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US4135094A
Expired / Lapsed
US
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Method and apparatus for rejuvenating ion sources
Assignee: EIDP Inc
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Filing: 1977-07-27
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Granted: 1979-01-16
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Expires: 1997-07-27
Abstract
Abstract Ion sources which become coated with insulative materials are rejuvenated by forming the repeller electrode in the ion source of gold and bombarding such repeller electrode with ions to sputter the gold onto the coated surfaces to render them conductive again. Gold sputtering is accomplished by bombarding the gold repeller electrode with inert argon ions. To perform this method, the slit of the extractor plate on the ion source is greatly reduced in cross-sectional area such that the normally higher sputtering pressures may be maintained within the ion source itself. If a direct sample probe is used, it too may be formed of gold and used to provide the gold sputtering source.
Inventors
- 👤 Charles W. Hull
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-29 20:58
CPC Classifications
H; H01; H01J; H01J49/00; H01J49/02; H01J49/10; H01J49/14
Claims Analysis
Total Claims: 14
Claim 1
Independent Claim
98 words
A method of rejuvenating an ion source having cathode and anode electrodes and a sample inlet comprising the steps of: introducing an ionizing gas through said inlet to obtain a suitable sputtering pressure in said source; forming said anode electrode of a sputtering metal, said sputtering metal being gold metal; ionizing said ionizing gas to form ions; and applying a negative electrical potential to said anode electrode such that it is more negative than the remainder of said source, thereby to bombard said anode electrode with said ions to sputter said metal onto the interior of said source.
Claim 2
Independent Claim
98 words
A method of rejuvenating an ion source having cathode and anode electrodes and a sample inlet comprising the steps of: introducing an ionizing gas through said inlet to obtain a suitable sputtering pressure in said source; forming said anode electrode of a sputtering metal, said sputtering metal being gold metal; ionizing said ionizing gas to form ions; and applying a negative electrical potential to said anode electrode such that it is more negative than the remainder of said source, thereby to bombard said anode electrode with said ions to sputter said metal onto the interior of said source.
Claim 3
Dependent Claim
12 words
A method according to claim 1 wherein said ionizing gas is argon.
Claim 4
Dependent Claim
114 words
In an ion source having a vacuum chamber, an inlet to said chamber for introducing a sample gas into said chamber, electrode means for withdrawing ions from said chamber, and means for ionizing said gas, the improvement comprising: means for introducing an ionizing gas into said chamber, said ionizing gas being argon; means to evacuate said chamber to an ion sputtering pressure in the presence of said ionizing gas; a gold metal sputtering electrode in said chamber; and means for applying an ion accelerating potential between said chamber and said sputtering electrode that causes ions to impinge on said sputtering electrode for sputtering said sputtering electrode metal onto the interior surfaces of said chamber.
Claim 5
Dependent Claim
114 words
In an ion source having a vacuum chamber, an inlet to said chamber for introducing a sample gas into said chamber, electrode means for withdrawing ions from said chamber, and means for ionizing said gas, the improvement comprising: means for introducing an ionizing gas into said chamber, said ionizing gas being argon; means to evacuate said chamber to an ion sputtering pressure in the presence of said ionizing gas; a gold metal sputtering electrode in said chamber; and means for applying an ion accelerating potential between said chamber and said sputtering electrode that causes ions to impinge on said sputtering electrode for sputtering said sputtering electrode metal onto the interior surfaces of said chamber.
Claim 6
Dependent Claim
128 words
In an ion source having a vacuum chamber, an inlet to said chamber for introducing a sample gas into said chamber, electrode means for withdrawing ions from said chamber, and means for ionizing said gas, the improvement comprising: means for introducing an ionizing gas into said chamber; means to evacuate said chamber to an ion sputtering pressure in the presence of said ionizing gas; a metal sputtering electrode in said chamber; and means for applying an ion accelerating potential between said chamber and said sputtering electrode that causes ions to impinge on said sputtering electrode for sputtering said sputtering electrode metal onto the interior surfaces of said chamber, said chamber having a sample probe for introducing a solid sample into said chamber, said probe forming said sputtering electrode.
Claim 7
Dependent Claim
128 words
In an ion source having a vacuum chamber, an inlet to said chamber for introducing a sample gas into said chamber, electrode means for withdrawing ions from said chamber, and means for ionizing said gas, the improvement comprising: means for introducing an ionizing gas into said chamber; means to evacuate said chamber to an ion sputtering pressure in the presence of said ionizing gas; a metal sputtering electrode in said chamber; and means for applying an ion accelerating potential between said chamber and said sputtering electrode that causes ions to impinge on said sputtering electrode for sputtering said sputtering electrode metal onto the interior surfaces of said chamber, said chamber having a sample probe for introducing a solid sample into said chamber, said probe forming said sputtering electrode.
Claim 8
Dependent Claim
13 words
An ion source according to claim 4 wherein said sputtering electrode is gold.
Claim 9
Dependent Claim
25 words
An ion source according to claim 5 wherein said chamber includes two sample inlets, one for said sample probe and one for said sample gas.
Claim 10
Dependent Claim
19 words
An ion source according to claim 6 wherein said sputtering electrode normally is a repeller electrode for said source.
Claim 11
Dependent Claim
30 words
An ion source according to claim 7 wherein said electrode means seals said chamber and forms a slit of reduced cross-sectional area to maintain said sputtering pressure in said chamber.
Claim 12
Dependent Claim
140 words
In an ion source having a vacuum chamber, an inlet to said chamber for introducing a sample gas into said chamber, electrode means for withdrawing ions from said chamber, and means for ionizing said gas, the improvement comprising: means for introducing an ionizing gas into said chamber; means to evacuate said chamber to an ion sputtering pressure in the presence of said ionizing gas; a metal sputtering electrode in said chamber; and means for applying an ion accelerating potential between said chamber and said sputtering electrode that causes ions to impinge on said sputtering electrode for sputtering said sputtering electrode metal onto the interior surfaces of said chamber, said ion source being part of a mass analyzer having ion deflecting elements, said mass analyzer having electrical heating means for evaporating a metal, thereby to coat said elements with said metal.
Claim 13
Dependent Claim
140 words
In an ion source having a vacuum chamber, an inlet to said chamber for introducing a sample gas into said chamber, electrode means for withdrawing ions from said chamber, and means for ionizing said gas, the improvement comprising: means for introducing an ionizing gas into said chamber; means to evacuate said chamber to an ion sputtering pressure in the presence of said ionizing gas; a metal sputtering electrode in said chamber; and means for applying an ion accelerating potential between said chamber and said sputtering electrode that causes ions to impinge on said sputtering electrode for sputtering said sputtering electrode metal onto the interior surfaces of said chamber, said ion source being part of a mass analyzer having ion deflecting elements, said mass analyzer having electrical heating means for evaporating a metal, thereby to coat said elements with said metal.
Claim 14
Dependent Claim
12 words
An ion source according to claim 9 wherein said metal is gold.
References Cited (Backward Citations)
US3393339A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1982-01-15 | 1982-07-17 | 1983-01-16 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1986-01-15 | 1986-07-17 | 1987-01-16 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1990-01-15 | 1990-07-17 | 1991-01-16 | $7700.00 | Window Closed / Lapsed |