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US3985919A Expired / Lapsed US ⏱️ 0.0 years remaining

Vapor deposition of cermet layers

Assignee: RCA Corp
•
Filing: 1975-04-30
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Granted: 1976-10-12
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Expires: 1995-04-30
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Abstract

Abstract A metal oxide vapor, such as tungsten oxide, is reacted with a ceramic material, such as aluminum oxide, at a temperature in the range of from about 1300 DEG C to about 1400 DEG C. The metal oxide vapors diffuse into the ceramic material during the reaction. The ceramic material, which now includes tungsten oxide diffused therein, is then subjected to a reducing atmosphere so as to form a cermet region in the ceramic material.

Inventors

  • 👤 Harry Louis Pinch
  • 👤 Stephen Thomas Opresko

Bibliographic Details

Application Number —
Jurisdiction US
Data Source google_patents
Last Synchronized 2026-11-05 21:53
CPC Classifications
C; C04; C04B; C04B41/00; C04B41/009; C04B41/45; C04B41/50; C04B41/5025; C04B41/80; C04B41/81; C04B41/85; C04B41/87; H; H01; H01C; H01C17/00; H01C17/06; H01C17/075; H01C17/08

Claims Analysis

Total Claims: 13
Claim 1
Independent Claim 103 words
A method of forming a cermet region in a refractory insulating substrate comprising the steps of: reacting a metal oxide vapor with said substrate at a sufficient temperature and for a sufficient time such that said metal oxide vapor diffuses into said substrate, said metal oxide being selected from the group consisting of tungsten oxide and molybdenum oxide, and then subjecting said reacted substrate to a reducing atmosphere at a temperature between about 600° C to about 1200° C for a sufficient time so as to reduce at least some of said metal oxide which diffused into said substrate without reducing said substrate.
Claim 2
Independent Claim 103 words
A method of forming a cermet region in a refractory insulating substrate comprising the steps of: reacting a metal oxide vapor with said substrate at a sufficient temperature and for a sufficient time such that said metal oxide vapor diffuses into said substrate, said metal oxide being selected from the group consisting of tungsten oxide and molybdenum oxide, and then subjecting said reacted substrate to a reducing atmosphere at a temperature between about 600° C to about 1200° C for a sufficient time so as to reduce at least some of said metal oxide which diffused into said substrate without reducing said substrate.
Claim 3
Dependent Claim 29 words
A method in accordance with claim 1 in which said metal oxide vapor is reacted with said substrate at temperatures of from about 1300° C to about 1400° C.
Claim 4
Dependent Claim 25 words
A method in accordance with claim 2 in which said metal oxide vapor is reacted with said substrate at a temperature of about 1380° C.
Claim 5
Dependent Claim 22 words
A method in accordance with claim 2 in which said reacted substrate is exposed to a reducing atmosphere which includes hydrogen gas.
Claim 6
Dependent Claim 34 words
A method in accordance with claim 4 in which said substrate is rotated while being reacted with said metal oxide vapor such that said substrate is substantially uniformly exposed to said metal oxide vapor.
Claim 7
Dependent Claim 15 words
A method in accordance with claim 2 in which said metal oxide comprises tungsten oxide.
Claim 8
Dependent Claim 15 words
A method in accordance with claim 2 in which said metal oxide comprises molybdenum oxide.
Claim 9
Dependent Claim 15 words
A method in accordance with claim 2 in which said substrate comprises a ceramic material.
Claim 10
Dependent Claim 15 words
A method in accordance with claim 2 in which said ceramic material comprises aluminum oxide.
Claim 11
Dependent Claim 22 words
A method in accordance with claim 1 which includes reacting said metal oxide vapor with said substrate for at least 2 minutes.
Claim 12
Dependent Claim 28 words
A method in accordance with claim 1 which includes terminating the reaction of said metal oxide vapor with said substrate before said metal oxide deposits on said substrate.
Claim 13
Dependent Claim 21 words
A method in accordance with claim 1 which includes subjecting said reacted substrate to said reducing atmosphere for about 8 hours.

References Cited (Backward Citations)

GB650173A Cited
US3051592A Cited
US3215555A Cited
US3189476A Cited
US3514324A Cited
US3537888A Cited

USPTO Annuity & Maintenance Windows

Annuity Stage Window Opens Payment Deadline Surcharge Period Until Estimated Fee Status
3.5 Years (Year 4) 1979-10-12 1980-04-12 1980-10-12 $2000.00 Window Closed / Lapsed
7.5 Years (Year 8) 1983-10-12 1984-04-12 1984-10-12 $3760.00 Window Closed / Lapsed
11.5 Years (Year 12) 1987-10-12 1988-04-12 1988-10-12 $7700.00 Window Closed / Lapsed

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