US4132479A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Pattern transfer optical system
Assignee: Thales SA
•
Filing: 1977-12-07
•
Granted: 1979-01-02
•
Expires: 1997-12-07
Abstract
Abstract The invention relates to optical systems intended for the transfer of patterns onto a photosensitive surface. The system according to the invention comprises a source of coherent radiation which is intended to illuminate the photosensitive surface for a predetermined duration and which is associated with transmission means introducing a wavefront modulation of the radiation intended to average during the exposure time, the interference fringes produced by the coherence of the radiation.
Inventors
- 👤 Georges Dubroeucq
- 👤 Michael Lacombat
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-28 02:37
CPC Classifications
G; G03; G03F; G03F7/00; G03F7/70; G03F7/70483; G03F7/7055; G03F7/70583; H; H05; H05K; H05K3/00; H05K3/0073; H05K3/0082
Claims Analysis
Total Claims: 18
Claim 1
Independent Claim
101 words
A pattern transfer optical system for forming onto a support coated with a layer of photosensitive material an image of a pattern carried by an object of non uniform transparency, said system comprising illumination means illuminating said object for supplying an exposure of predetermined duration; said illumination means comprising a source of coherent light and optical modulation means; said optical modulation means comprising a moving element imparting to the luminous radiation transmitted from said source to said object wavefront fluctuations of short duration as compared to said duration, thereby averaging unwanted fringe patterns created in said layer by said coherent light.
Claim 2
Dependent Claim
101 words
A pattern transfer optical system for forming onto a support coated with a layer of photosensitive material an image of a pattern carried by an object of non uniform transparency, said system comprising illumination means illuminating said object for supplying an exposure of predetermined duration; said illumination means comprising a source of coherent light and optical modulation means; said optical modulation means comprising a moving element imparting to the luminous radiation transmitted from said source to said object wavefront fluctuations of short duration as compared to said duration, thereby averaging unwanted fringe patterns created in said layer by said coherent light.
Claim 3
Dependent Claim
28 words
A system as claimed in claim 1, wherein said moving element is planar; a movement relative to the illuminating beam being imparted to said element in its plane.
Claim 4
Dependent Claim
39 words
A system as claimed in claim 2, wherein said moving element has a centre of rotation and is traversed by said beam outside said centre, said fluctuations being caused by the rotation of said moving element about said centre.
Claim 5
Dependent Claim
24 words
A system as claimed in claim 2, wherein the movement of said element is created by the vibration of said element in its plane.
Claim 6
Dependent Claim
15 words
A system as claimed in claim 2, wherein said moving element is a scattering element.
Claim 7
Dependent Claim
16 words
A system as claimed in claim 2, wherein said moving element is a phase-modulating transparent element.
Claim 8
Dependent Claim
13 words
A system as claimed in claim 1, wherein said source is a laser.
Claim 9
Dependent Claim
30 words
A system as claimed in claim 1, wherein said predetermined duration is controlled by a device which enables a predetermined quantity of exposure energy to be collected by said support.
Claim 10
Dependent Claim
24 words
A system as claimed in claim 8, wherein said device comprises a photodetecting probe collecting a fraction of the radiation transmitted to said object.
Claim 11
Dependent Claim
28 words
A system as claimed in claim 8, wherein said device acts on a shutter disposed in the path of said luminous radiation between said source and said object.
Claim 12
Dependent Claim
32 words
A system as claimed in claim 7, wherein said laser is a pulsed laser controlled by a device which enables a predetermined quantity of exposure energy to be collected by said support.
Claim 13
Dependent Claim
25 words
A system as claimed in claim 1, wherein a lens of predetermined magnification is disposed between said object and said support for imaging said pattern.
Claim 14
Dependent Claim
29 words
A system as claimed in claim 12, further comprising step and repeat means for moving said support so as to form said image repetitively according to a predetermined arrangement.
Claim 15
Dependent Claim
23 words
A system as claimed in claim 1, further comprising means for bringing said object into contact with said support during said predetermined duration.
Claim 16
Dependent Claim
25 words
A system as claimed in claim 1, further comprising means for keeping said object in the immediate proximity of said support during said predetermined duration.
Claim 17
Dependent Claim
19 words
A system as claimed in claim 1, wherein said support is a semiconductor substrate coated with a photosensitive resin.
Claim 18
Dependent Claim
14 words
A system as claimed in claim 1, wherein said support is a photographic plate.
References Cited (Backward Citations)
US3407294A
Cited
US3988066A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1982-01-01 | 1982-07-03 | 1983-01-02 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1986-01-01 | 1986-07-03 | 1987-01-02 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1990-01-01 | 1990-07-03 | 1991-01-02 | $7700.00 | Window Closed / Lapsed |