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Method for enhancing the crystallization rate of high purity amorphous Si3 N4 powder, powders produced thereby and products therefrom

Assignee: GTE Sylvania Inc
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Filing: 1974-11-22
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Granted: 1979-03-20
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Expires: 1994-11-22
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Abstract

Abstract High purity, fine Si 3 N 4 powder produced by the vapor phase reaction of SiCl 4 with NH 3 is amorphous. The crystallization rate of the amorphous powder is enhanced by heating the powder while in intimate contact with a titanium containing material, for example, TiN codeposited with the Si 3 N 4 by the simultaneous reaction of TiCl 4 with NH 3 .

Inventors

  • 👤 Emil J. Mehalchick
  • 👤 Richard N. Kleiner

Bibliographic Details

Application Number —
Jurisdiction US
Data Source google_patents
Last Synchronized 2026-10-28 22:22
CPC Classifications
C; C01; C01B; C01B21/00; C01B21/06; C01B21/068; C01B21/0687; C04; C04B; C04B35/00; C04B35/515; C04B35/58; C04B35/584; C04B35/593; C01P; C01P2002/00; C01P2002/02; C01P2006/00; C01P2006/80

Claims Analysis

Total Claims: 6
Claim 1
Independent Claim 32 words
Si 3 N 4 powder having particles up to 1.0 microns in size, having a purity of at least 99.9 percent, and characterized by additionally containing at least 0.01 weight percent titanium.
Claim 2
Dependent Claim 32 words
Si 3 N 4 powder having particles up to 1.0 microns in size, having a purity of at least 99.9 percent, and characterized by additionally containing at least 0.01 weight percent titanium.
Claim 3
Dependent Claim 21 words
The powder of claim 1 wherein titanium is present in the amount of from about one half to five weight percent.
Claim 4
Dependent Claim 43 words
A polycrystalline body consisting essentially of Si 3 N 4 having a purity of at least 99.9 percent and a density of at least 60 percent of theoretical density, characterized in that said polycrystalline body additionally contains at least 0.01 weight percent titanium.
Claim 5
Dependent Claim 43 words
A polycrystalline body consisting essentially of Si 3 N 4 having a purity of at least 99.9 percent and a density of at least 60 percent of theoretical density, characterized in that said polycrystalline body additionally contains at least 0.01 weight percent titanium.
Claim 6
Dependent Claim 23 words
Polycrystalline body of claim 3 characterized by the presence of titanium in the amount of from about one half to five weight percent.

References Cited (Backward Citations)

US2618565A Cited
US3253886A Cited
US3110589A Cited
GB1028977A Cited
US3211527A Cited
US3352637A Cited
FR2003568A1 Cited
GB1199811A Cited

USPTO Annuity & Maintenance Windows

Annuity Stage Window Opens Payment Deadline Surcharge Period Until Estimated Fee Status
3.5 Years (Year 4) 1982-03-19 1982-09-18 1983-03-20 $2000.00 Window Closed / Lapsed
7.5 Years (Year 8) 1986-03-19 1986-09-18 1987-03-20 $3760.00 Window Closed / Lapsed
11.5 Years (Year 12) 1990-03-19 1990-09-18 1991-03-20 $7700.00 Window Closed / Lapsed

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