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Vacuum deposition method for frequency adjustment of piezoelectric resonators

Assignee: Transat Corp
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Filing: 1976-03-22
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Granted: 1978-09-05
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Expires: 1996-03-22
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Abstract

Abstract Vacuum deposition method for adjusting the resonant frequency of piezoelectric resonators wherein the speed and accuracy of the process are enhanced by abrupt termination of the deposition through injection of a gas into the vacuum chamber at the end of the adjustment cycle.

Inventors

  • 👤 Gabriel Ralph Buynak
  • 👤 Franz Ludwig Sauerland

Bibliographic Details

Application Number —
Jurisdiction US
Data Source google_patents
Last Synchronized 2026-10-26 13:13
CPC Classifications
C; C23; C23C; C23C14/00; C23C14/22; C23C14/54; C23C14/24; H; H03; H03H; H03H3/00; H03H3/007; H03H3/02; H03H3/04; Y; Y10; Y10T; Y10T29/00; Y10T29/42

Claims Analysis

Total Claims: 3
Claim 1
Independent Claim 69 words
Method for adjusting the resonant frequency FR of a piezo-electric resonator to a target frequency FT comprising: (a) vapor depositing a material in a vacuum chamber for changing said resonant frequency of said resonator; (b) monitoring said resonant frequency during the deposition process; (c) continuing the deposition until |FR - FT| equals a predetermined value and then injecting an inert gas into the vacuum chamber to terminate the deposition.
Claim 2
Dependent Claim 69 words
Method for adjusting the resonant frequency FR of a piezo-electric resonator to a target frequency FT comprising: (a) vapor depositing a material in a vacuum chamber for changing said resonant frequency of said resonator; (b) monitoring said resonant frequency during the deposition process; (c) continuing the deposition until |FR - FT| equals a predetermined value and then injecting an inert gas into the vacuum chamber to terminate the deposition.
Claim 3
Dependent Claim 27 words
Method according to claim 1 where said gas is injected through an orifice located in the area between the source of the deposition vapor and the resonator.

References Cited (Backward Citations)

US2123227A Cited
US2978364A Cited
US3486217A Cited
US3400014A Cited
US3549414A Cited
US3383238A Cited
US3498818A Cited
US3573960A Cited

USPTO Annuity & Maintenance Windows

Annuity Stage Window Opens Payment Deadline Surcharge Period Until Estimated Fee Status
3.5 Years (Year 4) 1981-09-04 1982-03-06 1982-09-05 $2000.00 Window Closed / Lapsed
7.5 Years (Year 8) 1985-09-04 1986-03-06 1986-09-05 $3760.00 Window Closed / Lapsed
11.5 Years (Year 12) 1989-09-04 1990-03-06 1990-09-05 $7700.00 Window Closed / Lapsed

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