US4012767A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Electrical interconnections for semi-conductor devices
Assignee: General Electric Co
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Filing: 1976-02-25
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Granted: 1977-03-15
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Expires: 1996-02-25
Abstract
Abstract In a semiconductor device low impedance ohmic connection is provided between a first conductor constituted of a metallic oxide material and a second conductor constituted of aluminum by the inclusion between the two conductors of a conductive interface member making low impedance ohmic contact to each of the first and second conductors.
Inventors
- 👤 Dale M. Brown
- 👤 Marvin Garfinkel
- 👤 Mario Ghezzo
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-24 18:41
CPC Classifications
H; H10; H10F; H10F77/00; H10F77/93; H10F77/933; H10W; H10W20/00; H10W20/40; H10W20/41; H10W20/425
Claims Analysis
Total Claims: 13
Claim 1
Independent Claim
47 words
In combination, a substrate a semiconductor material having a major face, a first conductive member of a light transmissive metallic oxide material overlying said substrate, a second conductive member of aluminum, a third conductive member in low impedance ohmic contact with said first and second conductive members.
Claim 2
Dependent Claim
47 words
In combination, a substrate a semiconductor material having a major face, a first conductive member of a light transmissive metallic oxide material overlying said substrate, a second conductive member of aluminum, a third conductive member in low impedance ohmic contact with said first and second conductive members.
Claim 3
Dependent Claim
24 words
The combination of claim 1 including first layer of insulating material interposed between said major surface of said substrate and said first conductive member.
Claim 4
Dependent Claim
70 words
The combination of claim 2 including a second layer of insulating material lying on said first conductive member and having an opening therein exposing a portion of said first conductive member, said second conductive member of aluminum located on said layer of insulating material, said third conductive member having one portion lying in said opening and contacting said first conductive member and having another portion contacting said second conductive member.
Claim 5
Dependent Claim
23 words
The combination of claim 2 in which said first conductive member forms a capacitor with said substrate and said first layer of insulation.
Claim 6
Dependent Claim
27 words
The combination of claim 4 in which said light transmissive material is selected from the class of indium tin oxide and antimony tin oxide and combinations thereof.
Claim 7
Dependent Claim
25 words
The combination of claim 4 in which said light transmissive material consists of approximately 90% by weight of indium oxide and the remainder tin oxide.
Claim 8
Dependent Claim
25 words
The combination of claim 4 in which said light transmissive material consists of approximately 5% by weight of antimony oxide and the remainder tin oxide.
Claim 9
Dependent Claim
15 words
The combination of claim 1 in which said third conductive member comprises a refractory metal.
Claim 10
Dependent Claim
12 words
The combination of claim 8 in which said refractory metal comprises molybdenum.
Claim 11
Dependent Claim
13 words
The combination of claim 1 in which said third conductive member comprises titanium.
Claim 12
Dependent Claim
15 words
The combination of claim 1 in which said third conductive member comprises non-stoichiometric titanium oxide.
Claim 13
Dependent Claim
12 words
The combination of claim 1 in which said semiconductor material comprises silicon.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1980-03-14 | 1980-09-13 | 1981-03-15 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1984-03-14 | 1984-09-13 | 1985-03-15 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1988-03-14 | 1988-09-13 | 1989-03-15 | $7700.00 | Window Closed / Lapsed |