Claims Analysis
Total Claims: 17
Claim 1
Independent Claim
115 words
A method of forming an alignment film of biaxial anisotropy which comes into contact with liquid crystal molecules to orient the liquid crystal molecules, comprising the steps of disposing a louver consisting of a plurality of leaves between the surface of a substrate on which the alignment film is to be formed and an evaporation source serving as a material for the alignment film, said leaves being arranged in parallel with one another and spaced from the surface of the substrate at an angle with respect thereto, and depositing particles evaporated from the evaporation source at reduced pressures on the surface of the substrate at angles of incidence of 45° to 75° through said louver.
Claim 2
Independent Claim
115 words
A method of forming an alignment film of biaxial anisotropy which comes into contact with liquid crystal molecules to orient the liquid crystal molecules, comprising the steps of disposing a louver consisting of a plurality of leaves between the surface of a substrate on which the alignment film is to be formed and an evaporation source serving as a material for the alignment film, said leaves being arranged in parallel with one another and spaced from the surface of the substrate at an angle with respect thereto, and depositing particles evaporated from the evaporation source at reduced pressures on the surface of the substrate at angles of incidence of 45° to 75° through said louver.
Claim 3
Dependent Claim
28 words
A method according to claim 1, wherein said leaves constituting the louver are arranged at angles of 15° to 45° with respect to the surface of the substrate.
Claim 4
Dependent Claim
35 words
A method according to claim 1, wherein said particles evaporated from the evaporation source are deposited on the surface of the substrate at pressures of 1 × 10 -2 to 5 × 10 -5 mmHg.
Claim 5
Dependent Claim
61 words
A method according to claim 1, wherein a linear distance from the evaporaton source to the surface of the substrate is longer than the mean free path of the evaporated particles, and a linear distance of free space from the entrance of the louver to the surface of the substrate is shorter than the mean free path of the evaporated particles.
Claim 6
Dependent Claim
23 words
A method according to claim 1, wherein the particles evaporated from the evaporation source have mean free paths of 2 to 50 cm.
Claim 7
Dependent Claim
49 words
A method according to claim 1, wherein the leaves constituting the louver are arranged at angles of 15° to 45° with respect to the surface of the substrate and at angles of view of 10° to 60° defined by the adjacent leaves in the cross section of the leaf.
Claim 8
Dependent Claim
20 words
A method according to claim 1, wherein the alignment film deposited on the substrate is 50 to 600 a thick.
Claim 9
Dependent Claim
17 words
A method according to claim 1, wherein the film deposited on the substrate is an electrical insultor.
Claim 10
Dependent Claim
23 words
A method according to claim 1, wherein the film deposited on the substrate is made of one selected from indium and tin oxide.
Claim 11
Independent Claim
152 words
A method of forming an alignment film of biaxial anisotropy which comes into contact with liquid crystal molecules to orient the liquid crystal molecules, comprising the steps of disposing a louver consisting of a plurality of leaves and a lateral lattice comprising a plurality of plates between the surface of a substrate on which the alignment film is to be formed and an evaporation source serving as a material for said alignment film, said leaves being arranged in parallel with one another and spaced from the surface of the substrate at an angle with respect thereto, disposing a plurality of lateral lattices intersecting perpendicularly to said leaves and having a perpendicular plane with respect to the surface of the substrate, and depositing particles evaporated from the evaporation source at reduced pressures on the surface of the substrate at angles of incidence of 45° to 75° through said lateral lattices and said louver.
Claim 12
Independent Claim
152 words
A method of forming an alignment film of biaxial anisotropy which comes into contact with liquid crystal molecules to orient the liquid crystal molecules, comprising the steps of disposing a louver consisting of a plurality of leaves and a lateral lattice comprising a plurality of plates between the surface of a substrate on which the alignment film is to be formed and an evaporation source serving as a material for said alignment film, said leaves being arranged in parallel with one another and spaced from the surface of the substrate at an angle with respect thereto, disposing a plurality of lateral lattices intersecting perpendicularly to said leaves and having a perpendicular plane with respect to the surface of the substrate, and depositing particles evaporated from the evaporation source at reduced pressures on the surface of the substrate at angles of incidence of 45° to 75° through said lateral lattices and said louver.
Claim 13
Dependent Claim
28 words
A method according to claim 10, wherein said leaves constituting the louver are disposed at angles of 15° to 45° with respect to the surface of the substrate.
Claim 14
Dependent Claim
30 words
A method according to claim 10, wherein said particles are deposited on the surface of the substrate at pressures of 1 × 10 -2 to 5 × 10 -5 mmHg.
Claim 15
Dependent Claim
68 words
A method according to claim 10, wherein a linear distance from the evaporation source to the surface of the substrate is longer than the mean free path of the evaporated particles and a linear distance of free plane in the cross section of the louver from the entrance of the louver to the surface of the substrate is shorter than the mean free path of the evaporated particles.
Claim 16
Independent Claim
131 words
A method of forming an alignment film of biaxial anisotropy which comes into contact with liquid crystal molecules to orient the liquid crystal molecules, comprising the steps of disposing a louver comprising a plurality of leaves between the surface of a substrate on which the alignment film is to be formed and an evaporation source serving as a material for said alignment film, said leaves being arranged in parallel with one another and spaced from the surface of the substrate at an angle with respect thereto, and depositing particles evaporated from the evaporation source at reduced pressures in the presence of a glow discharge region in the proximity of the surface of the substrate on the surface of the substrate at angles of incidence of 45° to 75° through said louver.
Claim 17
Independent Claim
131 words
A method of forming an alignment film of biaxial anisotropy which comes into contact with liquid crystal molecules to orient the liquid crystal molecules, comprising the steps of disposing a louver comprising a plurality of leaves between the surface of a substrate on which the alignment film is to be formed and an evaporation source serving as a material for said alignment film, said leaves being arranged in parallel with one another and spaced from the surface of the substrate at an angle with respect thereto, and depositing particles evaporated from the evaporation source at reduced pressures in the presence of a glow discharge region in the proximity of the surface of the substrate on the surface of the substrate at angles of incidence of 45° to 75° through said louver.