Patent US3980870A successfully refreshed from Google Patents.
US3980870A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Device for measuring contour length of a two-dimensional pattern
Assignee: Nikon Corp
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Filing: 1975-05-08
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Granted: 1976-09-14
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Expires: 1995-05-08
Abstract
Abstract A device for measuring the contour length of a two-dimensional pattern comprises means for scanning the pattern and sampling each scanned line at a predetermined length to convert the pattern into digitally coded patterns. A rotary means rotates the two-dimensional pattern relative to the converting means to attain uniform spatial distribution of the two-dimensional pattern. A discriminating means discriminates that the digital coded patterns corresponding to the contour line segments placed between the neighboring scanning lines correspond to the number of times the length of the sample to classify the segments into a number of groups according to the result of the discrimination. A computer multiplies the outputs from the classifying means by predetermined weighting coefficients, respectively, at each rotated position of said two-dimensional pattern to obtain the average of the contour length of the two-dimensional pattern at every rotated position.
Inventors
- 👤 Atsushi Kawahara
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-01 18:28
CPC Classifications
G; G01; G01B; G01B11/00; G01B11/02; G01B11/022; G01B11/24
Claims Analysis
Total Claims: 5
Claim 1
Independent Claim
322 words
A device for measuring the contour length of a two-dimensional pattern comprising: a. means (2,3,4) for scanning the pattern and sampling each scanned line at a predetermined length to produce an output including pulses, thereby converting the pattern into digitally coded patterns; b. rotary means (1,35) for intermittently rotating the pattern relative to said scanning means to enable said scanning means to scan and sample the pattern at each position of rotation, thereby attaining the uniform spatial distribution of the pattern; c. means (5,6,7,8) for detecting coincidence of the pulse edge of the output from said scanning means when said scanning means samples one scanned line and the pulse edge of the output from said scanning means when it samples the scanned line adjacent to said one scanned line, to produce an output when said detecting means detects said coincidence; d. means (5,9) for comparing the output from said scanning means when it samples said one scanned line with the output from said scanning means when it samples said adjacent scanned line, and for measuring the difference between said two outputs of said scanning means to produce an output involving digital information (N 1 , N 2 . . . ) into which the contour line segment of said pattern interposed between said two adjacent scanned lines is quantized; e. means for discriminating that said digital information corresponds to a number of times (N 1 , N 2 . . . ) as large as said predetermined length; f. first means for multiplying the output of said detecting means by a predetermined weighting coefficient (L O ); g. second means for multiplying the information of said comparing means by predetermined weighting coefficients according to the number of times (or the result of discrimination); and h. means for averaging the outputs of said first and second means to obtain the average of the contour length of the pattern at each position of rotation.
Claim 2
Independent Claim
322 words
A device for measuring the contour length of a two-dimensional pattern comprising: a. means (2,3,4) for scanning the pattern and sampling each scanned line at a predetermined length to produce an output including pulses, thereby converting the pattern into digitally coded patterns; b. rotary means (1,35) for intermittently rotating the pattern relative to said scanning means to enable said scanning means to scan and sample the pattern at each position of rotation, thereby attaining the uniform spatial distribution of the pattern; c. means (5,6,7,8) for detecting coincidence of the pulse edge of the output from said scanning means when said scanning means samples one scanned line and the pulse edge of the output from said scanning means when it samples the scanned line adjacent to said one scanned line, to produce an output when said detecting means detects said coincidence; d. means (5,9) for comparing the output from said scanning means when it samples said one scanned line with the output from said scanning means when it samples said adjacent scanned line, and for measuring the difference between said two outputs of said scanning means to produce an output involving digital information (N 1 , N 2 . . . ) into which the contour line segment of said pattern interposed between said two adjacent scanned lines is quantized; e. means for discriminating that said digital information corresponds to a number of times (N 1 , N 2 . . . ) as large as said predetermined length; f. first means for multiplying the output of said detecting means by a predetermined weighting coefficient (L O ); g. second means for multiplying the information of said comparing means by predetermined weighting coefficients according to the number of times (or the result of discrimination); and h. means for averaging the outputs of said first and second means to obtain the average of the contour length of the pattern at each position of rotation.
Claim 3
Dependent Claim
31 words
A device according to claim 1, wherein said scanning means repeats, in turn, linear scanning along a straight line traversing said pattern, the distance between said adjacent linear scans being constant.
Claim 4
Dependent Claim
85 words
A device according to claim 2, further comprising: a one-line memory of which an input terminal is connected to said scanning means and of which an output terminal is connected to said detecting means and to said comparing means, said one-line memory memorizing the output of said scanning means, which is produced when said scanning means samples one scanned line, until completion of sampling said one scanned line, said scanning means comparing the output of said one-line memory with the output of said scanning means.
Claim 5
Dependent Claim
77 words
A device according to claim 1, further comprising: means (17-25) for classifying the output of said comparing means according to the number of times; a plurality of counters (29-31) of which input terminals are connected to said classifying means and of which output terminals are connected to said second means for counting each of the classified outputs, the outputs of said counters being multiplied in said second means by said weighting coefficients corresponding to said counter, respectively.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1979-09-14 | 1980-03-15 | 1980-09-14 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1983-09-14 | 1984-03-15 | 1984-09-14 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1987-09-14 | 1988-03-15 | 1988-09-14 | $7700.00 | Window Closed / Lapsed |