Patent US4061870A successfully refreshed from Google Patents.
US4061870A
Expired / Lapsed
US
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Temperature control system
Assignee: Kokusai Denki Electric Inc
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Filing: 1975-07-28
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Granted: 1977-12-06
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Expires: 1995-07-28
Abstract
Abstract A system for controlling the temperature and/or temperature distribution in a semiconductor diffusion furnace. The temperature and/or temperature distribution inside the reactor tube of the furnace is directly detected by thermocouple means inserted in the reactor tube, and correction is effected with respect to the temperature and/or temperature distribution on the basis of the foregoing detection. There are also disclosed thermocouple devices for use with the aforementioned control system. Each of the thermocouple devices can be manufactured at lower cost and is arranged to provide for a high freedom of measurements.
Inventors
- 👤 Youichi Mizushina
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-29 16:05
CPC Classifications
G; G05; G05D; G05D23/00; G05D23/19; G05D23/20; G05D23/22; G05D23/1927
Claims Analysis
Total Claims: 6
Claim 1
Independent Claim
122 words
A system for establishing a uniform temperature distribution within a reactor tube of a furnace comprising: a. a furnace having a reactor tube therein, b. first temperature detection means disposed internally of said reactor tube, c. heater means disposed externally of said furnace for heating said furnace, d. first temperature control means responsive to said first temperature detection means for controlling said heater means, e. second temperature detection means disposed externally of said reactor tube and in the vicinity of said heater for detecting the temperature of said heater, and f. second temperature control means responsive to said second temperature detection means for controlling said heater means, whereby said heater is controlled to establish a uniform temperature distribution within said reactor tube.
Claim 2
Independent Claim
122 words
A system for establishing a uniform temperature distribution within a reactor tube of a furnace comprising: a. a furnace having a reactor tube therein, b. first temperature detection means disposed internally of said reactor tube, c. heater means disposed externally of said furnace for heating said furnace, d. first temperature control means responsive to said first temperature detection means for controlling said heater means, e. second temperature detection means disposed externally of said reactor tube and in the vicinity of said heater for detecting the temperature of said heater, and f. second temperature control means responsive to said second temperature detection means for controlling said heater means, whereby said heater is controlled to establish a uniform temperature distribution within said reactor tube.
Claim 3
Dependent Claim
77 words
The system as defined in claim 1 wherein: a. said first temperature detection means comprises a plurality of individual temperature detectors, b. said second temperature detection means comprises a plurality of individual temperature detectors, c. said heater comprises a plurality of heater sections, d. said first temperature control means comprises a common temperature control device responsive to said second temperature control means, and e. said second temperature control means comprises a plurality of individual temperature control devices.
Claim 4
Dependent Claim
116 words
The system as defined in claim 2 wherein: a. said first temperature control means further includes a first reference point setting means, b. each of said second temperature control means further includes a second reference point setting means and is responsive to a second signal generated by said second temperature detection means to control the difference between said second signal and said second reference point to a predetermined value, and c. said first temperature control means is responsive to a first signal generated by said first detection means to control said second reference point setting means of said second temperature control means in accordance with the difference between said first signal and said first reference point.
Claim 5
Dependent Claim
71 words
The temperature control apparatus defined in claim 3 wherein said first temperature detection means comprises a thermocouple comprising: a. a first common thermocouple half formed of a first type of metal, b. a plurality of second thermocouple halves formed of a second type of metal, c. said plurality of second thermocouple halves being connected to said first common thermocouple half in a predetermined spaced relationship for forming a plurality of thermocouples.
Claim 6
Dependent Claim
83 words
The temperature control apparatus defined in claim 3 wherein said first temperature detection means comprises a thermocouple comprising: a. a plurality of first thermocouple halves formed of a first metal, b. a plurality of second thermocouple halves formed of a second metal, c. said pluralities being arranged so that adjacent first and second thermocouple halves are connected thereby forming a plurality of thermocouples, d. terminals connecting to said thermocouples being taken out from said thermocouple halves at opposite ends of the combined halves.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1980-12-05 | 1981-06-06 | 1981-12-06 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1984-12-05 | 1985-06-06 | 1985-12-06 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1988-12-05 | 1989-06-06 | 1989-12-06 | $7700.00 | Window Closed / Lapsed |