Patent US4062318A successfully refreshed from Google Patents.
US4062318A
Expired / Lapsed
US
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Apparatus for chemical vapor deposition
Assignee: RCA Corp
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Filing: 1976-11-19
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Granted: 1977-12-13
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Expires: 1996-11-19
Abstract
Abstract An apparatus for chemically vapor-depositing a material onto surfaces of a plurality of substrates within a reaction chamber comprises means positioned within the chamber for supporting the substrates in a stack-like relationship wherein the surfaces are substantially parallel to each other and are separated by spacings, and a plurality of gas nozzles connected to a source of gas and positioned within the chamber so that the flow of gas therefrom is directed, respectively, into the spacings between the surfaces. A method of utilizing this apparatus comprises rotating the substrates while moving the nozzles back and forth in an arc, so that the flow of gas therefrom is directed into the spacings at different angles.
Inventors
- 👤 Vladimir Sinisa Ban
- 👤 Stephen Lee Gilbert
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-27 19:17
CPC Classifications
C; C23; C23C; C23C16/00; C23C16/44; C23C16/455; C23C16/45502; C23C16/45506; C23C16/45563; C23C16/45578; C23C16/45587; C23C16/45589; C30; C30B; C30B25/00; C30B25/02; C30B25/12; C30B25/14
Claims Analysis
Total Claims: 11
Claim 1
Independent Claim
101 words
An apparatus for chemically vapor-depositing a material onto surfaces of a plurality of substrates within a reaction chamber comprising: means positioned within said chamber for supporting said substrates in a stack-like relationship wherein said surfaces are substantially parallel to each other and are separated by spacings, a plurality of gas nozzles connected to a source of gas and positioned within said chamber so that the flow of gas therefrom is directed respectively into said spacings between said surfaces, and and means for moving said nozzles so that the flow of said gas therefrom is directed into said spacings at different angles.
Claim 2
Independent Claim
101 words
An apparatus for chemically vapor-depositing a material onto surfaces of a plurality of substrates within a reaction chamber comprising: means positioned within said chamber for supporting said substrates in a stack-like relationship wherein said surfaces are substantially parallel to each other and are separated by spacings, a plurality of gas nozzles connected to a source of gas and positioned within said chamber so that the flow of gas therefrom is directed respectively into said spacings between said surfaces, and and means for moving said nozzles so that the flow of said gas therefrom is directed into said spacings at different angles.
Claim 3
Dependent Claim
61 words
An apparatus as defined in claim 1 wherein said supporting means comprises: a plurality of plate-shaped susceptors positioned so that the major surfaces thereof are substantially parallel to each other in a stack-like arrangement and separated by a distance between about 1 millimeter and about 10 millimeters, and means connected to said susceptors for retaining said susceptors in said stack-like arrangement.
Claim 4
Dependent Claim
21 words
An apparatus as defined in claim 2 further comprising means positioned adjacent to said major surfaces for mounting said substrates thereon.
Claim 5
Dependent Claim
21 words
An apparatus as defined in claim 2 further comprising an rf induction coil positioned adjacent said chamber for heating said susceptors.
Claim 6
Dependent Claim
19 words
An apparatus as defined in claim 2 further comprising means connected to said supporting means for rotating said susceptors.
Claim 7
Dependent Claim
37 words
An apparatus as defined in claim 5 wherein said retaining means comprises a plurality of rods supported by end sections of said chamber, said rods having retaining grooves therein disposed adjacent to the edges of said susceptors.
Claim 8
Dependent Claim
21 words
An apparatus as defined in claim 6 wherein said rotating means comprises a motor connected to said rods for rotation thereof.
Claim 9
Dependent Claim
28 words
An apparatus as defined in claim 5 wherein said retaining means comprises a plurality of rods attached to said susceptors and disposed between two end plates connected thereto.
Claim 10
Dependent Claim
48 words
An apparatus as defined in claim 8 wherein said rotating means comprises two shafts supported respectively by opposite end sections of said chamber and connected respectively to central portions of said two end plates, and wherein one of said shafts is connected to a motor for rotation thereof.
Claim 11
Dependent Claim
29 words
An apparatus as defined in claim 1 wherein said moving means comprises a motor connected to said nozzles for continually sweeping said nozzles back and forth in an arc.
References Cited (Backward Citations)
US4018183A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1980-12-12 | 1981-06-13 | 1981-12-13 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1984-12-12 | 1985-06-13 | 1985-12-13 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1988-12-12 | 1989-06-13 | 1989-12-13 | $7700.00 | Window Closed / Lapsed |