US3961989A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Method of making impatt diode and resulting diode
Assignee: Post Office
•
Filing: 1975-02-04
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Granted: 1976-06-08
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Expires: 1995-02-04
Abstract
Abstract An IMPATT diode is manufactured by doping a silicon n-type epitaxial layer and bombarding the doped layer with ions, preferably protons.
Inventors
- 👤 Christopher John Heslop
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-29 19:09
CPC Classifications
H; H10; H10P; H10P34/00; H10P34/40; H10D; H10D99/00; H10P95/00
Claims Analysis
Total Claims: 7
Claim 1
Independent Claim
45 words
A method of making an IMPATT diode comprising the steps of: a. doping an n-type epitaxial layer of silicon grown on an n + -type silicon substance with boron; and then b. bombarding said layer with ions while maintaining its temperature between 590°C and 610°C.
Claim 2
Independent Claim
45 words
A method of making an IMPATT diode comprising the steps of: a. doping an n-type epitaxial layer of silicon grown on an n + -type silicon substance with boron; and then b. bombarding said layer with ions while maintaining its temperature between 590°C and 610°C.
Claim 3
Dependent Claim
12 words
A method as claimed in claim 1 wherein said ions are protons.
Claim 4
Dependent Claim
22 words
A method as claimed in claim 2 wherein said protons penetrate said epitaxial layer to a depth of 0.1 - 0.15 microns.
Claim 5
Dependent Claim
33 words
A method as claimed in claim 2 wherein said epitaxial layer receives a total proton dose of 40-65 micro coulombs cm - 2 at a beam current of 0.09 - 0.11 micro amps.
Claim 6
Dependent Claim
19 words
A method as claimed in claim 1 wherein boron is implanted into said n-type epitaxial layer by ion implantation.
Claim 7
Dependent Claim
11 words
An IMPATT diode made by the method claimed in claim 1.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1979-06-08 | 1979-12-08 | 1980-06-08 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1983-06-08 | 1983-12-08 | 1984-06-08 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1987-06-08 | 1987-12-08 | 1988-06-08 | $7700.00 | Window Closed / Lapsed |