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US4025892A Expired / Lapsed US ⏱️ 0.0 years remaining

Probe for detecting gaseous polar molecules such as water vapor

Assignee: US Philips Corp
•
Filing: 1975-05-13
•
Granted: 1977-05-24
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Expires: 1995-05-13
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Abstract

Abstract Probe for selectively detecting polar molecules in a gaseous atmosphere in contact with the probe, characterized by a layer of semiconductor material covered by a film of dielectric material.

Inventors

  • 👤 Jean Pompei
  • 👤 Bernard Lacroix
  • 👤 Francis Pierrot

Bibliographic Details

Application Number —
Jurisdiction US
Data Source google_patents
Last Synchronized 2026-10-31 17:40
CPC Classifications
G; G01; G01N; G01N27/00; G01N27/02; G01N27/04; G01N27/12; G01N27/129; G01N27/121

Claims Analysis

Total Claims: 7
Claim 1
Independent Claim 96 words
Probe for selectively detecting polar molecules in a gaseous mixture in contact with the probe, the operation of the probe being based on the variation of its electrical resistance due to a reaction at the probe surface, characterized in that it comprises a substrate on which is deposited a layer of a semiconductor material of thickness 0.05 to 0.08 μm to which are connected at least two electrodes and which is covered by a film of a dielectric material of thickness 0.01 to 0.04 μm at least part of which is active as a detection area.
Claim 2
Dependent Claim 96 words
Probe for selectively detecting polar molecules in a gaseous mixture in contact with the probe, the operation of the probe being based on the variation of its electrical resistance due to a reaction at the probe surface, characterized in that it comprises a substrate on which is deposited a layer of a semiconductor material of thickness 0.05 to 0.08 μm to which are connected at least two electrodes and which is covered by a film of a dielectric material of thickness 0.01 to 0.04 μm at least part of which is active as a detection area.
Claim 3
Dependent Claim 16 words
Probe as claimed in claim 1, characterized in that the said semiconductor compound is zinc oxide.
Claim 4
Dependent Claim 14 words
Probe as claimed in claim 1, characterized in that the dielectric material is tetraethoxysilane.
Claim 5
Dependent Claim 18 words
Probe as claimed in claim 3 having continuous sensitivity, characterized in that the dielectric layer is polycondensed tetraethoxysilane.
Claim 6
Dependent Claim 27 words
Probe as claimed in claim 3 having threshold sensitivity, characterized in that the dielectric layer consists of polycondensed tetraethoxysilane covered by a monomolecular layer of monomeric tetraethoxysilane.
Claim 7
Dependent Claim 21 words
Probe as claimed in claim 1 for detecting humidity and having threshold sensitivity, characterized in that the dielectric material is polytetrafluoroethylene.

References Cited (Backward Citations)

US3242007A Cited
US3864659A Cited

USPTO Annuity & Maintenance Windows

Annuity Stage Window Opens Payment Deadline Surcharge Period Until Estimated Fee Status
3.5 Years (Year 4) 1980-05-23 1980-11-22 1981-05-24 $2000.00 Window Closed / Lapsed
7.5 Years (Year 8) 1984-05-23 1984-11-22 1985-05-24 $3760.00 Window Closed / Lapsed
11.5 Years (Year 12) 1988-05-23 1988-11-22 1989-05-24 $7700.00 Window Closed / Lapsed

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