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US3988768A Expired / Lapsed US ⏱️ 0.0 years remaining

Deep diode silicon controlled rectifier

Assignee: General Electric Co
•
Filing: 1975-02-28
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Granted: 1976-10-26
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Expires: 1995-02-28
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Abstract

Abstract A semiconductor controlled rectifier has a lamellar body of semiconductor material of at least one group of four alternate first and second regions of opposite type conductivity. The second regions are made from recrystallized semiconductor material of the first regions and contain a sufficient level of concentration of a dopant impurity to impart thereto the opposite type conductivity. It is recrystallized material with solid solubility of the impurity. The controlled rectifier is turned on and off by either a control electrode or a source of illumination.

Inventors

  • 👤 Thomas R. Anthony
  • 👤 Harvey E. Cline

Bibliographic Details

Application Number —
Jurisdiction US
Data Source google_patents
Last Synchronized 2026-10-27 07:55
CPC Classifications
H; H10; H10D; H10D62/00; H10D62/40; H10D18/00; H10F; H10F30/00; H10F30/20; H10F30/21; H10F30/26; H10F30/263; H10P; H10P95/00; H10P95/50

Claims Analysis

Total Claims: 29
Claim 1
Independent Claim 597 words
A semiconductor device comprising a body of semiconductor material having a predetermined first type conductivity, a predetermined level of resistivity, two major opposed surfaces comprising the top and bottom surfaces thereof and a lamellar structure of at least four planar regions of alternate and opposite type conductivity formed in situ in the body and extending between, and terminating in, the opposed major surfaces; the body having an axis substantially perpendicular to the two major opposed surfaces and substantially parallel with a first preferred crystal axis of the material of the of the body; at least one of the major opposed surfaces having a preferred crystal planar orientation which is one selected from the group consisting of (111), (110) and (100); a plurality of first planar regions of first regions of first type conductivity comprising at least two of the planar regions; a plurality of second regions of second type conductivity comprising at least two of the planar regions; each of the first and second regions being aligned substantially with a preferred second crystal axis of the body; the material of at least each second region consisting of recrystallized semiconductor material of the body which is formed in situ by the migration of a melt of a metal-rich semiconductor material of the body, which comprises at least one dopant material, by thermal gradient zone melting at a predetermined elevated temperature along a thermal gradient substantially parallel with the first preferred crystal axis and the axis of the body substantially perpendicular to the major surface having the preferred crystal planar orientation, and having a predetermined level of concentration of the metal of the melt as determined by the solid solubility limit of that metal in that semiconductor material at that predetermined elevated temperature of migration and the metal is distributed substantially uniformly throughout the entire region to provide a substantially uniform level of resistivity throughout the entire region and to impart the predetermined type conductivity thereto and having a substantially uniform cross-section throughout the entire region; each of the first and second regions having opposed major surfaces; one of the major surfaces of one of the first regions being coextensive with one of the opposed major surfaces of the body; a first P-N junction formed by the contiguous surfaces of the other opposed major surface of the first region and the mutually adjacent major opposed surface of the adjacent second region; one of the major surfaces of one of the second regions being coextensive with the other of the opposed major surfaces of the body; a second P-N junction formed by the contiguous surfaces of the other of the major opposed surfaces of the second region and one of the adjacent major opposed surfaces of the adjacent first region; a plurality of third P-N junctions, each third P-N junction being formed by a remaining pair of contiguous major opposed surfaces of each pair of mutually adjacent first and second regions of opposite type conductivity; a first electrical contact affixed to, and in an electrical conductive relationship with, a selected surface area of the region which has a surface coextensive with one of the two major opposed surfaces of the body; a second electrical contact affixed to, and in an electrical conductive relationship with, a selected surface area of the other region having a surface coextensive with the other of the two major opposed end surfaces of the body, and gating means for biasing at least one of the first, the second and the plurality of third P-N junctions to at least switch the semiconductor device into an "on" condition.
Claim 2
Dependent Claim 597 words
A semiconductor device comprising a body of semiconductor material having a predetermined first type conductivity, a predetermined level of resistivity, two major opposed surfaces comprising the top and bottom surfaces thereof and a lamellar structure of at least four planar regions of alternate and opposite type conductivity formed in situ in the body and extending between, and terminating in, the opposed major surfaces; the body having an axis substantially perpendicular to the two major opposed surfaces and substantially parallel with a first preferred crystal axis of the material of the of the body; at least one of the major opposed surfaces having a preferred crystal planar orientation which is one selected from the group consisting of (111), (110) and (100); a plurality of first planar regions of first regions of first type conductivity comprising at least two of the planar regions; a plurality of second regions of second type conductivity comprising at least two of the planar regions; each of the first and second regions being aligned substantially with a preferred second crystal axis of the body; the material of at least each second region consisting of recrystallized semiconductor material of the body which is formed in situ by the migration of a melt of a metal-rich semiconductor material of the body, which comprises at least one dopant material, by thermal gradient zone melting at a predetermined elevated temperature along a thermal gradient substantially parallel with the first preferred crystal axis and the axis of the body substantially perpendicular to the major surface having the preferred crystal planar orientation, and having a predetermined level of concentration of the metal of the melt as determined by the solid solubility limit of that metal in that semiconductor material at that predetermined elevated temperature of migration and the metal is distributed substantially uniformly throughout the entire region to provide a substantially uniform level of resistivity throughout the entire region and to impart the predetermined type conductivity thereto and having a substantially uniform cross-section throughout the entire region; each of the first and second regions having opposed major surfaces; one of the major surfaces of one of the first regions being coextensive with one of the opposed major surfaces of the body; a first P-N junction formed by the contiguous surfaces of the other opposed major surface of the first region and the mutually adjacent major opposed surface of the adjacent second region; one of the major surfaces of one of the second regions being coextensive with the other of the opposed major surfaces of the body; a second P-N junction formed by the contiguous surfaces of the other of the major opposed surfaces of the second region and one of the adjacent major opposed surfaces of the adjacent first region; a plurality of third P-N junctions, each third P-N junction being formed by a remaining pair of contiguous major opposed surfaces of each pair of mutually adjacent first and second regions of opposite type conductivity; a first electrical contact affixed to, and in an electrical conductive relationship with, a selected surface area of the region which has a surface coextensive with one of the two major opposed surfaces of the body; a second electrical contact affixed to, and in an electrical conductive relationship with, a selected surface area of the other region having a surface coextensive with the other of the two major opposed end surfaces of the body, and gating means for biasing at least one of the first, the second and the plurality of third P-N junctions to at least switch the semiconductor device into an "on" condition.
Claim 3
Dependent Claim 44 words
The semiconductor device of claim 1 wherein the at least one of the opposed major surface has a preferred planar crystal orientation of (100) and the second crystal axis is one selected from the group consisting of < 011 > and < 011 >.
Claim 4
Dependent Claim 28 words
The semiconductor device of claim 2 wherein the semiconductor material of the body is one selected from the group consisting of silicon, germanium, silicon carbide and gallium arsenide.
Claim 5
Dependent Claim 33 words
The semiconductor device of claim 1 wherein the at least one of the opposed major surfaces have a preferred planar crystal orientation of (110) and the second crystal axis is < 110 >.
Claim 6
Dependent Claim 20 words
The semiconductor device of claim 4 wherein the material of the body is silicon, silicon carbide, germanium and gallium arsenide.
Claim 7
Dependent Claim 41 words
The semiconductor device of claim 1 wherein the at least one of the opposed major surfaces has a preferred planar crystal orientation of (111), and each recrystallized region has any stable wire direction for a (111) planar orientation of the surface.
Claim 8
Dependent Claim 38 words
The semiconductor device of claim 6 wherein the second crystal axis is one selected from the group consisting of < 011 >, < 101 >, < 110 >, < 112 >, < 211 > and < 121 >.
Claim 9
Dependent Claim 27 words
The semiconductor device of claim 7 wherein the material of the body is one selected from the group consisting of silicon, silicon carbide, germanium, and gallium arsenide.
Claim 10
Dependent Claim 27 words
The semiconductor device of claim 6 wherein the material of the body is one selected from the group consisting of silicon, silicon carbide, germanium and gallium arsenide.
Claim 11
Dependent Claim 43 words
The semiconductor device of claim 1 wherein the gating means includes an ability to focus radiant energy on one of the P-N junctions, the radiant energy being of a suitable wave length sufficient to at least switch the device to an "on" condition.
Claim 12
Dependent Claim 25 words
The semiconductor device of claim 1 wherein the semiconductor material is one selected from the group consisting of silicon, silicon carbide, gallium arsenide and germanium.
Claim 13
Dependent Claim 19 words
The semiconductor device of claim 1 wherein the semiconductor material is silicon, and the dopant impurity material is aluminum.
Claim 14
Dependent Claim 129 words
The semiconductor device of claim 12 wherein the semiconductor material is silicon, the lamellar structure consists of 4 alternate regions of P and N type conductivity, each P type region is formed in situ by thermal gradient zone melting and the dopant material aluminum of a level of concentration of 2 × 10 19 atoms per cubic centimeter, the N type region disposed between the two P type regions is formed in situ by thermal gradient zone melting and at least one dopant material is antimony of a level of concentration of about 1 × 10 19 atoms per cubic centimeter, and the other N type region has a resistivity of 10 ohm-centimeter and a dopant concentration of about 1 × 10 14 atoms of antimony per cubic centimeter.
Claim 15
Dependent Claim 20 words
The semiconductor device of claim 13 wherein the doping impurity material of the other of the first regions is antimony.
Claim 16
Dependent Claim 41 words
The semiconductor device of claim 14 including gold as a second dopant impurity material distributed substantially uniformly throughout the other of the first regions by the thermal gradient zone melting process to control the lifetime of the silicon in that region.
Claim 17
Dependent Claim 24 words
The semiconductor device of claim 12 wherein each of the P-N junctions is a step junction and has a width of approximately 0.3 micron.
Claim 18
Dependent Claim 42 words
The semiconductor device of claim 1 wherein the gating means includes a means for focusing a light source on one of the P-N junctions, the light being of a suitable wave length sufficient to switch the device into "on" and "off" states.
Claim 19
Dependent Claim 25 words
The semiconductor device of claim 17 wherein the semiconductor material is one selected from the group consisting of silicon, silicon carbide, gallium arsenide and germanium.
Claim 20
Dependent Claim 19 words
The semiconductor device of claim 18 wherein the semiconductor material is silicon, and the dopant impurity material is aluminum.
Claim 21
Dependent Claim 24 words
The semiconductor device of claim 19 wherein each of the P-N junctions is a step junction and has a width of approximately 0.3 micron.
Claim 22
Dependent Claim 302 words
A semiconductor controlled rectifier comprising four concentric abutting planar regions of alternate and opposite type conductivity and selected resistivity formed in situ in a substrate of single crystal semiconductor material having two major opposed surfaces, the first and third regions being of the same, and a first, type conductivity and the second and fourth regions being of the same and a second and opposite, type conductivity; a first P-N junction formed by the contiguous surfaces of the first and second regions of opposite type conductivity; a second P-N junction formed by the contiguous surfaces of the second and third regions of opposite type conductivity; a third P-N junction formed by the contiguous surfaces of the third and fourth regions of opposite type conductivity; a first electrical lead affixed to the first region; a second electrical lead affixed to the third region, and a third electrical lead affixed to the fourth region, and wherein each planar region extends entirely between and terminates in the two opposed major surfaces and the material of each of at least two of the planar regions consists of recrystallized semiconductor material of the substrate which is formed in situ by the migration of a melt of a metal-rich semiconductor material of the substrate by thermal gradient zone melting at a predetermined elevated temperature along a thermal gradient substantially parallel with a first preferred crystal axis of the material of the substrate and having a predetermined level of concentration of the melt as determined by the solid solubility limit of that metal in that semiconductor material at that predetermined elevated temperature of migration and the metal, which includes at least one dopant material, for the material of the substrate is distributed substantially uniformly throughout the respective entire region to impart a selected type conductivity and a selected resistivity thereto.
Claim 23
Dependent Claim 302 words
A semiconductor controlled rectifier comprising four concentric abutting planar regions of alternate and opposite type conductivity and selected resistivity formed in situ in a substrate of single crystal semiconductor material having two major opposed surfaces, the first and third regions being of the same, and a first, type conductivity and the second and fourth regions being of the same and a second and opposite, type conductivity; a first P-N junction formed by the contiguous surfaces of the first and second regions of opposite type conductivity; a second P-N junction formed by the contiguous surfaces of the second and third regions of opposite type conductivity; a third P-N junction formed by the contiguous surfaces of the third and fourth regions of opposite type conductivity; a first electrical lead affixed to the first region; a second electrical lead affixed to the third region, and a third electrical lead affixed to the fourth region, and wherein each planar region extends entirely between and terminates in the two opposed major surfaces and the material of each of at least two of the planar regions consists of recrystallized semiconductor material of the substrate which is formed in situ by the migration of a melt of a metal-rich semiconductor material of the substrate by thermal gradient zone melting at a predetermined elevated temperature along a thermal gradient substantially parallel with a first preferred crystal axis of the material of the substrate and having a predetermined level of concentration of the melt as determined by the solid solubility limit of that metal in that semiconductor material at that predetermined elevated temperature of migration and the metal, which includes at least one dopant material, for the material of the substrate is distributed substantially uniformly throughout the respective entire region to impart a selected type conductivity and a selected resistivity thereto.
Claim 24
Dependent Claim 28 words
The semiconductor controlled rectifier of claim 21 wherein the material of the substrate is silicon of N-type conductivity, and the first and third regions are of P-type conductivity.
Claim 25
Dependent Claim 34 words
The semiconductor controlled rectifier of claim 24 wherein the material of the substrate is silicon of N-type conductivity, and the first and third regions are of P-type conductivity and the dopant material is aluminum.
Claim 26
Dependent Claim 532 words
A semiconductor device comprising a body of semiconductor material having a predetermined first type conductivity, a predetermined level of resistivity, two major opposed surfaces being, respectively, the top and bottom surfaces thereof and a lamellar structure of at least three planar regions formed in situ in the body; the body having an axis substantially perpendicular to at least top surface of the body and substantially parallel with a first preferred crystal axis of the material of the body; at least one of the opposed major surfaces having a preferred crystal planar orientation which is one selected from the group consisting of (111), (110) and (100); each of the three planar regions having a preferred crystal axis which is substantially parallel with the at least one surface having the preferred crystal planar orientation and perpendicular to the first preferred crystal axis; the material of each of at least first and third planar regions consisting of recrystallized semiconductor material of the body which is formed in situ by the migration of a melt of a metal-rich semiconductor material of body by thermal gradient zone melting at a predetermined elevated temperature along a thermal gradient substantially parallel with the first preferred crystal axis and the axis of the body and having a predetermined level of concentration of the metal of the melt as determined by the solid solubility limit of that metal in that semiconductor material at that predetermined elevated temperature of migration and the metal, which includes at least one dopant material for the material of the body, is distributed substantially uniformly throughout the entire region; a surface area of the first region being coextensive with the bottom surface of the body; a surface area of the third region being coextensive with the top surface of the body; the material of the second region comprising the material of the body; a first P-N junction formed by the abutting surfaces of the first and second regions of opposite type conductivity; a second P-N junction formed by the abutting surfaces of the second and third regions of opposite type conductivity; a plurality of spaced fourth regions of first type conductivity formed in a predetermined portion of the third region, each fourth region having a surface area coextensive with a predetermined surface of the body and the surface area of the third region and each fourth region extends a predetermined distance into the third region from that predetermined surface, the predetermined surface being substantially parallel to the first and second P-N junctions; a plurality of third P-N junctions, each junction being formed by the contiguous surfaces of the material of opposite type conductivity of each fourth region and the third region; a first electrical contact affixed to and in ohmic electrical contact with, a selected surface area of the first region; a second electrical contact affixed to, and in ohmic electrical contact with, a selected portion of the surface area of predetermined surface of the third region and the surface areas of the plurality of fourth regions, and a third electrical contact affixed to, and in ohmic electrical contact with, a portion of the remainder of the surface area of the predetermined surface of the third region.
Claim 27
Dependent Claim 532 words
A semiconductor device comprising a body of semiconductor material having a predetermined first type conductivity, a predetermined level of resistivity, two major opposed surfaces being, respectively, the top and bottom surfaces thereof and a lamellar structure of at least three planar regions formed in situ in the body; the body having an axis substantially perpendicular to at least top surface of the body and substantially parallel with a first preferred crystal axis of the material of the body; at least one of the opposed major surfaces having a preferred crystal planar orientation which is one selected from the group consisting of (111), (110) and (100); each of the three planar regions having a preferred crystal axis which is substantially parallel with the at least one surface having the preferred crystal planar orientation and perpendicular to the first preferred crystal axis; the material of each of at least first and third planar regions consisting of recrystallized semiconductor material of the body which is formed in situ by the migration of a melt of a metal-rich semiconductor material of body by thermal gradient zone melting at a predetermined elevated temperature along a thermal gradient substantially parallel with the first preferred crystal axis and the axis of the body and having a predetermined level of concentration of the metal of the melt as determined by the solid solubility limit of that metal in that semiconductor material at that predetermined elevated temperature of migration and the metal, which includes at least one dopant material for the material of the body, is distributed substantially uniformly throughout the entire region; a surface area of the first region being coextensive with the bottom surface of the body; a surface area of the third region being coextensive with the top surface of the body; the material of the second region comprising the material of the body; a first P-N junction formed by the abutting surfaces of the first and second regions of opposite type conductivity; a second P-N junction formed by the abutting surfaces of the second and third regions of opposite type conductivity; a plurality of spaced fourth regions of first type conductivity formed in a predetermined portion of the third region, each fourth region having a surface area coextensive with a predetermined surface of the body and the surface area of the third region and each fourth region extends a predetermined distance into the third region from that predetermined surface, the predetermined surface being substantially parallel to the first and second P-N junctions; a plurality of third P-N junctions, each junction being formed by the contiguous surfaces of the material of opposite type conductivity of each fourth region and the third region; a first electrical contact affixed to and in ohmic electrical contact with, a selected surface area of the first region; a second electrical contact affixed to, and in ohmic electrical contact with, a selected portion of the surface area of predetermined surface of the third region and the surface areas of the plurality of fourth regions, and a third electrical contact affixed to, and in ohmic electrical contact with, a portion of the remainder of the surface area of the predetermined surface of the third region.
Claim 28
Dependent Claim 140 words
The semiconductor device of claim 24 wherein the lamellar structure includes at least two groups of three alternate regions of opposite type conductivity, one group having a first region having the surface area comprising the bottom surface of the body and the second group having a third region having a surface area comprising the top surface of the body; and including a fifth region of first type conductivity and a selected dopant impurity concentration disposed between and in abutting contact with the third region of one group and the first region of the next adjacent group; a fourth P-N junction formed by the contiguous surfaces of the third region of the one group and the fifth region, and a fifth P-N junction formed by the contiguous surfaces of the fifth region and the first region of the next adjacent group.
Claim 29
Dependent Claim 126 words
The semiconductor device of claim 25 wherein the material of each fifth region consists of recrystallized semiconductor material of the body which is formed in situ by the migration of a melt of a metal-rich semiconductor material of the body by thermal gradient zone melting at a predetermined elevated temperature along a thermal gradient substantially parallel with the first preferred crystal axis and the axis of the body and having a predetermined level of the metal of the melt as determined by the solid solubility limit of that metal in that semiconductor material at that predetermined elevated temperature of migration and the metal includes at least one dopant material for the material of the body which has a substantially uniform level of concentration throughout the region.

References Cited (Backward Citations)

US2813048A Cited
US3727116A Cited
US3737741A Cited

USPTO Annuity & Maintenance Windows

Annuity Stage Window Opens Payment Deadline Surcharge Period Until Estimated Fee Status
3.5 Years (Year 4) 1979-10-26 1980-04-26 1980-10-26 $2000.00 Window Closed / Lapsed
7.5 Years (Year 8) 1983-10-26 1984-04-26 1984-10-26 $3760.00 Window Closed / Lapsed
11.5 Years (Year 12) 1987-10-26 1988-04-26 1988-10-26 $7700.00 Window Closed / Lapsed

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