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US4023725A Expired / Lapsed US ⏱️ 0.0 years remaining

Semiconductor device manufacture

Assignee: US Philips Corp
•
Filing: 1975-03-03
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Granted: 1977-05-17
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Expires: 1995-03-03
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Abstract

Abstract A method of bonding a semiconductor body to a supporting member where the whole back face of the semiconductor body is covered with a thin evaporated layer of chromium or titanium, which layer is then covered with a thin evaporated layer of rhodium, platinum or palladium, which is in turn bonded by a film of solder to the supporting member.

Inventors

  • 👤 Peter Robert Ivett
  • 👤 Christopher Tooth
  • 👤 Leslie Charles Davis

Bibliographic Details

Application Number —
Jurisdiction US
Data Source google_patents
Last Synchronized 2026-10-25 11:12
CPC Classifications
H; H10; H10P; H10P95/00; H10W; H10W72/00; H10W72/071; H10W72/073; H10W72/07331; H10W72/07336; H10W72/075; H10W72/07531; H10W72/07532; H10W72/07533; H10W72/30; H10W72/351; H10W72/352; H10W72/90; H10W72/951; H10W72/952; H10W90/00; H10W90/701; H10W90/731; H10W90/736

Claims Analysis

Total Claims: 12
Claim 1
Independent Claim 76 words
A method of mechanically, electrically and thermally bonding the back face of a semiconductor body to a supporting member, comprising the steps of: evaporating a thin layer of chromium onto the back surface of the semiconductor body; evaporating onto the chromium layer a thin layer of metal selected from the group consisting of rhodium, platinum, palladium and alloys thereof; fusing the metallized back surface of the semiconductor body to the supporting member with a solder film.
Claim 2
Independent Claim 76 words
A method of mechanically, electrically and thermally bonding the back face of a semiconductor body to a supporting member, comprising the steps of: evaporating a thin layer of chromium onto the back surface of the semiconductor body; evaporating onto the chromium layer a thin layer of metal selected from the group consisting of rhodium, platinum, palladium and alloys thereof; fusing the metallized back surface of the semiconductor body to the supporting member with a solder film.
Claim 3
Independent Claim 64 words
A method of mechanically, electrically and thermally bonding the back face of a semiconductor body to a supporting member, comprising the steps of: evaporating a thin layer of chromium onto the back surface of the semiconductor body; evaporating onto the chromium layer a thin layer of rhodium; fusing the metallized back surface of the semiconductor body to the supporting member with a solder film.
Claim 4
Independent Claim 64 words
A method of mechanically, electrically and thermally bonding the back face of a semiconductor body to a supporting member, comprising the steps of: evaporating a thin layer of chromium onto the back surface of the semiconductor body; evaporating onto the chromium layer a thin layer of rhodium; fusing the metallized back surface of the semiconductor body to the supporting member with a solder film.
Claim 5
Dependent Claim 19 words
A method as defined in claim 2 wherein the rhodium layer is less than half a micron in thickness.
Claim 6
Dependent Claim 21 words
A method as defined in claim 3 wherein the rhodium layer is less than a tenth of a micron in thickness.
Claim 7
Dependent Claim 19 words
A method as defined in claim 3 wherein the chromium layer is less than half a micron in thickness.
Claim 8
Dependent Claim 29 words
A method as defined in claim 2 wherein the solder material of the solder film is one of the soft solder materials having a melting point below 330° C.
Claim 9
Dependent Claim 23 words
A method as defined in claim 6 wherein the solder material consists essentially of lead, silver and tin, lead being the main constituent.
Claim 10
Dependent Claim 22 words
A method as defined in claim 2 wherein the metallized back surface is fused to the supporting member by capillary flow soldering.
Claim 11
Dependent Claim 25 words
A method as defined in claim 2 wherein the metallized back surface is fused to the supporting member by pressure-bonding via an intermediate solder film.
Claim 12
Dependent Claim 15 words
A method as defined in claim 2 wherein the supporting member comprises a ceramic substrate.

References Cited (Backward Citations)

US3339267A Cited

USPTO Annuity & Maintenance Windows

Annuity Stage Window Opens Payment Deadline Surcharge Period Until Estimated Fee Status
3.5 Years (Year 4) 1980-05-16 1980-11-15 1981-05-17 $2000.00 Window Closed / Lapsed
7.5 Years (Year 8) 1984-05-16 1984-11-15 1985-05-17 $3760.00 Window Closed / Lapsed
11.5 Years (Year 12) 1988-05-16 1988-11-15 1989-05-17 $7700.00 Window Closed / Lapsed

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