so that the system can be immediately shut down when improper product is detected without excessive loss of pure polycrystalline silicon. The polycrystalline silicon is fed from the transfer vessel to a melt from which crystals are to be pulled via an intermediate reservoir. The silicon is transferred from the vessel to the reservoir under pressure to prevent contamination thereof.

Inventors

  • 👤 Gene F. Wakefield

Bibliographic Details

Application Number —
Jurisdiction US
Data Source google_patents
Last Synchronized 2026-11-07 01:04
CPC Classifications
C; C01; C01B; C01B33/00; C01B33/02; Y; Y10; Y10S; Y10S118/00; Y10S118/05

Claims Analysis

Total Claims: 8
Claim 1
Independent Claim 183 words
In a process for producing elemental silicon in a high state of purity including the steps of: fluidizing with hydrogen a bed of finely divided particles of pure elemental silicon within a reaction zone maintained at from 750°-1350° C.; passing a vaporous silicon halide reactant stream through a conduit leading into the fluidized bed for reaction with a portion of said hydrogen, the halogen component being taken from the group consisting of a chloride, a bromide and an iodide, to deposit the resulting silicon reaction product on said product; removing vaporous reaction products from said reaction zone; and separately recovering the resulting larger-sized silicon particles formed in said zone; the improvement comprising: (a) pressurizing said reactant stream to 15 to 20 p.s.i. in said conduit; (b) semi-continuously adding seed crystals of silicon to said pressurized stream; then (c) passing the seed-containing reactant stream to a mixing chamber below the bottom region of said fluidized bed where it is combined with said hydrogen; and (d) passing the combined streams into said reaction zone through apertures sufficiently small to prevent larger particles from falling through.
Claim 2
Dependent Claim 183 words
In a process for producing elemental silicon in a high state of purity including the steps of: fluidizing with hydrogen a bed of finely divided particles of pure elemental silicon within a reaction zone maintained at from 750°-1350° C.; passing a vaporous silicon halide reactant stream through a conduit leading into the fluidized bed for reaction with a portion of said hydrogen, the halogen component being taken from the group consisting of a chloride, a bromide and an iodide, to deposit the resulting silicon reaction product on said product; removing vaporous reaction products from said reaction zone; and separately recovering the resulting larger-sized silicon particles formed in said zone; the improvement comprising: (a) pressurizing said reactant stream to 15 to 20 p.s.i. in said conduit; (b) semi-continuously adding seed crystals of silicon to said pressurized stream; then (c) passing the seed-containing reactant stream to a mixing chamber below the bottom region of said fluidized bed where it is combined with said hydrogen; and (d) passing the combined streams into said reaction zone through apertures sufficiently small to prevent larger particles from falling through.
Claim 3
Dependent Claim 16 words
A process as set forth in claim 1 wherein said seed crystals are added under pressure.
Claim 4
Dependent Claim 19 words
A process as set forth in claim 1 wherein said seed crystals are about 10 -2 inches in diameter.
Claim 5
Dependent Claim 19 words
A process as set forth in claim 2 wherein said seed crystals are about 10 -2 inches in diameter.
Claim 6
Dependent Claim 18 words
A process as set forth in claim 2 wherein said pressure is from about 15 to 20 pounds.
Claim 7
Dependent Claim 19 words
A process as set forth in claim 4 wherein said pressure is from about 15 to about 20 pounds.
Claim 8
Dependent Claim 21 words
A process as set forth in claim 1 further including the step of on-line testing of the recovered larger sized silicon.

References Cited (Backward Citations)

US3053648A Cited
US3012862A Cited
US3215522A Cited
US3672980A Cited

USPTO Annuity & Maintenance Windows

Annuity Stage Window Opens Payment Deadline Surcharge Period Until Estimated Fee Status
3.5 Years (Year 4) 1982-05-14 1982-11-13 1983-05-15 $2000.00 Window Closed / Lapsed
7.5 Years (Year 8) 1986-05-14 1986-11-13 1987-05-15 $3760.00 Window Closed / Lapsed
11.5 Years (Year 12) 1990-05-14 1990-11-13 1991-05-15 $7700.00 Window Closed / Lapsed

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