Vapor deposition apparatus for coating continuously moving substrates with layers of volatizable solid substances

Claim 1

Apparatus for the continuous production of volatizable solid material-coated substrates which comprises wall means adapted for connection to a vacuum producing means and defining an essentially closed chamber in which the vacuum is produced by said vacuum producing means, crucible support means forming a part of said wall means and defining a recess therein, an elongated and closed crucible formed of material which is inert when heated to an elevated temperature mounted to the crucible support means outside of said chamber and substantially within said recess, the walls of the crucible support means being generally spaced from the walls of said crucible, said crucible having a rectangular neck portion extending upwardly through the crucible support means and into the chamber terminating in a restricted, rectangular outlet opening into the chamber for discharging vapor from said crucible therethrough, the interior of the crucible thereby communicating with the vacuum while the exterior of the crucible lies substantially completely outside said chamber and the transverse cross-sectional area of the elongated crucible being at least five times the cross-sectional area of the crucible outlet so that a direct collimated and rectangular beam of vapor of said solid material issues from the restricted outlet, radiant heating means located in the crucible support means and outside of the chamber for substantially uniformly heating the exterior of the crucible to vaporize solid material located therein and substrate support means located within the chamber for supporting a moving substrate during travel over said rectangular outlet of the crucible, the substrate supporting means being positioned so that the surface of the substrate passing over the outlet will be located not more than 10 mm from the outlet whereby a layer of the material completely free from impurities can be continuously deposited on the surface of the moving substrate.