Electro-optical device for use in improved interferometers

Claim 3

An apparatus of claim 1, wherein said first and second reflecting means are so configured, relative to the size of the areas over which the incident signal beam and returning reference beam are incident on the operatively positioned plate-like means, that the reflected portions of the incident signal beam and the returning reference beam incident thereon have a substantially smooth intensity distribution, each reflecting means thus functioning substantially as a spatial filter for the incident signal beam and the returning reference beam, and further, dividing the incident signal beam and the returning reference beam into a reflected portion and a transmitted portion, wherein the reflected portion of said incident signal beam is a spatially-filtered incident signal beam, and the transmitted portion thereof is directed through said plate-like means in such a direction as to be substantially prevented from being transmitted back into the common source, and wherein the reflected portion of the returning reference beam is a spatially-filtered returning reference beam which combines with the returning signal beam to form the composite beam.

Claim 4

An apparatus of claim 2, wherein said platelike means and said reflective means are so configured and arranged that when said device is operatively positioned in the interferometer, the angle of incidence of the incident signal beam, the returning signal beam and the returning reference beam is Brewster's angle.

Claim 5

An apparatus of claim 1, wherein said device includes means for modulating the composite beam.

Claim 6

An apparatus of claim 4, wherein said modulating means includes means for vibrating said plate-like means at a predetermined frequency.

Claim 7

An apparatus of claim 5, wherein said first and second reflecting means are mirrors formed by deposition on said opposite exterior faces of said plate-like means.

Claim 8

An apparatus of claim 6, wherein said mirrors are the reflection analog of a pinhole spatial filter.

Claim 9

An apparatus of claim 7, wherein said mirrors are approximately 7 microns by 10 microns in surface dimensions.

Claim 10

An interferometer, comprising: a. a source of a coherent light beam; b. means dividing the light beam generated by said source into an incident signal beam and an incident reference beam; c. means directing the incident signal beam to a target, the incident signal being reflected from the target as a returning signal beam in the operation of said interferometer; d. second means directing the incident reference beam to the target or reference element, the incident reference beam being reflected from the target as a returning reference beam in the operation of the interferometer; e. means combining the returning signal beam with the returning reference beam to form a composite beam, wherein said combining means further comprises: plate-like means of light transmitting material; means supporting said plate-like means in an operative position in said interferometer, in which position the incident signal beam and the returning signal beam are incident on one exterior face of said plate-like means, and the returning reference beam is incident on the opposite exterior face of said plate-like means; and first and second reflecting means positioned on the opposite exterior faces of said plate-like means in such a manner relative to each other and having such a configuration relative to the size of the areas on said plate-like means over which the incident signal beam, the returning signal beam, and returning reference beam are incident; that (1) when the incident signal beam is substantially centered on said first reflecting means, a substantial portion of the incident signal beam is reflected by said first reflecting means for transmission to the target by said first directing means, and (2) that when said returning signal beam is substantially centered on said first reflecting means and said returning reference beam is substantially centered on said second reflecting means, a substantial portion of said returning reference beam is reflected from the second reflecting means and combines with a substantial portion of said returning signal beam which is transmitted through said platelike means, thereby forming a composite beam, the remainders of said incident signal beam and said returning reference beam being so directed as to be substantially prevented from returning to said source in said interferometer; and f. means detecting said composite beam, from which useful information may be obtained concerning the target.

Claim 11

An interferometer, comprising: a. a source of a coherent light beam; b. means dividing the light beam generated by said source into an incident signal beam and an incident reference beam; c. means directing the incident signal beam to a target, the incident signal being reflected from the target as a returning signal beam in the operation of said interferometer; d. second means directing the incident reference beam to the target or reference element, the incident reference beam being reflected from the target as a returning reference beam in the operation of the interferometer; e. means combining the returning signal beam with the returning reference beam to form a composite beam, wherein said combining means further comprises: plate-like means of light transmitting material; means supporting said plate-like means in an operative position in said interferometer, in which position the incident signal beam and the returning signal beam are incident on one exterior face of said plate-like means, and the returning reference beam is incident on the opposite exterior face of said plate-like means; and first and second reflecting means positioned on the opposite exterior faces of said plate-like means in such a manner relative to each other and having such a configuration relative to the size of the areas on said plate-like means over which the incident signal beam, the returning signal beam, and returning reference beam are incident; that (1) when the incident signal beam is substantially centered on said first reflecting means, a substantial portion of the incident signal beam is reflected by said first reflecting means for transmission to the target by said first directing means, and (2) that when said returning signal beam is substantially centered on said first reflecting means and said returning reference beam is substantially centered on said second reflecting means, a substantial portion of said returning reference beam is reflected from the second reflecting means and combines with a substantial portion of said returning signal beam which is transmitted through said platelike means, thereby forming a composite beam, the remainders of said incident signal beam and said returning reference beam being so directed as to be substantially prevented from returning to said source in said interferometer; and f. means detecting said composite beam, from which useful information may be obtained concerning the target.

Claim 12

An apparatus of claim 9, wherein said first and second reflecting means are so configured, relative to the size of the areas over which the incident signal beam and returning reference beam are incident on the operatively positioned plate-like means, that said first and second reflecting means function, respectively, as a spatial filter for the incident signal beam and the returning reference beam, dividing each of them into a reflected portion and a transmitted portion, such that the reflected portion of the incident signal beam, which is directed to the target, is a spatially-filtered incident signal beam, and such that the reflected portion of the returning reference beam is a spatially filtered returning reference beam, which combines with the returning signal beam to form the composite beam.

Claim 13

An apparatus of claim 10, wherein said platelike means and said reflective means are so configured and arranged that when said device is operatively positioned in the interferometer, the angle of incidence of the incident signal beam, the returning signal beam, and the returning reference beam is Brewster's angle.

Claim 14

An apparatus of claim 11, wherein said device includes means for modulating the composite beam.

Claim 15

An apparatus of claim 12, wherein said modulating means includes means for vibrating said plate-like means at a predetermined frequency.

Claim 16

An apparatus of claim 9, including means for analyzing said detected composite beam to obtain information concerning the quantity and direction of path length changes for the incident and returning signal beams.

Claim 17

An apparatus of claim 9, wherein said dividing means includes means for adjusting the ratio of the light intensities of said incident reference beam and said incident signal beam.

Claim 18

An apparatus of claim 15, wherein said source includes means producing coherent light at a known angle of polarization, and wherein said adjusting means includes means for controllably altering said known angle of polarization.

Claim 19

An apparatus of claim 16, wherein said adjusting means further includes means for obtaining the horizontal and vertical components of said coherent light beam, the horizontal component being horizontally polarized and being directed in the interferometer as the reference beam, and the vertical component being vertically polarized and being directed in the interferometer as the incident signal beam, the apparatus further including means to change said vertically polarized incident signal beam to a horizontally polarized incident signal beam.