Patent US4139773A successfully refreshed from Google Patents.
US4139773A
Expired / Lapsed
US
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Method and apparatus for producing bright high resolution ion beams
Assignee: FEI Co
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Filing: 1977-11-04
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Granted: 1979-02-13
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Expires: 1997-11-04
Abstract
Abstract A field ionization source includes a <110> oriented iridium emitter, the tip of which is initially built up in the <110> direction. A negative voltage is applied to the emitter after the emitter has been heated to approximately 2000° C; thereafter, the emitter is cooled to approximately 1200° C. Crystalline buildup of the pointed iridium tip occurs in the <110> direction. After buildup has occurred, the emitter is cooled sufficiently to "freeze" the tip in the built up configuration. The negative voltage is then removed. A gas containing molecules to be ionized is differentially pumped at relatively high pressure through a tube into a region immediately around the emitter tip enclosed by a cathode cap having an aperture through which the ion beam is accelerated. The iridium emitter is mounted in thermal contact with a liquid nitrogen reservoir, which maintains the emitter at near-cryogenic temperatures. The gaseous source of molecules is also maintained in thermal contact with the liquid nitrogen reservoir which cools the gas to near-cryogenic temperatures. A positive voltage of sufficient magnitude to cause ionization of molecules from the gas is applied to the emitter with respect to the cathode cap. The ions are accelerated through the aperture of the cathode cap by the electric field between the emitter and the cathode cap, thereby forming the ion beam.
Inventors
- 👤 Lynwood W. Swanson
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-02 12:58
CPC Classifications
H; H01; H01J; H01J27/00; H01J27/02; H01J27/26; H01J2237/00; H01J2237/06; H01J2237/08; H01J2237/0802; H01J2237/0807
Claims Analysis
Total Claims: 25
Claim 1
Independent Claim
187 words
A method for producing a high intensity beam of ions from a gas substantially confined within a region bounded by a conductive enclosing means having an aperture therein, said method including the steps of: (a) heating an oriented crystalline emitter of <110> iridium within the region to cause substantial surface mobility of iridium atoms at the tip of said emitter; (b) applying a first voltage of sufficient negative potential with respect to the enclosing means to said emitter to cause <110> build-up of the tip of said emitter; (c) cooling said emitter to inhibit substantial surface mobility of iridium atoms at the tip of said emitter; (d) maintaining the gas in an immediate region surrounding the tip of said emitter at a sufficiently high pressure and a sufficiently low temperature to increase the supply of low energy gas molecules available for ionization in said immediate region; and (e) applying a second voltage of sufficient negative potential with respect to the closing means to said emitter to ionize molecules of the gas in said immediate region and accelerate the resultant ions through the aperture in the enclosing means.
Claim 2
Independent Claim
187 words
A method for producing a high intensity beam of ions from a gas substantially confined within a region bounded by a conductive enclosing means having an aperture therein, said method including the steps of: (a) heating an oriented crystalline emitter of <110> iridium within the region to cause substantial surface mobility of iridium atoms at the tip of said emitter; (b) applying a first voltage of sufficient negative potential with respect to the enclosing means to said emitter to cause <110> build-up of the tip of said emitter; (c) cooling said emitter to inhibit substantial surface mobility of iridium atoms at the tip of said emitter; (d) maintaining the gas in an immediate region surrounding the tip of said emitter at a sufficiently high pressure and a sufficiently low temperature to increase the supply of low energy gas molecules available for ionization in said immediate region; and (e) applying a second voltage of sufficient negative potential with respect to the closing means to said emitter to ionize molecules of the gas in said immediate region and accelerate the resultant ions through the aperture in the enclosing means.
Claim 3
Dependent Claim
21 words
The method of claim 1 further including the step of removing contaminants from said emitter prior to applying said first voltage.
Claim 4
Dependent Claim
23 words
The method of claim 2 wherein said removing step further includes introducing oxygen into said immediate region surrounding the tip of said emitter.
Claim 5
Dependent Claim
15 words
The method of claim 1 wherein the order of steps (a) and (b) is reversed.
Claim 6
Dependent Claim
60 words
The method of claim 1 wherein a portion of the gas in the enclosing means escapes through the aperture into a vacuum chamber, the method comprising the step of maintaining the total gas pressure in the vacuum chamber at a sufficiently low pressure to avoid interference of the gas in the vacuum chamber with the high intensity beam of ions.
Claim 7
Dependent Claim
23 words
The method of claim 1 wherein the gas in said immediate region surrounding the tip of said emitter is maintained at near-cryogenic temperatures.
Claim 8
Dependent Claim
16 words
The method of claim 6 wherein said emitter, subsequent to buildup, is maintained at near-cryogenic temperatures.
Claim 9
Dependent Claim
37 words
The method of claim 5 further including the step of focusing a portion of the high intensity beam of ions in said vacuum chamber into a spot less than 3,000 Angstrom units in diameter onto a target.
Claim 10
Dependent Claim
22 words
The method of claim 8 wherein said focusing step is performed by utilizing an electrostatic lens system positioned in said vacuum chamber.
Claim 11
Dependent Claim
13 words
The method of claim 1 wherein said emitter is maintained at near-cryogenic temperatures.
Claim 12
Dependent Claim
63 words
The method of claim 1 including the step of maintaining the pressure of the gas immediately surrounding said emitter and the temperature of said emitter and said gas immediately surrounding said emitter at levels conducive to the formation of a liquid film of molecules from said gas on said emitter, thereby increasing the supply of ionizable molecules at the tip of said emitter.
Claim 13
Dependent Claim
209 words
An improved ionization source for producing a stable, reproduceable, high intensity beam of ions from gaseous molecules, said ionization source comprising in combination: (a) an oriented crystalline emitter of <110> iridium having a longitudinally extending pointed tip; (b) conductive means for substantially enclosing a region immediately surrounding said emitter including a limited aperture axially aligned with the longitudinally extending tip of said emitter; (c) means for heating said emitter to a temperature sufficient to cause substantial surface mobility of the iridium atoms at the tip of said emitter; (d) means for applying a first voltage of sufficient negative potential with respect to said conductive means to said emitter to cause <110> build-up of the tip of said emitter; (e) means for introducing a gas into the region immediately surrounding said emitter and for maintaining said gas at a pressure sufficiently high to increase the supply of gas molecules available for ionization; (f) means for cooling said emitter and said gas to near-cryogenic temperatures; and (g) means for applying a second voltage of sufficient negative potential with respect to said conductive means to said emitter to ionize molecules of said gas in the region immediately surrounding said emitter and accelerate the resultant ions through the aperture in said conductive means.
Claim 14
Dependent Claim
209 words
An improved ionization source for producing a stable, reproduceable, high intensity beam of ions from gaseous molecules, said ionization source comprising in combination: (a) an oriented crystalline emitter of <110> iridium having a longitudinally extending pointed tip; (b) conductive means for substantially enclosing a region immediately surrounding said emitter including a limited aperture axially aligned with the longitudinally extending tip of said emitter; (c) means for heating said emitter to a temperature sufficient to cause substantial surface mobility of the iridium atoms at the tip of said emitter; (d) means for applying a first voltage of sufficient negative potential with respect to said conductive means to said emitter to cause <110> build-up of the tip of said emitter; (e) means for introducing a gas into the region immediately surrounding said emitter and for maintaining said gas at a pressure sufficiently high to increase the supply of gas molecules available for ionization; (f) means for cooling said emitter and said gas to near-cryogenic temperatures; and (g) means for applying a second voltage of sufficient negative potential with respect to said conductive means to said emitter to ionize molecules of said gas in the region immediately surrounding said emitter and accelerate the resultant ions through the aperture in said conductive means.
Claim 15
Dependent Claim
213 words
A field ion gun for producing a high intensity ion beam from gaseous molecules and for providing high resolution focusing of a portion of said in beam onto a predetermined spot, said gun comprising in combination: (a) an oriented crystalline emitter having a longitudinally extending pointed tip; (b) conductive means for substantially enclosing a region immediately surrounding said emitter including a limited aperture axially aligned with the longitudinally extending tip of said emitter; (c) means for introducing gas into the region immediately surrounding said emitter; (d) means for cooling said emitter and said gas to near-cryogenic temperatures; (e) means for maintaining said gas in said immediate region at sufficiently high pressure to increase the supply of said molecules available for ionization; (f) means for applying a first voltage of sufficient potential with respect to said conductive means to said emitter to ionize molecules of said gas in the region immediately surrounding said emitter and accelerate the resultant ions through the aperture in said conductive means to form the high intensity ion beam; and (g) an electrostatic lens system enclosed in a low pressure chamber for receiving the ion beam and focusing a portion of the ion beam onto a predetermined spot in response to selected control signals imposed upon said electrostatic lens system.
Claim 16
Dependent Claim
213 words
A field ion gun for producing a high intensity ion beam from gaseous molecules and for providing high resolution focusing of a portion of said in beam onto a predetermined spot, said gun comprising in combination: (a) an oriented crystalline emitter having a longitudinally extending pointed tip; (b) conductive means for substantially enclosing a region immediately surrounding said emitter including a limited aperture axially aligned with the longitudinally extending tip of said emitter; (c) means for introducing gas into the region immediately surrounding said emitter; (d) means for cooling said emitter and said gas to near-cryogenic temperatures; (e) means for maintaining said gas in said immediate region at sufficiently high pressure to increase the supply of said molecules available for ionization; (f) means for applying a first voltage of sufficient potential with respect to said conductive means to said emitter to ionize molecules of said gas in the region immediately surrounding said emitter and accelerate the resultant ions through the aperture in said conductive means to form the high intensity ion beam; and (g) an electrostatic lens system enclosed in a low pressure chamber for receiving the ion beam and focusing a portion of the ion beam onto a predetermined spot in response to selected control signals imposed upon said electrostatic lens system.
Claim 17
Dependent Claim
31 words
The field ion gun of claim 13 wherein the material of said oriented crystalline emitter is selected from the group consisting of <110> iridium, <100> tungsten, <111> tantalum, and <100> molybdenum.
Claim 18
Dependent Claim
24 words
The field ion gun of claim 13 wherein said cooling means includes a reservoir for containing a cold liquified gas coolant at near-cryogenic temperatures.
Claim 19
Dependent Claim
43 words
The field ion gun of claim 15 wherein said gas introducing means includes a tube coupled between a regulated high pressure source of said gas and said conductive means and wherein said tube passes through said liquified gas coolant to cool said gas.
Claim 20
Dependent Claim
43 words
The field ion gun of claim 14 wherein said conductive means is attached to and sealed with respect to said reservoir and is attached to said gas introducing means to maintain said gas at high pressure in the region immediately surrounding said emitter.
Claim 21
Dependent Claim
28 words
The field ion gun of claim 13 further including means aligned with said electrostatic lens system for supporting and positioning a target whereon said predetermined slot is located.
Claim 22
Dependent Claim
36 words
The field ion gun of claim 18 further including sensing means aligned with said target for sensing secondary electrons emitted by said target in response to the striking of said target by the focused ion beam.
Claim 23
Dependent Claim
16 words
The field ion gun of claim 19 wherein said sensing means includes a secondary electron detector.
Claim 24
Dependent Claim
58 words
The field ion gun of claim 14 further including control means for adjusting the pressure of said gas to cause a liquid film of molecules of said gas to form on said emitter, thereby increasing the availability of ionization ions at the pointed tip of said emitter because of the higher mobility of molecules in said liquid film.
Claim 25
Dependent Claim
35 words
The field ion gun of claim 19 further including display means responsive to said sensing means and to the control signal for displaying a pattern traced by the selectively deflected ion beam on the target.
References Cited (Backward Citations)
US3405263A
Cited
US3809899A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1982-02-12 | 1982-08-14 | 1983-02-13 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1986-02-12 | 1986-08-14 | 1987-02-13 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1990-02-12 | 1990-08-14 | 1991-02-13 | $7700.00 | Window Closed / Lapsed |