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US3961969A
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Glass-ceramics for semiconductor doping
Assignee: OI Glass Inc
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Filing: 1974-12-23
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Granted: 1976-06-08
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Expires: 1994-12-23
Abstract
Abstract Disclosed is a method for diffusion doping of silicon and germanium semiconductors by the vapor phase transport of B 2 O 3 from a solid B 2 O 3 source to the semiconductor, wherein the solid B 2 O 3 source comprises a rigid, dimensionally stable, glass-ceramic body formed from certain alkaline earth aluminoborosilicate parent glass compositions. The glass-ceramic bodies contain up to 60 mole % of B 2 O 3 and are dimensionally stable at doping temperatures of 1050°C and higher.
Inventors
- 👤 James E. Rapp
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-04 23:25
CPC Classifications
H; H10; H10P; H10P32/00; H10P32/10; H10P32/19; C; C03; C03C; C03C10/00; C03C10/0036; C03C3/00; C03C3/04; C03C3/062; C03C3/064; C30; C30B; C30B31/00; C30B31/06; C30B31/16; C30B31/165; Y; Y10; Y10S; Y10S252/00; Y10S252/95; Y10S252/951
Claims Analysis
Total Claims: 5
Claim 1
Independent Claim
88 words
A glass-ceramic dopant for vapor phase transport of B 2 O 3 , said dopant host being rigid and dimensionally stable during doping at elevated temperatures in excess of 1050°C prepared by the thermal in-situ crystallization of a thermally crystallizable substantially alkali metal oxide free glass composition consisting essentially of: Component
Mole %
______________________________________
SiO.sub.2
15-40
Al.sub.2 O.sub.3
15-30
B.sub.2 O.sub.3
20-60
RO 5-25
______________________________________ wherein ##EQU3## Wherein RO is: MgO 0-15
CaO 0-10
SrO 0-10
BaO 0-15
La.sub.2 O.sub. 3
0-5
Nb.sub.2 O.sub.5
0-5
Ta.sub.2 O.sub.5
0-5
Claim 2
Dependent Claim
88 words
A glass-ceramic dopant for vapor phase transport of B 2 O 3 , said dopant host being rigid and dimensionally stable during doping at elevated temperatures in excess of 1050°C prepared by the thermal in-situ crystallization of a thermally crystallizable substantially alkali metal oxide free glass composition consisting essentially of: Component
Mole %
______________________________________
SiO.sub.2
15-40
Al.sub.2 O.sub.3
15-30
B.sub.2 O.sub.3
20-60
RO 5-25
______________________________________ wherein ##EQU3## Wherein RO is: MgO 0-15
CaO 0-10
SrO 0-10
BaO 0-15
La.sub.2 O.sub. 3
0-5
Nb.sub.2 O.sub.5
0-5
Ta.sub.2 O.sub.5
0-5
Claim 3
Dependent Claim
13 words
The glass-ceramic dopant host of claim 1 which contains 0-10 mole % BaO.
Claim 4
Dependent Claim
39 words
The glass-ceramic dopant host of claim 1 which consists essentially of: Component
Mole %
______________________________________
SiO.sub.2
18-40
Al.sub.2 O.sub.3
15-30
B.sub.2 O.sub.3
30-60
RO 5-15
______________________________________ Wherein ##EQU4## Wherein the MgO component of RO is at least about 3%.
Claim 5
Dependent Claim
16 words
The glass-ceramic dopant host of claim 1 which is in the form of a thin wafer.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1979-06-08 | 1979-12-08 | 1980-06-08 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1983-06-08 | 1983-12-08 | 1984-06-08 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1987-06-08 | 1987-12-08 | 1988-06-08 | $7700.00 | Window Closed / Lapsed |