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US4150168A
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US
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Method and apparatus for manufacturing high-purity silicon rods
Assignee: Sumco Techxiv Corp
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Filing: 1978-03-02
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Granted: 1979-04-17
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Expires: 1998-03-02
Abstract
Abstract A method of manufacturing high-purity silicon rods by subjecting a silicon compound to pyrolysis on a plurality of rod-shaped high-purity silicon carrier members which have been red-heated by directly passing an electric current therethrough thereby depositing high-purity silicon thereon, characterized in that monosilane supplied into a pyrolysis container is subjected to pyrolysis or thermal decomposition on said red-heated carrier members while insulating the radiant heat between said red-heated carrier members along the overall length thereof.
Inventors
- 👤 Yoshifumi Yatsurugi
- 👤 Atsushi Yusa
- 👤 Nagao Takahashi
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-04 19:46
CPC Classifications
C; C01; C01B; C01B33/00; C01B33/02; C01B33/021; C01B33/027; C01B33/035; C23; C23C; C23C16/00; C23C16/22; C23C16/44; C23C16/46
Claims Analysis
Total Claims: 7
Claim 1
Independent Claim
71 words
A method of manufacturing high-purity, silicon rods by subjecting a silicon compound to pyrolysis on a plurality of rod-shaped high-purity silicon carrier members which have been red-heated by directly passing an electric current therethrough thereby depositing high-purity silicon thereon, characterized in that monosilane supplied into a pyrolysis container is subjected to pyrolysis on said red-heated carrier members while insulating the radiation heat between said carrier members along the overall length thereof.
Claim 2
Independent Claim
71 words
A method of manufacturing high-purity, silicon rods by subjecting a silicon compound to pyrolysis on a plurality of rod-shaped high-purity silicon carrier members which have been red-heated by directly passing an electric current therethrough thereby depositing high-purity silicon thereon, characterized in that monosilane supplied into a pyrolysis container is subjected to pyrolysis on said red-heated carrier members while insulating the radiation heat between said carrier members along the overall length thereof.
Claim 3
Dependent Claim
32 words
The method as claimed in claim 1, wherein said plurality of red-heated high-purity silicon carrier members are subjected to thermal insulation by a thermal insulator located at equal space intervals from them.
Claim 4
Dependent Claim
25 words
The method as claimed in claim 1, wherein each of said plurality of red-heated, high-purity silicon carrier members is thermally insulated by a thermal insulator.
Claim 5
Dependent Claim
28 words
The method as claimed in claim 1, wherein monosilane is supplied into a pyrolysis container through leading ends of each of thermally insulating plates of the thermal insulator.
Claim 6
Dependent Claim
36 words
The method as claimed in claim 4, wherein monosilane is supplied into a pyrolysis container through upper, intermediate and lower stage supply ports formed at the leading ends of thermal insulating plates of the thermal insulator.
Claim 7
Dependent Claim
23 words
The method as claimed in claim 5, wherein monosilane is supplied in equal amounts through the upper, intermediate and lower monosilane supply ports.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1982-04-16 | 1982-10-16 | 1983-04-17 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1986-04-16 | 1986-10-16 | 1987-04-17 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1990-04-16 | 1990-10-16 | 1991-04-17 | $7700.00 | Window Closed / Lapsed |