US3958071A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Electrical resistor and method of producing same
Assignee: Siemens AG
•
Filing: 1973-02-26
•
Granted: 1976-05-18
•
Expires: 1993-02-26
Abstract
Abstract A resistor comprising a layer of material disposed on a substrate which layer contains a metal component which can be either a pure metal or a metal alloy and which has carbon inserted therein to vary the specific resistance and the temperature coefficient of the electrical resistance. The method of producing the resistor comprises providing a metal-organic compound such as nickel acetylacetonate which is evaporated and carried by a carrier gas, such as hydrogen or ammonia, to a heated substrate. When the vaporized metal-organic compound contacts the heated substrate it decomposes to provide a layer having a metal component with carbon inserted in the component. By controlling the temperature of the heated substrate and by controlling the pressure of the carrier gas, the volume percent of carbon inserted into the metal component when forming the layer can be controlled to vary both the specific resistance of the layer and the temperature coefficient of the electrical resistance.
Inventors
- 👤 Konrad Hieber
- 👤 Alfred Politycki
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-28 18:48
CPC Classifications
H; H01; H01C; H01C17/00; H01C17/06; H01C17/075; H01C17/14; Y; Y10; Y10T; Y10T428/00; Y10T428/31504; Y10T428/31678
Claims Analysis
Total Claims: 9
Claim 1
Independent Claim
222 words
A method for producing electrical resistor comprising a layer disposed on a substrate, said layer having a metal component selected from a metal and metal alloy and a carbon component wherein the temperature coefficient of the resistivity and the specific resistivity of the layer are influenced by the amount of carbon introduced into the layer, said method comprising the steps of providing at least one metal-organic compound selected from a group consisting of a metal acetylacetonate and mixtures of metal acetylacetonates and a substrate in a vacuum chamber; heating the metal-organic compound to evaporate a gas phase of the compound; providing a carrier gas selected from a group consisting of hydrogen, ammonia and a mixture of hydrogen and nitrogen under pressure, introducing the carrier gas into the chamber for transporting the gas phase of the metal organic compound to the substrate upon which the layer is to be deposited; and heating the substrate to a temperature in a range of 250° to 600°C to cause a thermic decomposition of the gas phase of the metal-organic compound to deposit a layer consisting of the metal component and the carbon, whereby said pressure of the carrier gas is such that both carbon and the metal component are deposited and the amount of carbon present in the layer depends upon the temperature of the substrate.
Claim 2
Independent Claim
222 words
A method for producing electrical resistor comprising a layer disposed on a substrate, said layer having a metal component selected from a metal and metal alloy and a carbon component wherein the temperature coefficient of the resistivity and the specific resistivity of the layer are influenced by the amount of carbon introduced into the layer, said method comprising the steps of providing at least one metal-organic compound selected from a group consisting of a metal acetylacetonate and mixtures of metal acetylacetonates and a substrate in a vacuum chamber; heating the metal-organic compound to evaporate a gas phase of the compound; providing a carrier gas selected from a group consisting of hydrogen, ammonia and a mixture of hydrogen and nitrogen under pressure, introducing the carrier gas into the chamber for transporting the gas phase of the metal organic compound to the substrate upon which the layer is to be deposited; and heating the substrate to a temperature in a range of 250° to 600°C to cause a thermic decomposition of the gas phase of the metal-organic compound to deposit a layer consisting of the metal component and the carbon, whereby said pressure of the carrier gas is such that both carbon and the metal component are deposited and the amount of carbon present in the layer depends upon the temperature of the substrate.
Claim 3
Dependent Claim
53 words
A method according to claim 1, wherein the metal-organic compound is nickel acetylacetonate and the carrier gas is hydrogen, wherein the heating of the substrate provides a substrate with a temperature in the range of 250° to 480°C, and wherein the pressure of the carrier gas is in the amount of 720 Torr.
Claim 4
Dependent Claim
50 words
A method according to claim 1, wherein the metal-organic compound is nickel acetylacetonate and the carrier gas is ammonia gas, wherein the heating of the substrate provides a substrate with a temperature in the range of 350° to 600°C, and wherein the pressure of the carrier gas is 50 Torr.
Claim 5
Dependent Claim
19 words
A method according to claim 1, wherein the metalorganic compounds is a mixture of nickel acetylacetonate and chromium acetylacetonate.
Claim 6
Dependent Claim
19 words
A method according to claim 1, wherein the organic compounds comprise a mixture of nickel acetylacetonate and copper acetylacetonate.
Claim 7
Dependent Claim
19 words
A method according to claim 1, wherein the organic compounds is a mixture of nickel acetylacetonate and cobalt acetylacetonate.
Claim 8
Dependent Claim
28 words
An electrical resistor produced by the method of claim 1, wherein the temperature coefficient of resistivity of the layer is in the range of +100 through -500 ppm/degree.
Claim 9
Dependent Claim
30 words
An electrical resistor produced by the method of claim 1, wherein the specific resistivity is within a range of 100 μ ω cm up to 10 5 μ ω cm.
References Cited (Backward Citations)
US2183302A
Cited
US2803729A
Cited
US2815302A
Cited
US2785997A
Cited
US3050417A
Cited
US2933415A
Cited
US2901381A
Cited
US2921871A
Cited
US3092510A
Cited
US3107179A
Cited
US3109754A
Cited
US3188230A
Cited
US3669724A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1979-05-18 | 1979-11-17 | 1980-05-18 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1983-05-18 | 1983-11-17 | 1984-05-18 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1987-05-18 | 1987-11-17 | 1988-05-18 | $7700.00 | Window Closed / Lapsed |