US4104418A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Glass layer fabrication
Assignee: International Business Machines Corp
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Filing: 1976-07-07
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Granted: 1978-08-01
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Expires: 1996-07-07
Abstract
Abstract The construction of the dielectric layer of a panel used in making a gas panel display by an E-gun evaporation process in the same evacuated chamber that deposits an electron-emissive layer on the panel so as to obtain increased efficiency in the fabrication and improved operating characteristics of the gas panel. Stress free dielectric layers are obtained by E-gun evaporating borosilicate glass from a molten pool of borosilicate having an area of at least 2cm 2 up to about 10cm 2 with the substrate for the layers being maintained at from 200° C to 300° C and the evaporation rate being 40 to 80 A/sec. at approximately 10 inches from the molten pool.
Inventors
- 👤 Kyu C. Park
- 👤 Elizabeth J. Weitzman
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-31 15:09
CPC Classifications
H; H01; H01J; H01J9/00; H01J9/24; H01J9/26; H01J9/261; C; C03; C03C; C03C17/00; C03C17/02; C03C17/34; C03C17/3411; C23; C23C; C23C14/00; C23C14/06; C23C14/10
Claims Analysis
Total Claims: 10
Claim 1
Independent Claim
142 words
Method of fabricating a dielectric glass layer on a substrate comprising the steps of: heating a source of borosilicate glass in an evacuated chamber by a scanning electron beam to a uniformly heated molten pool whose surface area is in the range from at least 2cm 2 to approximately 10cm 2 to provide a stream of evaporated source material at a rate equivalent to 40-80 A/sec. as measured at approximately 10 inches away from said source, shielding said substrate from said stream until the latter has attained a uniform evaporation rate, maintaining said substrate at a temperature of 200° C to 300° C during such deposition, depositing a layer of borosilicate glass of thickness less than approximately 50 microns on said substrate; and annealing said deposited layer at temperature substantially higher than said substrate temperature during said depositing of said borosilicate glass.
Claim 2
Dependent Claim
142 words
Method of fabricating a dielectric glass layer on a substrate comprising the steps of: heating a source of borosilicate glass in an evacuated chamber by a scanning electron beam to a uniformly heated molten pool whose surface area is in the range from at least 2cm 2 to approximately 10cm 2 to provide a stream of evaporated source material at a rate equivalent to 40-80 A/sec. as measured at approximately 10 inches away from said source, shielding said substrate from said stream until the latter has attained a uniform evaporation rate, maintaining said substrate at a temperature of 200° C to 300° C during such deposition, depositing a layer of borosilicate glass of thickness less than approximately 50 microns on said substrate; and annealing said deposited layer at temperature substantially higher than said substrate temperature during said depositing of said borosilicate glass.
Claim 3
Dependent Claim
32 words
Method as set forth in claim 1 wherein said dielectric layer is fabricated as part of a gas discharge panel and said substrate has thin film metallurgy on the top surface thereof.
Claim 4
Dependent Claim
15 words
Method as set forth in claim 1 wherein said annealing temperature is approximately 500° C.
Claim 5
Dependent Claim
65 words
Method as set forth in claim 1 in which said annealing step comprises (1) heating the deposited layer of borosilicate glass at approximately 100° C/hr until said layer reaches approximately 500° C. (2) maintaining said layer at such 500° C temperature for approximately 30 minutes, and (3) cooling said layer from said 500° C temperature to room temperature at the rate of approximately 80° C/hr.
Claim 6
Dependent Claim
19 words
Method as set forth in claim 1 wherein said deposited layer of borosilicate glass has thickness approximately 6.5 microns.
Claim 7
Dependent Claim
30 words
The method as set forth in claim 1 wherein said chamber is evacuated to a pressure of the order of 10 -6 torr during the evaporation of said borosilicate glass.
Claim 8
Dependent Claim
52 words
The method as set forth in claim 1 wherein said source of borosilicate glass is composed of at least 83% by weight of SiO 2 , 11% by weight of B 2 O 3 , 2.5% by weight of Al 2 O 3 , and 2.2% by weight of Na 2 O.
Claim 9
Dependent Claim
64 words
Method as set forth in claim 7 wherein said substrate has a thermal coefficient of expansion range of 25-100 × 10 -7 inches per inch per degree centigrade and the composition of said deposited layer of borosilicate glass consists of and varies as SiO 2 (82-89 weight %), B 2 O 3 (8-15 weight %) and Na 2 O (1.7 to 2.4 weight %).
Claim 10
Dependent Claim
91 words
The method as set forth in claim 1 including the steps of: providing a source of MgO within said evacuated chamber during the deposition of said borosilicate glass, providing shielding means for said source of MgO, heating said MgO to its evaporation temperature while in said evacuated chamber, removing said shielding means from said MgO source so as to evaporate said MgO, and depositing a layer of MgO on said deposited layer of borosilicate glass while maintaining said substrate at a temperature of 200° to 300° C during said MgO deposition.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1981-07-31 | 1982-01-30 | 1982-08-01 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1985-07-31 | 1986-01-30 | 1986-08-01 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1989-07-31 | 1990-01-30 | 1990-08-01 | $7700.00 | Window Closed / Lapsed |