Electrically driven oscillating capacitor device

Claim 2

An electrically driven Kelvin probe apparatus for operation as a dynamic electron electrometer or as a contact potential meter comprising, in combination: a body of piezoelectric material (4); a spring member (3) mounted so as to be excitable at a frequency of resonance thereof by piezoelectric vibration of said piezoelectric material body and extending away from said piezoelectric material body and providing a movable capacitor electrode (1) at or on a portion of said spring member at a distance from said piezoelectric material body; means for holding a fixed capacitor electrode (2), of a material to be observed, in spaced proximity to said movable capacitor electrode (1) provided by or on said spring member (3); a vacuum enclosure, capable of being evacuated to a high vacuum, enclosing said body of piezoelectric material, said spring member and said holding means as well as any electrode (2) held by said holding means; means (7-11; 15) for applying an alternating voltage of a frequency of resonance of said spring member through said enclosure to said piezoelectric material body so as to cause said piezoelectric material body to vibrate said spring member at said frequency, and means (16) for superimposing a d-c voltage component on said applied alternating voltage.

Claim 3

A Kelvin probe apparatus as defined in claim 1 in which means are provided for varying said superimposed d-c voltage component.

Claim 4

A Kelvin probe apparatus as defined in claim 1 comprising also means (5) for electrostatically shielding said piezoelectric material body (4).

Claim 5

A Kelvin probe apparatus as defined in claim 1 in which said spring member (3) is bonded to said piezoelectric material body (4) by means of a two-component resin having polyurethane base.

Claim 6

A Kelvin probe apparatus as defined in claim 1 in which said spring member (3) is in the form of a leaf spring.

Claim 7

A Kelvin probe apparatus as defined in claim 1 in which said spring member is made of a low density material having a high modulus of elasticity.

Claim 8

A Kelvin probe apparatus as defined in claim 6 in which said spring member (3) is a leaf spring made of a material selected from the group consisting of tungsten, titanium, molybdenum, beryllium steel and mica.

Claim 9

An electrically driven Kelvin probe apparatus for operation as a dynamic electron electrometer or as a contact potential meter, comprising in combination: a body of piezoelectric material (4); a spring member (3) mounted so as to be excitable at a frequency of resonance thereof by piezoelectric vibration of said piezoelectric material body and extending away from said piezoelectric material body and providing a movable capacitor electrode (1) at or on a portion of said spring member at a distance from said piezoelectric material body means for holding a fixed capacitor electrode (2), of a material to be observed, in spaced proximity to said movable capacitor electrode (1) provided by or on said spring member (3); a vacuum enclosure, capable of being evacuated to a high vacuum, enclosing said body of piezoelectric material, said spring member and said holding means as well as any electrode (2) held in said holding means, means (7-11; 15) for applying an alternating voltage of a frequency of resonance of said spring member through said enclosure to said piezoelectric material body so as to cause said piezoelectric material body to vibrate said spring member at said frequency; means (16) for superimposing a d-c voltage component on said applied alternating voltage, and a synchronous detector connecting to said holding means for contacting said electrode (2) thereby and also connecting to said alternating voltage applying means, and means for indicating a detected voltage characteristic of the pair of materials of said respective movable and fixed electrodes.

Claim 10

An electrically driven Kelvin probe apparatus for operation as a dynamic electron electrometer or as a contact potential meter, comprising in combination: a body of piezoelectric material (4); a spring member (3) mounted so as to be excitable at a frequency of resonance thereof by piezoelectric vibration of said piezoelectric material body and extending away from said piezoelectric material body and providing a movable capacitor electrode (1) at or on a portion of said spring member at a distance from said piezoelectric material body means for holding a fixed capacitor electrode (2), of a material to be observed, in spaced proximity to said movable capacitor electrode (1) provided by or on said spring member (3); a vacuum enclosure, capable of being evacuated to a high vacuum, enclosing said body of piezoelectric material, said spring member and said holding means as well as any electrode (2) held in said holding means, means (7-11; 15) for applying an alternating voltage of a frequency of resonance of said spring member through said enclosure to said piezoelectric material body so as to cause said piezoelectric material body to vibrate said spring member at said frequency; means (16) for superimposing a d-c voltage component on said applied alternating voltage, and a synchronous detector connecting to said holding means for contacting said electrode (2) thereby and also connecting to said alternating voltage applying means, and means for indicating a detected voltage characteristic of the pair of materials of said respective movable and fixed electrodes.

Claim 11

A Kelvin probe apparatus as defined in claim 8 comprising also means for inserting an adjustable d-c voltage in a manner capable of simulating a change in the work function of the material of said fixed electrode and thereby testing the sensitivity of the apparatus.