US4060471A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Composite sputtering method
Assignee: RCA Corp
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Filing: 1976-09-17
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Granted: 1977-11-29
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Expires: 1996-09-17
Abstract
Abstract A method for depositing a layer in which the concentration of constituent materials varies through its thickness employs a radio frequency sputtering apparatus. The deposition apparatus has a target composed of different component materials for the layer. The substrate is placed within the deposition apparatus and moved to various positions with respect to the target during the deposition.
Inventors
- 👤 Harry Louis Pinch
- 👤 Herbert Irwin Moss
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-05 06:44
CPC Classifications
C; C23; C23C; C23C14/00; C23C14/02; C23C14/027; C23C14/22; C23C14/34; G; G11; G11B; G11B3/00; G11B3/44; G11B3/46
Claims Analysis
Total Claims: 9
Claim 1
Independent Claim
104 words
A method for sputtering a layer in which the concentration of the component materials varies through the thickness of the layer, said method comprising the steps of: moving the substrate within a sputtering apparatus having sources of the different component materials, the substrate being moved during the deposition from a position where the deposition is substantially from a first source to at least one intermediate position where deposition is from said first source and at least another of said sources to a position where deposition is substantially from said another of said sources, so that the deposited layer varies in concentration through its thickness.
Claim 2
Independent Claim
104 words
A method for sputtering a layer in which the concentration of the component materials varies through the thickness of the layer, said method comprising the steps of: moving the substrate within a sputtering apparatus having sources of the different component materials, the substrate being moved during the deposition from a position where the deposition is substantially from a first source to at least one intermediate position where deposition is from said first source and at least another of said sources to a position where deposition is substantially from said another of said sources, so that the deposited layer varies in concentration through its thickness.
Claim 3
Dependent Claim
14 words
The method as in claim 8 wherein the moving of the substrate is continuous.
Claim 4
Dependent Claim
17 words
The method as in claim 1 wherein the moving of the substrate is in a stepped pattern.
Claim 5
Dependent Claim
19 words
The method as in claim 1 wherein the substrate is moved in an arc across the component material sources.
Claim 6
Dependent Claim
20 words
The method as in claim 1 wherein the substrate is moved in a straight line across the component material sources.
Claim 7
Independent Claim
111 words
A method for making a video disc stylus comprising the steps of: placing a substrate formed of a dielectric material into the chamber of a radio frequency diode sputtering apparatus, the chamber containing a composite sputtering target having a section of the same conductive material and a section of dielectric material which comprises the substrate; pg,16 activating the sputtering apparatus causing the materials of the sputtering target to sputter; and moving the substrate across the surface of the composite sputtering target from an initial position near the section of dielectric material to a position near the section of conductive material so that the sputtered material strikes and adheres to the substrate.
Claim 8
Independent Claim
111 words
A method for making a video disc stylus comprising the steps of: placing a substrate formed of a dielectric material into the chamber of a radio frequency diode sputtering apparatus, the chamber containing a composite sputtering target having a section of the same conductive material and a section of dielectric material which comprises the substrate; pg,16 activating the sputtering apparatus causing the materials of the sputtering target to sputter; and moving the substrate across the surface of the composite sputtering target from an initial position near the section of dielectric material to a position near the section of conductive material so that the sputtered material strikes and adheres to the substrate.
Claim 9
Dependent Claim
65 words
The method as in claim 6 wherein the forming of the tip comprises the steps of: dicing the substrate to form at least one parallelepiped unit; rough lapping two opposed sides of the diced unit to form a rear face on which the cermet film is deposited, and converging sides; and finish lapping the end of the diced unit to form a curved bottom edge.
References Cited (Backward Citations)
GB830392A
Cited
US3324019A
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US3460976A
Cited
US3985635A
Cited
US3920533A
Cited
US3864239A
Cited
US3945902A
Cited
US3945903A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1980-11-28 | 1981-05-30 | 1981-11-29 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1984-11-28 | 1985-05-30 | 1985-11-29 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1988-11-28 | 1989-05-30 | 1989-11-29 | $7700.00 | Window Closed / Lapsed |