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US4057659A Expired / Lapsed US ⏱️ 0.0 years remaining

Semiconductor device and a method of producing such device

Assignee: Siemens AG
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Filing: 1975-06-05
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Granted: 1977-11-08
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Expires: 1995-06-05
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Abstract

Abstract A semiconductor body having metal contacts is coated, except for the metal contacts, with a masking layer composed of a heat-resistant photo-lacquer or a polyimide resin which remains on the semi-conductor body as a protective layer on the finished semiconductor device. An intermediate metal coating consisting of at least two layers of different metals is vapor-deposited over the entire semiconductor body surface. The outer layer of metal is a soft-solderable metal, such as Cu, and is applied substantially thicker in relation to the underlying intermediate metal layers. Thereafter, any excess metal on the masking layer is removed therefrom by conventional etching techniques.

Inventors

  • 👤 Erich Pammer
  • 👤 Friedrich Schnell

Bibliographic Details

Application Number —
Jurisdiction US
Data Source google_patents
Last Synchronized 2026-11-05 23:07
CPC Classifications
H; H10; H10P; H10P95/00; H10W; H10W74/00; H10W74/40; H10W74/47; H10W72/00; H10W72/01; H10W72/012; H10W72/01231; H10W72/01251; H10W72/01253; H10W72/01255; H10W72/019; H10W72/20; H10W72/251; H10W72/252; H10W72/29; H10W72/90; H10W72/921; H10W72/923; H10W72/951; H10W72/952

Claims Analysis

Total Claims: 5
Claim 1
Independent Claim 226 words
In a method of producing electrical contacts on a semiconductor device wherein a semiconductor body is provided with at least one metal contact layer, the area around each such contact layer is completely coated with an insulating layer leaving free a contact surface on each such metal contact layer, at least two different metal layers are additionally successively applied onto each one of said contact surfaces so that the outer metal layer consists of a soft-solderable metal and has a thickness substantially greater than that of the two other metal layers combined, and any excess metal on said insulating layer is removed by a photo-lacquer etching technique, the improvement which comprises: vapor depositing as each of said metal contact layers an aluminum layer, applying a layer of a heat-resistant organic insulating material selected from the group consisting of polyphenylene, polyxylene, and polysiloxane, as said insulating layer, vapor depositing as a first one of said two additional metal layers a layer of titanium onto each one of said contact surfaces, applying as the outer one of said two additional metal layers a layer of soft-solderable metal selected from the group consisting of copper and silver, and removing any excess of such additional metals from said insulating layer on areas around each one of said contact surfaces by etching while using an etch mask composed of a photo-lacquer.
Claim 2
Dependent Claim 226 words
In a method of producing electrical contacts on a semiconductor device wherein a semiconductor body is provided with at least one metal contact layer, the area around each such contact layer is completely coated with an insulating layer leaving free a contact surface on each such metal contact layer, at least two different metal layers are additionally successively applied onto each one of said contact surfaces so that the outer metal layer consists of a soft-solderable metal and has a thickness substantially greater than that of the two other metal layers combined, and any excess metal on said insulating layer is removed by a photo-lacquer etching technique, the improvement which comprises: vapor depositing as each of said metal contact layers an aluminum layer, applying a layer of a heat-resistant organic insulating material selected from the group consisting of polyphenylene, polyxylene, and polysiloxane, as said insulating layer, vapor depositing as a first one of said two additional metal layers a layer of titanium onto each one of said contact surfaces, applying as the outer one of said two additional metal layers a layer of soft-solderable metal selected from the group consisting of copper and silver, and removing any excess of such additional metals from said insulating layer on areas around each one of said contact surfaces by etching while using an etch mask composed of a photo-lacquer.
Claim 3
Dependent Claim 33 words
The method of claim 1 wherein said insulating layer is heat-stabilized after application thereof by heating to a temperature from about 300° to 400° C. for a time period of about 30 minutes.
Claim 4
Dependent Claim 21 words
The method of claim 1 wherein said insulating layer is removed from the metal contacts by a masked plasma incineration process.
Claim 5
Dependent Claim 13 words
A semiconductor device produced in accordance with the method defined in claim 1.

References Cited (Backward Citations)

GB985280A Cited
US3700497A Cited
US3710205A Cited

USPTO Annuity & Maintenance Windows

Annuity Stage Window Opens Payment Deadline Surcharge Period Until Estimated Fee Status
3.5 Years (Year 4) 1980-11-07 1981-05-09 1981-11-08 $2000.00 Window Closed / Lapsed
7.5 Years (Year 8) 1984-11-07 1985-05-09 1985-11-08 $3760.00 Window Closed / Lapsed
11.5 Years (Year 12) 1988-11-07 1989-05-09 1989-11-08 $7700.00 Window Closed / Lapsed

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