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US4105012A Expired / Lapsed US ⏱️ 0.0 years remaining

Apparatus for cutting up hard and brittle material

Assignee: Siemens AG
•
Filing: 1977-10-19
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Granted: 1978-08-08
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Expires: 1997-10-19
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Abstract

Abstract A gang saw is used for cutting up hard and brittle material, particularly semiconductor material, in which saw there is a reciprocating movement of workpiece with a large amplitude and low frequency and an additional vibrating motion of the sawblades in the same direction with a low amplitude and high frequency permitting very thin wafers of large area and a plane cutting surface to be prepared.

Inventors

  • 👤 Paul Hini
  • 👤 Helmut Forster

Bibliographic Details

Application Number —
Jurisdiction US
Data Source google_patents
Last Synchronized 2026-10-28 12:28
CPC Classifications
B; B23; B23D; B23D51/00; B23D51/04; B23D51/046; B28; B28D; B28D5/00; B28D5/04; B28D5/042

Claims Analysis

Total Claims: 11
Claim 1
Independent Claim 134 words
Apparatus for cutting up hard brittle material comprising (a) a base member; (b) a clamping frame; (c) a plurality of leaf springs supporting said frame on said base for oscillating motion along a first axis, said leaf springs disposed transversely to said first axis; (d) a plurality of saw blades disposed side by side in said clamping frame said saw blades extending in a direction parallel to said first axis; (e) means for holding material to be cut up and for bringing said material into contact with said saw blades; (f) first drive means for imparting a high frequency low amplitude oscillating motion to said support frame; and (g) second drive means for imparting a large amplitude low frequency to and fro motion to said means for holding said material to be cut up.
Claim 2
Dependent Claim 134 words
Apparatus for cutting up hard brittle material comprising (a) a base member; (b) a clamping frame; (c) a plurality of leaf springs supporting said frame on said base for oscillating motion along a first axis, said leaf springs disposed transversely to said first axis; (d) a plurality of saw blades disposed side by side in said clamping frame said saw blades extending in a direction parallel to said first axis; (e) means for holding material to be cut up and for bringing said material into contact with said saw blades; (f) first drive means for imparting a high frequency low amplitude oscillating motion to said support frame; and (g) second drive means for imparting a large amplitude low frequency to and fro motion to said means for holding said material to be cut up.
Claim 3
Dependent Claim 29 words
Apparatus according to claim 1 wherein said saw blades include teeth having front faces which face the material to be cut and a herein said faces contain diamond granules.
Claim 4
Dependent Claim 33 words
Apparatus according to claim 2 and further including holes in said saw blades, said holes chosen such that the cross-section of the saw blades is smaller in the middle than at their edge.
Claim 5
Dependent Claim 46 words
Apparatus according to claim 3 wherein said holes are selected such that when said saw blades are arranged in said frame, the elastic limit of the material of which that saw blades are made is at least approximately reached in the middle of said saw blades.
Claim 6
Dependent Claim 30 words
Apparatus according to claim 4 where, in the length direction of said saw blades and their direction of oscillating motion, said saw blades are inclined with respect to the vertical.
Claim 7
Dependent Claim 33 words
Apparatus according to claim 1 and further including holes in said saw blades, said holes chosen such that the cross-section of the saw blades is smaller in the middle than at their edge.
Claim 8
Dependent Claim 46 words
Apparatus according to claim 6 wherein said holes are selected such that when said saw blades are arranged in said frame, the elastic limit of the material of which the saw blades are made is at least approximately reached in the middle of said saw blades.
Claim 9
Dependent Claim 30 words
Apparatus according to claim 7 where, in the length direction of said saw blades and their direction of oscillating motion, said saw blades are inclined with respect to the vertical.
Claim 10
Dependent Claim 30 words
Apparatus according to claim 2 where, in the length direction of said saw blades and their direction of oscillating motion, said saw blades are inclined with respect to the vertical.
Claim 11
Dependent Claim 30 words
Apparatus according to claim 3 where, in the length direction of said saw blades and their direction of oscillating motion, said saw blades are inclined with respect to the vertical.

References Cited (Backward Citations)

US2024860A Cited
US2312014A Cited
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US2963018A Cited
US2998676A Cited
US3326071A Cited
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USPTO Annuity & Maintenance Windows

Annuity Stage Window Opens Payment Deadline Surcharge Period Until Estimated Fee Status
3.5 Years (Year 4) 1981-08-07 1982-02-06 1982-08-08 $2000.00 Window Closed / Lapsed
7.5 Years (Year 8) 1985-08-07 1986-02-06 1986-08-08 $3760.00 Window Closed / Lapsed
11.5 Years (Year 12) 1989-08-07 1990-02-06 1990-08-08 $7700.00 Window Closed / Lapsed

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