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US3824136A Expired / Lapsed US ⏱️ 0.0 years remaining

Etching of aluminum fluidic devices

Assignee: United States Department of the Army
•
Filing: 1972-10-06
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Granted: 1974-07-16
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Expires: 1992-10-06
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Abstract

Abstract A METHOD FOR CHEMICAL MILLING OF THIN AUMINUM SHEETS, SUCH AS WAFERS FOR FLUIDIC CONTROL SYSTEMS, WHICH PRODUCES SMOOTHER CUTS AND MINIMIZES ROUGH EDGES AND UNDERCUTTING, UTILIZES AND AWUEOUS ETCHING SOLUTION OF ABOUT 8*-15* BAUME'' CONTAINING ABOUT 75-150 GRAMS FECL3 AND ABOUT 6.5-11.5 GRAM HCL PER LITER.

Inventors

  • 👤 K Gilbert

Bibliographic Details

Application Number —
Jurisdiction US
Data Source google_patents
Last Synchronized 2026-10-28 23:50
CPC Classifications
C; C23; C23F; C23F1/00; C23F1/10; C23F1/14; C23F1/16; C23F1/20

Claims Analysis

Total Claims: 0
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References Cited (Backward Citations)

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USPTO Annuity & Maintenance Windows

Annuity Stage Window Opens Payment Deadline Surcharge Period Until Estimated Fee Status
3.5 Years (Year 4) 1977-07-15 1978-01-14 1978-07-16 $2000.00 Window Closed / Lapsed
7.5 Years (Year 8) 1981-07-15 1982-01-14 1982-07-16 $3760.00 Window Closed / Lapsed
11.5 Years (Year 12) 1985-07-15 1986-01-14 1986-07-16 $7700.00 Window Closed / Lapsed

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