Claims Analysis
Total Claims: 8
Claim 1
Independent Claim
153 words
A process for the regeneration of an acidic etching solution containing cupric chloride used in etching of copper comprising the steps of a. electrolyzing a used acidic etching solution containing cupric chloride and cuprous chloride in an electrolytic cell having a cathode compartment separated by a diaphragm from an anode compartment, said used acidic etching solution being contained in said cathode compartment wherein a copper ion concentration of said used acidic etching solution is reduced by deposition of metallic copper on a cathode, a caustic soda solution being contained in said anode compartment wherein chlorine is absorbed by said caustic soda solution, and b. treating an etching solution resulting from an electrolysis according to step (a) with hydrogen peroxide to increase a cupric ion concentration by oxidizing cuprous ions to cupric ions and with hydrochloric acid to increase a chloride ion concentration, said treatment producing a regenerated acidic etching solution containing cupric chloride.
Claim 2
Dependent Claim
153 words
A process for the regeneration of an acidic etching solution containing cupric chloride used in etching of copper comprising the steps of a. electrolyzing a used acidic etching solution containing cupric chloride and cuprous chloride in an electrolytic cell having a cathode compartment separated by a diaphragm from an anode compartment, said used acidic etching solution being contained in said cathode compartment wherein a copper ion concentration of said used acidic etching solution is reduced by deposition of metallic copper on a cathode, a caustic soda solution being contained in said anode compartment wherein chlorine is absorbed by said caustic soda solution, and b. treating an etching solution resulting from an electrolysis according to step (a) with hydrogen peroxide to increase a cupric ion concentration by oxidizing cuprous ions to cupric ions and with hydrochloric acid to increase a chloride ion concentration, said treatment producing a regenerated acidic etching solution containing cupric chloride.
Claim 3
Dependent Claim
30 words
A process according to claim 1, further comprising the step of c. etching copper with said acidic etching solution containing cupric chloride resulting from a treatment according to step (b).
Claim 4
Dependent Claim
36 words
A process according to claim 1, wherein said regenerated acidic etching solution has a same cupric ion concentration as a concentration of an acidic etching solution containing cupric chloride prior to use in etching of copper.
Claim 5
Dependent Claim
13 words
A process according to claim 1, wherein said diaphragm is a ceramic diaphragm.
Claim 6
Dependent Claim
13 words
A process according to claim 1, wherein said diaphragm is an asbestos diaphragm.
Claim 7
Dependent Claim
42 words
A process according to claim 2, further comprising filtering said used acidic etching solution before electrolysis according to step (a), and filtering said regenerated acidic etching solution before etching according to step (c), said steps (a), (b) and (c) being effected simultaneously.
Claim 8
Dependent Claim
38 words
A process according to claim 1, wherein an electrolysis of an acidic etching solution containing cupric chloride and cuprous chloride according to step (a) is effected when an oxidation-reduction potential of said solution is reduced to 400 mV.