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US3962670A
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Heatable hollow semiconductor
Assignee: Siemens AG
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Filing: 1974-12-09
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Granted: 1976-06-08
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Expires: 1994-12-09
Abstract
Abstract Hollow semiconductor bodies having an outer surface composed of a doped semiconductor material and an inner surface composed of a pure semiconductor material are formed by sequential deposition from a gaseous thermally decomposable semiconductor compound onto a heated carrier member. The multi-layer hollow semiconductor bodies are directly heatable during diffusion of dopants into semiconductor elements.
Inventors
- 👤 Wolfgang Dietze
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-07 10:55
CPC Classifications
C; C23; C23C; C23C16/00; C23C16/01; C23C16/22; C30; C30B; C30B31/00; C30B31/06; C30B31/10; Y; Y10; Y10S; Y10S118/00; Y10S118/90; Y10S148/00; Y10S148/073; Y10S148/122; Y10T; Y10T428/00; Y10T428/13; Y10T428/29; Y10T428/2913; Y10T428/2973; Y10T428/2975
Claims Analysis
Total Claims: 2
Claim 1
Independent Claim
41 words
A diffusion container for doping semiconductor elements with a dopant comprising: a gas-impermeable housing having an inner surface composed of pure silicon and an outer surface composed of a doped silicon having a specific electrical resistance of about 10 milliohm centimeters.
Claim 2
Dependent Claim
41 words
A diffusion container for doping semiconductor elements with a dopant comprising: a gas-impermeable housing having an inner surface composed of pure silicon and an outer surface composed of a doped silicon having a specific electrical resistance of about 10 milliohm centimeters.
References Cited (Backward Citations)
US3776809A
Cited
US3823685A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1979-06-08 | 1979-12-08 | 1980-06-08 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1983-06-08 | 1983-12-08 | 1984-06-08 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1987-06-08 | 1987-12-08 | 1988-06-08 | $7700.00 | Window Closed / Lapsed |