Patent US4118630A successfully refreshed from Google Patents.
US4118630A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Ion implantation apparatus with a cooled structure controlling the surface potential of a target surface
Assignee: International Business Machines Corp
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Filing: 1977-05-05
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Granted: 1978-10-03
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Expires: 1997-05-05
Abstract
Abstract In an ion beam apparatus a structure for controlling the surface potential of the target comprising an electron source adjacent to the beam for providing electrons to the beam and means between the target and source for inhibiting rectilinear radiations, i.e., electron and other particle and photon radiations between said source and said target. This prevents heating of the target by the electron source and cross-contamination between the source and the target. The apparatus further includes means for maintaining said shield means at a lower temperature than said target. A further structure is provided for the measurement of the ion beam current while controlling said surface potential of the target which includes: walls adjacent to and electrically insulated from the target and surrounding the beam whereby the walls and target provide a Faraday Cage, means for introducing variable quantities of electrons into the beam within the Faraday Cage, means for measuring the target current, means for combining and measuring the target and wall currents to provide said ion beam current measurement and means for varying the quantities of introduced electrons to control the target current and thereby the target surface potential. Likewise, this apparatus further includes means for maintaining said shielding means at a temperature lower than said target.
Inventors
- 👤 Charles M. McKenna
- 👤 Wolfgang F. Mueller
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-29 18:17
CPC Classifications
H; H01; H01J; H01J37/00; H01J37/02; H01J37/244; H01J37/026; H01J2237/00; H01J2237/244; H01J2237/24405; H01J2237/245; H01J2237/24507
Claims Analysis
Total Claims: 12
Claim 1
Independent Claim
77 words
In apparatus for bombarding a target with a beam of ions, a structure for controlling the surface charge of the target comprising an electron source adjacent to the ion beam for providing electrons to said beam for providing netulralizing space charge to said beam, means between said target and said electron source for inhibiting direct rectilinear radiations between said source and said target, and means for maintaining said inhibiting means at a lower temperature than said target.
Claim 2
Dependent Claim
77 words
In apparatus for bombarding a target with a beam of ions, a structure for controlling the surface charge of the target comprising an electron source adjacent to the ion beam for providing electrons to said beam for providing netulralizing space charge to said beam, means between said target and said electron source for inhibiting direct rectilinear radiations between said source and said target, and means for maintaining said inhibiting means at a lower temperature than said target.
Claim 3
Dependent Claim
13 words
The apparatus of claim 1 wherein said electron source is a heated source.
Claim 4
Dependent Claim
14 words
The apparatus of claim 2 wherein said electron source is a heated filament source.
Claim 5
Dependent Claim
28 words
The apparatus of claim 2 wherein said means for maintaining said inhibiting means at said lower temperature include means for providing a fluid coolant to said inhibiting means.
Claim 6
Dependent Claim
49 words
The apparatus of claim 2 wherein said inhibiting means include a wall between said target and source shielding the target from said radiations, said wall having conduits formed therein, and means for providing a fluid coolant to said conduits, said coolant and conduit means providing lower temperature maintaining means.
Claim 7
Dependent Claim
140 words
In apparatus for bombarding a target with a beam of ions, a structure for measuring the ion beam current and controlling the surface charge of the target comprising: walls adjacent to and electrically insulated from said target and surrounding said beam whereby said walls and target provide a Faraday Cage, means for providing variable quantities of electrons within said Faraday Cage, means within said cage between said target and said electron source for inhibiting direct rectilinear radiations between said source and said target, means for maintaining said inhibiting means at a lower temperature than said target, means for measuring the target current, means for combining and measuring the target and the wall currents to provide said ion beam current measurement, and means for varying said quantities of provided electrons to control said target surface charge and thereby said target current.
Claim 8
Dependent Claim
140 words
In apparatus for bombarding a target with a beam of ions, a structure for measuring the ion beam current and controlling the surface charge of the target comprising: walls adjacent to and electrically insulated from said target and surrounding said beam whereby said walls and target provide a Faraday Cage, means for providing variable quantities of electrons within said Faraday Cage, means within said cage between said target and said electron source for inhibiting direct rectilinear radiations between said source and said target, means for maintaining said inhibiting means at a lower temperature than said target, means for measuring the target current, means for combining and measuring the target and the wall currents to provide said ion beam current measurement, and means for varying said quantities of provided electrons to control said target surface charge and thereby said target current.
Claim 9
Dependent Claim
14 words
The apparatus of claim 6 wherein said electron source is a heated filament source.
Claim 10
Dependent Claim
65 words
The apparatus of claim 7 wherein said walls have at least one recess formed therein and said electron source is so positioned in said recess that the portion of said walls defining said recess shield said target from said source, and said lower temperature maintaining means comprises conduits formed in said walls adjacent said recess and means for providing a fluid coolant to said conduits.
Claim 11
Dependent Claim
130 words
In the method of measuring the beam current of a beam of charged ions bombarding a target by a Faraday Cage formed by said target and the walls adjacent to the target, the method of further controlling the surface charge of the target comprising electrically insulating said target from said walls, providing electrons from a heated source within said Faraday Cage, inhibiting direct rectilinear radiations between said electron source and said target, maintaining said inhibiting means at a lower temperature than said target, measuring the target current, combining and measuring the target and the wall currents to provide said ion beam current measurement, and varying said quantities of provided electrons to provide neturalizing space charge to said ion beam to control said target surface charge and thereby said target current.
Claim 12
Dependent Claim
130 words
In the method of measuring the beam current of a beam of charged ions bombarding a target by a Faraday Cage formed by said target and the walls adjacent to the target, the method of further controlling the surface charge of the target comprising electrically insulating said target from said walls, providing electrons from a heated source within said Faraday Cage, inhibiting direct rectilinear radiations between said electron source and said target, maintaining said inhibiting means at a lower temperature than said target, measuring the target current, combining and measuring the target and the wall currents to provide said ion beam current measurement, and varying said quantities of provided electrons to provide neturalizing space charge to said ion beam to control said target surface charge and thereby said target current.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1981-10-02 | 1982-04-03 | 1982-10-03 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1985-10-02 | 1986-04-03 | 1986-10-03 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1989-10-02 | 1990-04-03 | 1990-10-03 | $7700.00 | Window Closed / Lapsed |