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US4033786A Expired / Lapsed US ⏱️ 0.0 years remaining

Temperature gradient zone melting utilizing selective radiation coatings

Assignee: General Electric Co
•
Filing: 1976-08-30
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Granted: 1977-07-05
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Expires: 1996-08-30
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Abstract

Abstract Optical coatings are employed on selected surface areas of a semiconductor element to enhance processing of semiconductor materials by temperature gradient zone melting.

Inventors

  • 👤 Thomas R. Anthony
  • 👤 Harvey E. Cline

Bibliographic Details

Application Number —
Jurisdiction US
Data Source google_patents
Last Synchronized 2026-11-05 09:37
CPC Classifications
H; H10; H10P; H10P95/00; H10P95/50

Claims Analysis

Total Claims: 18
Claim 1
Independent Claim 228 words
An improvement in the processing of a body of semiconductor material by thermal gradient zone melting comprising the steps of: (a) selecting a body of semiconductor material having a preferred crystal structure, a preferred type of conductivity, a preferred level of resistivity, two major opposed surfaces being, respectively, the top and bottom surfaces of the body, at least one of the major surfaces having a preferred planar crystal orientation, and a vertical axis substantially aligned with a first preferred crystal axis of the material of the body; (b) forming a layer of a material suitable for absorbing a predetermined range of wavelength of the radiation spectrum impinging thereupon on at least one of the two major opposed surfaces, the layer having a predetermined thickness, expressed by the following general equation: ##EQU6## wherein n= any positive integer greater than zero λ = the wavelength of the most intense portion of radiation spectrum impinging upon the material in vacuum and N= the index of refraction of the material; (c) exposing the processed body to a source of radiant energy; (d) absorbing the predetermined range of wavelength of the most intense portion of the spectrum in the layer of material, and (e) increasing the heat flow lines through the material of the body to enhance the migration of a melt of metal-rich semiconductor through the body by thermal gradient zone melting.
Claim 2
Dependent Claim 228 words
An improvement in the processing of a body of semiconductor material by thermal gradient zone melting comprising the steps of: (a) selecting a body of semiconductor material having a preferred crystal structure, a preferred type of conductivity, a preferred level of resistivity, two major opposed surfaces being, respectively, the top and bottom surfaces of the body, at least one of the major surfaces having a preferred planar crystal orientation, and a vertical axis substantially aligned with a first preferred crystal axis of the material of the body; (b) forming a layer of a material suitable for absorbing a predetermined range of wavelength of the radiation spectrum impinging thereupon on at least one of the two major opposed surfaces, the layer having a predetermined thickness, expressed by the following general equation: ##EQU6## wherein n= any positive integer greater than zero λ = the wavelength of the most intense portion of radiation spectrum impinging upon the material in vacuum and N= the index of refraction of the material; (c) exposing the processed body to a source of radiant energy; (d) absorbing the predetermined range of wavelength of the most intense portion of the spectrum in the layer of material, and (e) increasing the heat flow lines through the material of the body to enhance the migration of a melt of metal-rich semiconductor through the body by thermal gradient zone melting.
Claim 3
Dependent Claim 22 words
The process of claim 1 wherein the material of the body is silicon, and the material of the layer is silicon oxide.
Claim 4
Dependent Claim 11 words
The process of claim 2 wherein λ is about one micron.
Claim 5
Dependent Claim 20 words
The process of claim 3 wherein the silicon oxide is formed by thermal oxidation of the material of the body.
Claim 6
Dependent Claim 41 words
The process of claim 1 and including disposing the body between a source of radiant energy and a heat sink and oriented to expose one major surface to the radiant energy source and the other major surface to the heat sink.
Claim 7
Dependent Claim 40 words
The process of claim 5 wherein the layer is formed on the major surface exposed to the heat sink, and λ is determined by the radiation spectrum emitted by the body at the surface upon which the layer is formed.
Claim 8
Dependent Claim 22 words
The process of claim 6 wherein the material of the body is silicon, and the material of the layer is silicon oxide.
Claim 9
Dependent Claim 20 words
The process of claim 7 wherein the silicon oxide is formed by thermal oxidation of the material of the body.
Claim 10
Dependent Claim 33 words
The process of claim 5 wherein the layer is disposed on the major surface exposed to the source of radiant energy, and λ is determined by the radiation spectrum emitted by the source.
Claim 11
Dependent Claim 11 words
The process of claim 9 wherein λ is about one micron.
Claim 12
Dependent Claim 22 words
The process of claim 10 wherein the material of the body is silicon, and the material of the layer is silicon oxide.
Claim 13
Dependent Claim 20 words
The process of claim 11 wherein the silicon oxide is formed by thermal oxidation of the material of the body.
Claim 14
Dependent Claim 17 words
The process of claim 5 wherein a layer is formed on each of the opposed major surfaces.
Claim 15
Dependent Claim 52 words
The process of claim 13 wherein λ of the source is about 1 micron and is employed to determine the thickness of the layer which is exposed thereto, and λ of the radiation of the body is employed to determine the thickness of the layer exposed thereto and to the heat sink.
Claim 16
Dependent Claim 22 words
The process of claim 14 wherein the material of the body is silicon, and the material of the layer is silicon oxide.
Claim 17
Dependent Claim 20 words
The process of claim 15 wherein the silicon oxide is formed by thermal oxidation of the material of the body.
Claim 18
Dependent Claim 20 words
The process of claim 13 wherein one of the layers and a portion of the other layer are formed simultaneously.

References Cited (Backward Citations)

US2813048A Cited
US3627590A Cited
US3897277A Cited
US3901736A Cited
US3904442A Cited
US3972742A Cited

USPTO Annuity & Maintenance Windows

Annuity Stage Window Opens Payment Deadline Surcharge Period Until Estimated Fee Status
3.5 Years (Year 4) 1980-07-04 1981-01-03 1981-07-05 $2000.00 Window Closed / Lapsed
7.5 Years (Year 8) 1984-07-04 1985-01-03 1985-07-05 $3760.00 Window Closed / Lapsed
11.5 Years (Year 12) 1988-07-04 1989-01-03 1989-07-05 $7700.00 Window Closed / Lapsed

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