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US4035199A Expired / Lapsed US ⏱️ 0.0 years remaining

Process for thermal gradient zone melting utilizing a guard ring radiation coating

Assignee: General Electric Co
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Filing: 1976-08-30
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Granted: 1977-07-12
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Expires: 1996-08-30
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Abstract

Abstract The practice of thermal gradient zone melting in processing a body of semiconductor material is enhanced by providing a radiation coating on selected surface areas of the body.

Inventors

  • 👤 Thomas R. Anthony
  • 👤 Harvey E. Cline

Bibliographic Details

Application Number —
Jurisdiction US
Data Source google_patents
Last Synchronized 2026-10-27 18:13
CPC Classifications
H; H10; H10P; H10P95/00; H10P95/50

Claims Analysis

Total Claims: 15
Claim 1
Independent Claim 286 words
An improvement in the processing of a body of semiconductor material by thermal gradient zone melting comprising the steps of: (a) selecting a body of semiconductor material having a preferred crystal structure, a preferred type of conductivity, a preferred level of resistivity, two major opposed surfaces being, respectively, the top and bottom surfaces of the body, at least one of the major surfaces having a preferred planar crystal orientation which is one selected from the group consisting of (100), (110) and (111), and a vertical axis substantially aligned with a first preferred crystal axis of the material of the body; (b) forming a layer of a material suitable for absorbing or for re-radiating a predetermined range of wavelength of the most intense portion of the radiation spectrum impinging thereupon on at least one of the two major opposed surfaces, the layer having a predetermined thickness, t, expressed by the following general equation: ##EQU8## wherein n= any positive integer greater than zero, λ = the wavelength in vacuum of the most intense portion of the radiation spectrum impinging upon the layer of material, and N= the index of refraction of the material; (c) shaping the first layer of material to conform to a particular configuration and to cover a predetermined surface area of the major surface of the body on which it is disposed; (d) exposing the processed body to a source of radiant energy; (e) absorbing the predetermined range of wavelength of the most intense portion of the radiation spectrum in the first layer, and (f) increasing the heat flow lines through a predetermined portion of the material of the body to enhance the migration of a metal-rich semiconductor material therethrough by thermal gradient zone melting.
Claim 2
Dependent Claim 286 words
An improvement in the processing of a body of semiconductor material by thermal gradient zone melting comprising the steps of: (a) selecting a body of semiconductor material having a preferred crystal structure, a preferred type of conductivity, a preferred level of resistivity, two major opposed surfaces being, respectively, the top and bottom surfaces of the body, at least one of the major surfaces having a preferred planar crystal orientation which is one selected from the group consisting of (100), (110) and (111), and a vertical axis substantially aligned with a first preferred crystal axis of the material of the body; (b) forming a layer of a material suitable for absorbing or for re-radiating a predetermined range of wavelength of the most intense portion of the radiation spectrum impinging thereupon on at least one of the two major opposed surfaces, the layer having a predetermined thickness, t, expressed by the following general equation: ##EQU8## wherein n= any positive integer greater than zero, λ = the wavelength in vacuum of the most intense portion of the radiation spectrum impinging upon the layer of material, and N= the index of refraction of the material; (c) shaping the first layer of material to conform to a particular configuration and to cover a predetermined surface area of the major surface of the body on which it is disposed; (d) exposing the processed body to a source of radiant energy; (e) absorbing the predetermined range of wavelength of the most intense portion of the radiation spectrum in the first layer, and (f) increasing the heat flow lines through a predetermined portion of the material of the body to enhance the migration of a metal-rich semiconductor material therethrough by thermal gradient zone melting.
Claim 3
Dependent Claim 44 words
The process of claim 1 wherein the first layer is shaped to form an annular guard ring on the outer peripheral portion of a major surface, and exposing that surface upon which the annular guard ring is disposed to a source of radiant energy.
Claim 4
Dependent Claim 22 words
The process of claim 2 wherein the material of the body is silicon, and the material of the layer is silicon oxide.
Claim 5
Dependent Claim 11 words
The process of claim 3 wherein λ is about 1 micron.
Claim 6
Dependent Claim 20 words
The process of claim 3 wherein the silicon oxide is formed by thermal oxidation of the material of the body.
Claim 7
Dependent Claim 61 words
The process of claim 1 wherein the first layer is shaped to a disc-like configuration on the central portion of the major surface, and exposing that surface to the radiation emitted by the material of the body, and including forming an annular low emittance guard ring on the outer peripheral portion of that surface on which the disc-like configuration is formed.
Claim 8
Dependent Claim 22 words
The process of claim 6 wherein the material of the body is silicon, and the material of the layer is silicon oxide.
Claim 9
Dependent Claim 11 words
The process of claim 7 wherein λ is about 1 micron.
Claim 10
Dependent Claim 20 words
The process of claim 7 wherein the silicon oxide is formed by thermal oxidation of the material of the body.
Claim 11
Dependent Claim 102 words
The process of claim 1 wherein the layer of material is formed on both major opposed surfaces of the body, the layer on the major surface to be exposed to a source of radiant energy is shaped to form an annular guard ring configuration disposed on the outer peripheral portion of that surface, and the layer on the other major surface most remote to the source of radiant energy is shaped to form a disc-like configuration centrally disposed on its respective major surface of the body and to form a low emittance guard ring on the outer peripheral portion of that surface.
Claim 12
Dependent Claim 22 words
The process of claim 10 wherein the material of the body is silicon, and the material of the layer is silicon oxide.
Claim 13
Dependent Claim 27 words
The process of claim 11 wherein λ is about 1 micron for the wavelength impinging upon the annular guard ring and its respective surface of the body.
Claim 14
Dependent Claim 21 words
The process of claim 11 wherein the silicon oxide is formed by the thermal oxidation of the material of the body.
Claim 15
Dependent Claim 27 words
The process of claim 11 wherein the thickness of the layer to be shaped to a disc-like configuration is achieved by two silicon oxide forming process steps.

References Cited (Backward Citations)

US2813048A Cited
US3895967A Cited
US3956023A Cited
US4001047A Cited

USPTO Annuity & Maintenance Windows

Annuity Stage Window Opens Payment Deadline Surcharge Period Until Estimated Fee Status
3.5 Years (Year 4) 1980-07-11 1981-01-10 1981-07-12 $2000.00 Window Closed / Lapsed
7.5 Years (Year 8) 1984-07-11 1985-01-10 1985-07-12 $3760.00 Window Closed / Lapsed
11.5 Years (Year 12) 1988-07-11 1989-01-10 1989-07-12 $7700.00 Window Closed / Lapsed

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