US4051274A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Method for coating the photoresist onto a belt-like material comprising a perforated carrier and metallic foil
Assignee: Dainippon Screen Manufacturing Co Ltd
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Filing: 1976-03-31
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Granted: 1977-09-27
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Expires: 1996-03-31
Abstract
Abstract A method for coating the photoresist by coating rollers onto a belt-like material comprising a perforated film carrier and a metallic foil laminated thereon. This belt-like material, which has so-called device holes or apertures punched off with a predetermined pitch and is particularly to be used for producing lead frames for IC devices, is wound around a back-up roller with its metallic foil facing outward to give a slight tension to the metallic foil. Thus, a uniform and continuous coating of the photoresist onto the foil may be obtained without any dents formed even at those device holes or apertures.
Inventors
- 👤 Kazuo Hata
- 👤 Sumio Mitani
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-03 00:57
CPC Classifications
G; G03; G03F; G03F7/00; G03F7/16
Claims Analysis
Total Claims: 7
Claim 1
Independent Claim
135 words
In a method for uniformly coating a photoresist by roller coating means utilizing a back-up roller, a coating roller or the like onto a belt-like material consisting of a perforated carrier having longitudinally spaced device holes or apertures and a metallic foil laminated on said perforated carrier, said method comprising: winding said belt-like material around said back-up roller in such a manner that said perforated carrier directly contacts the outer surface of the back-up roller and a slight tension is produced on the metallic foil, and making said coating roller directly contact the surfaces of the metallic foil of the belt-like material at a portion where the belt-like material is wound around the back-up roller and thereby preventing said belt-like material from being depressed adjacent to said device holes or aperatures during the coating process.
Claim 2
Dependent Claim
135 words
In a method for uniformly coating a photoresist by roller coating means utilizing a back-up roller, a coating roller or the like onto a belt-like material consisting of a perforated carrier having longitudinally spaced device holes or apertures and a metallic foil laminated on said perforated carrier, said method comprising: winding said belt-like material around said back-up roller in such a manner that said perforated carrier directly contacts the outer surface of the back-up roller and a slight tension is produced on the metallic foil, and making said coating roller directly contact the surfaces of the metallic foil of the belt-like material at a portion where the belt-like material is wound around the back-up roller and thereby preventing said belt-like material from being depressed adjacent to said device holes or aperatures during the coating process.
Claim 3
Dependent Claim
90 words
A method according to claim 1: further including a step of; providing at least two detecting means at predetermined positions respectively upstream and downstream of a travelling path of said belt-like material, whereby said coating roller is made to contact said belt-like material when both of said detecting means detect an existence of the belt-like material, and said coating roller on the other hand is made to separate from the contact with the belt-like material when one of said detecting means does not detect the existence of the belt-like material.
Claim 4
Dependent Claim
47 words
A method according to claim 2 further including the step of: providing a squeezee roller which is capable of contacting said coating roller while the coating roller is separated from the belt-like material, thereby transferring onto said squeezee roller said photoresist excessively supplied around the coating roller.
Claim 5
Dependent Claim
25 words
A method according to claim 3 wherein excessive photoresist transferred to said squeezee roller from the coating roller is cleared away by a doctor blade.
Claim 6
Dependent Claim
47 words
A method according to claim 1 further including a step of; providing a squeezee roller which is capable of contacting said coating roller while the coating roller is separated from the belt-like material, thereby transferring onto said squeezee roller said photoresist excessively supplied around the coating roller.
Claim 7
Dependent Claim
26 words
A method according to claim 5 above, wherein excessive photoresist transferred to said squeezee roller from the coating roller is cleared away by a doctor blade.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1980-09-26 | 1981-03-28 | 1981-09-27 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1984-09-26 | 1985-03-28 | 1985-09-27 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1988-09-26 | 1989-03-28 | 1989-09-27 | $7700.00 | Window Closed / Lapsed |