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US4093504A Expired / Lapsed US ⏱️ 0.0 years remaining

Method for producing electrically conductive indium oxide patterns on an insulating support by etching with hydrochloric acid and ferric chloride

Assignee: US Philips Corp
•
Filing: 1976-08-05
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Granted: 1978-06-06
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Expires: 1996-08-05
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Abstract

Abstract Etching indium patterns on insulating supports with the use of an etchant-resistant mask, by means of a solution of an acid to which ferric chloride has been added. Passivation of the bath is prevented by adding ferric chloride.

Inventors

  • 👤 Johannes J. Ponjee
  • 👤 Hendrik J. Feil

Bibliographic Details

Application Number —
Jurisdiction US
Data Source google_patents
Last Synchronized 2026-10-28 09:28
CPC Classifications
H; H01; H01B; H01B5/00; H01B5/14; G; G02; G02F; G02F1/00; G02F1/01; G02F1/0102; H10; H10F; H10F71/00; H10F71/138; Y; Y02; Y02E; Y02E10/00; Y02E10/50

Claims Analysis

Total Claims: 3
Claim 1
Independent Claim 70 words
A method of producing an electrically conductive pattern comprising forming a uniform layer of indium oxide on an electrically insulating support, applying to said indium oxide layer an etch-resistant coating in the negative image of the desired pattern, applying to said thus coated layer an aqueous hydrochloric acid etching solution containing in addition to the acid, ferric chloride in a quantity of between 0.01 mol/l and the saturation concentration thereof.
Claim 2
Independent Claim 70 words
A method of producing an electrically conductive pattern comprising forming a uniform layer of indium oxide on an electrically insulating support, applying to said indium oxide layer an etch-resistant coating in the negative image of the desired pattern, applying to said thus coated layer an aqueous hydrochloric acid etching solution containing in addition to the acid, ferric chloride in a quantity of between 0.01 mol/l and the saturation concentration thereof.
Claim 3
Dependent Claim 25 words
A method as claimed in claim 1 wherein the bath consists of an aqueous solution of HCl which contains 66g of FeCl 3 per liter.

References Cited (Backward Citations)

US2154027A Cited
US2631950A Cited
US2699382A Cited
US2684892A Cited
US3348987A Cited
US3562038A Cited
GB1406894A Cited
US3837944A Cited
US3824136A Cited
US3979240A Cited

USPTO Annuity & Maintenance Windows

Annuity Stage Window Opens Payment Deadline Surcharge Period Until Estimated Fee Status
3.5 Years (Year 4) 1981-06-05 1981-12-05 1982-06-06 $2000.00 Window Closed / Lapsed
7.5 Years (Year 8) 1985-06-05 1985-12-05 1986-06-06 $3760.00 Window Closed / Lapsed
11.5 Years (Year 12) 1989-06-05 1989-12-05 1990-06-06 $7700.00 Window Closed / Lapsed

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