US4126712A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Method of transferring a surface relief pattern from a wet poly(olefin sulfone) layer to a metal layer
Assignee: RCA Corp
•
Filing: 1976-07-30
•
Granted: 1978-11-21
•
Expires: 1996-07-30
Abstract
Abstract This invention pertains to a method for forming a surface relief pattern in a metal layer which comprises forming a wet poly(olefin sulfone) layer on the metal layer, forming a surface relief pattern in the wet poly(olefin sulfone) layer, and sputter etching the surface relief pattern from the wet poly(olefin sulfone) layer into the metal layer.
Inventors
- 👤 Eugene S. Poliniak
- 👤 Nitin V. Desai
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-24 04:24
CPC Classifications
G; G03; G03F; G03F7/00; G03F7/004; G03F7/039; G03F7/26; Y; Y10; Y10S; Y10S428/00; Y10S428/914
Claims Analysis
Total Claims: 7
Claim 1
Independent Claim
96 words
A method for forming a surface relief pattern in a metal layer which comprises: a. dissolving a poly(olefin sulfone) in a solvent; b. applying the resultant solution to a metal layer to form a wet poly(olefin sulfone) layer on the metal layer; c. exposing the wet poly(olefin sulfone) layer to a modulated beam of electrons; d. developing the exposed wet poly(olefin sulfone) layer to form a surface relief pattern; and e. bombarding the developed surface with sufficient ions to substantially remove the wet poly(olefin sulfone) layer and form the surface relief pattern in the metal layer.
Claim 2
Independent Claim
96 words
A method for forming a surface relief pattern in a metal layer which comprises: a. dissolving a poly(olefin sulfone) in a solvent; b. applying the resultant solution to a metal layer to form a wet poly(olefin sulfone) layer on the metal layer; c. exposing the wet poly(olefin sulfone) layer to a modulated beam of electrons; d. developing the exposed wet poly(olefin sulfone) layer to form a surface relief pattern; and e. bombarding the developed surface with sufficient ions to substantially remove the wet poly(olefin sulfone) layer and form the surface relief pattern in the metal layer.
Claim 3
Dependent Claim
22 words
A method according to claim 1 wherein the poly(olefin sulfone) is selected from the group consisting of poly(3-methyl-1-cyclopentene sulfone) and poly(3-ethyl-1-cyclopentene sulfone).
Claim 4
Dependent Claim
19 words
A method according to claim 1 wherein the wet polymer layer is from about 0.3 to 1.0 micron thick.
Claim 5
Dependent Claim
22 words
A method according to claim 1 wherein the metal layer is selected from the group consisting of gold, copper, aluminum, and nickel.
Claim 6
Dependent Claim
15 words
A method according to claim 1 wherein the metal layer is formed on a substrate.
Claim 7
Dependent Claim
18 words
A method according to claim 5 wherein the metal layer is from about 1,000 to 4,000 angstroms thick.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1981-11-20 | 1982-05-22 | 1982-11-21 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1985-11-20 | 1986-05-22 | 1986-11-21 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1989-11-20 | 1990-05-22 | 1990-11-21 | $7700.00 | Window Closed / Lapsed |