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Apparatus of spectroscopy of scattering light

Assignee: Nikon Corp
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Filing: 1975-08-14
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Granted: 1977-07-12
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Expires: 1995-08-14
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Abstract

Abstract Apparatus for spectroscopy of scattering light includes a laser light source, light restricting means for restricting the light scattered by an object, predetermined wavelength selecting means and photon-correlation spectroscopy means for treating the restricted and selected scattering light. This device permits selection of a desired single line of a plurality of spectral lines of the scattering light, and to measure the shape of the spectral line.

Inventors

  • 👤 Takeshi Yamaguchi

Bibliographic Details

Application Number —
Jurisdiction US
Data Source google_patents
Last Synchronized 2026-11-07 16:17
CPC Classifications
G; G01; G01J; G01J3/00; G01J3/28; G01J3/44; G01J3/4412; G01J3/12; G01J3/26

Claims Analysis

Total Claims: 7
Claim 1
Independent Claim 82 words
A spectroscopic apparatus for measurement of the shape of the Brillouin component in scattered light from an object comprising: (a) a laser source for illuminating the object; (b) light restricting means adapted to satisfy a coherence condition for restricting a scattering angle of the scattered light from the object; (c) means for selecting a single Brillouin component among the plurality of spectrum components in the scattered light; (d) photo-correlation spectroscopy means for treating said single Brillouin component obtained by said selecting means.
Claim 2
Dependent Claim 82 words
A spectroscopic apparatus for measurement of the shape of the Brillouin component in scattered light from an object comprising: (a) a laser source for illuminating the object; (b) light restricting means adapted to satisfy a coherence condition for restricting a scattering angle of the scattered light from the object; (c) means for selecting a single Brillouin component among the plurality of spectrum components in the scattered light; (d) photo-correlation spectroscopy means for treating said single Brillouin component obtained by said selecting means.
Claim 3
Dependent Claim 32 words
A spectroscopic apparatus according to claim 1, wherein said selecting means is a scanning-type Fabry-Perot interferometer having the wavelength range of transmission characteristic nearly equal to that of said single spectrum component.
Claim 4
Independent Claim 116 words
A method for measuring the shape of a single spectrum component in the light which is scattered by an object and which contains a plurality of spectrum components, comprising the steps of: applying a laser beam to the object; restricting the light scattered by the object to satisfy a coherence condition at a predetermined scattering angle; scanning said restricted light over the wavelength range thereof; detecting the individual center wavelengths of said plurality of spectrum components in said restricted light; selecting a single spectrum component among said plurality of spectrum components in said scattered light according to the detected wavelength; and determining the correlation function by performing photon-correlation spectroscopy in respect of said single spectrum component.
Claim 5
Independent Claim 116 words
A method for measuring the shape of a single spectrum component in the light which is scattered by an object and which contains a plurality of spectrum components, comprising the steps of: applying a laser beam to the object; restricting the light scattered by the object to satisfy a coherence condition at a predetermined scattering angle; scanning said restricted light over the wavelength range thereof; detecting the individual center wavelengths of said plurality of spectrum components in said restricted light; selecting a single spectrum component among said plurality of spectrum components in said scattered light according to the detected wavelength; and determining the correlation function by performing photon-correlation spectroscopy in respect of said single spectrum component.
Claim 6
Dependent Claim 16 words
A method according to claim 3, wherein said selected single spectrum component is a Brillouin component.
Claim 7
Dependent Claim 59 words
A method according to claim 3, wherein said selecting step comprises transmitting the single spectrum component by filtering means with predetermined transmission characteristic, said method further comprising the step of transforming said calculated correlation function into the correlation function which is independent of said transmission characteristic, to thereby obtain the correlation function according to said detected single spectrum component.

References Cited (Backward Citations)

US3621220A Cited
US3835315A Cited
US3914055A Cited

USPTO Annuity & Maintenance Windows

Annuity Stage Window Opens Payment Deadline Surcharge Period Until Estimated Fee Status
3.5 Years (Year 4) 1980-07-11 1981-01-10 1981-07-12 $2000.00 Window Closed / Lapsed
7.5 Years (Year 8) 1984-07-11 1985-01-10 1985-07-12 $3760.00 Window Closed / Lapsed
11.5 Years (Year 12) 1988-07-11 1989-01-10 1989-07-12 $7700.00 Window Closed / Lapsed

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