US4151417A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Electron beam exposure apparatus
Assignee: Toshiba Corp
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Filing: 1978-03-31
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Granted: 1979-04-24
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Expires: 1998-03-31
Abstract
Abstract An electron beam exposure apparatus comprises a pair of electrostatic deflecting plates so disposed that the center thereof in the direction of an advancing electron beam emitted from an electron gun is located on the crossover point of said beam, a variable voltage source for said deflecting plates and an aperture disposed in the path of the deflected electron beam.
Inventors
- 👤 Tadahiro Takigawa
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-02 18:30
CPC Classifications
H; H01; H01J; H01J37/00; H01J37/30; H01J37/304; H01J37/3002; H01J37/3007
Claims Analysis
Total Claims: 8
Claim 1
Independent Claim
75 words
An electron beam exposure apparatus comprising an electron beam emitter means, an electrostatic deflecting device so disposed that the center thereof in the direction of the passage of an electron beam emitted from said means is located on the crossover point of said beam, a variable voltage power source for applying voltage to said electrostatic deflecting device and deflecting said electron beam, and an aperture means disposed in the path of the deflected electron beam.
Claim 2
Dependent Claim
75 words
An electron beam exposure apparatus comprising an electron beam emitter means, an electrostatic deflecting device so disposed that the center thereof in the direction of the passage of an electron beam emitted from said means is located on the crossover point of said beam, a variable voltage power source for applying voltage to said electrostatic deflecting device and deflecting said electron beam, and an aperture means disposed in the path of the deflected electron beam.
Claim 3
Dependent Claim
40 words
An electron beam exposure apparatus according to claim 1, wherein said electron beam emitter means includes an electron gun and a condenser lens to converge the electron beam from said electron gun into the center of said electrostatic deflecting device.
Claim 4
Dependent Claim
27 words
An electron beam exposure apparatus according to claim 2 further comprising an object lens for converging the electron beam from said aperture means onto a subject material.
Claim 5
Dependent Claim
33 words
An electron beam exposure apparatus according to claim 3, wherein another electrostatic deflecting device for deflecting the electron beam from said aperture means is disposed between said object lens and said aperture means.
Claim 6
Dependent Claim
29 words
An electron beam exposure apparatus according to claim 4, wherein an electrostatic deflecting device for blanking is further disposed between said aperture means and said another electrostatic deflecting device.
Claim 7
Dependent Claim
23 words
An electron beam exposure apparatus according to claim 1, wherein said electrostatic deflecting device has a pair of deflecting plates facing each other.
Claim 8
Dependent Claim
17 words
An electron beam exposure apparatus according to claim 6, wherein said aperture means has a rectangular aperture.
References Cited (Backward Citations)
US3857041A
Cited
US3876883A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1982-04-23 | 1982-10-23 | 1983-04-24 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1986-04-23 | 1986-10-23 | 1987-04-24 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1990-04-23 | 1990-10-23 | 1991-04-24 | $7700.00 | Window Closed / Lapsed |