Patent US3953128A successfully refreshed from Google Patents.
US3953128A
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US
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Process and apparatus for filament or slit size monitoring
Assignee: Atlantic Research Corp
•
Filing: 1975-01-06
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Granted: 1976-04-27
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Expires: 1995-01-06
Abstract
Abstract Method and apparatus for determining the width of an elongated element, such as a filament or slit which comprise producing a moving interference fringe zone by converging two beams of coherent light of the same intensity but slightly different frequency; positioning the element within the fringe zone in such manner that the longitudinal axis of the element is substantially normal to the plane of the convergent beams, namely, parallel to the plane of the fringes; maintaining the element substantially spatially stationary relative to the zone, whereby the moving fringe pattern continuously sweeps across the element; and determining the ratio of the AC to DC signal components of the radiation scattered or transmitted by the element. The method and system include respectively the step and means therefor of adjusting or scanning the fringe period value around the element to determine the size capable of producing a minimum AC/DC ratio. In the case of a system substantially free from noise, including non-compensating optical noise factors introduced by the element being measured, a zero ratio indicates that the filament diameter or slit width equals the known fringe period, and a non-zero ratio indicates diameter or slit width deviation from the fringe period, the degree of which can be determined from the signal ratio with the use of known means by adjusting the fringe period until the AC component of the signal becomes zero. In the case of a system having a substantial amount of noise, the AC/DC minimum ratio obtained at a given fringe period may have a finite value and indicates an element width equal to the given fringe period times a constant, the constant being the ratio of the width of the given element and the given fringe period. The element, though spatially stationary in the fringe zone, can be continuously moving longitudinally. The process and system are particularly useful for monitoring the width of manufactured elements and, by automatic feedback, correcting deviations. In some applications where change in the magnitude of the DC signal component during the fringe period scan is sufficiently nominal with respect to permissible width-sensing error, the AC/DC ratio measurement can be dispensed with and determination of the AC signal component minimum alone can be employed.
Inventors
- 👤 Sandor Holly
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-27 08:15
CPC Classifications
G; G01; G01B; G01B11/00; G01B11/02; G01B11/04; G01B11/046; G01B11/14
Claims Analysis
Total Claims: 170
Claim 1
Independent Claim
230 words
A process for sensing without contact the width of an elongated element comprising: 1. producing a pair of coherent electromagnetic radiation beams of substantially the same size and intensity, one of said beams having a different frequency from said other beam, the frequency difference being within the radio frequency range; 2. converging said beams to form a laterally-moving fringe pattern having a first fringe period within the zone of convergence; 3. positioning said element within the interference zone, the longitudinal axis of said element being substantially normal to the plane of the convergent beams, said element being substantially spatially stationary relative to said zone, whereby the moving fringe pattern continuously sweeps across said element transversely; and 4. determining the ratio of the AC to DC components of the resulting radiation as the fringe pattern sweeps across the element; 5. said process including the step of adjusting the value of the fringe period of said pattern relative to the element width to a fringe period having a size capable of producing a minimum AC/DC ratio, wherein said AC/DC minimum ratio obtained at said fringe period size indicates an element width equal to said fringe period times a constant, or a whole integer multiple of said fringe period plus the fringe period times a constant, said constant being equal to the ratio of the width of said element and said fringe period.
Claim 2
Dependent Claim
230 words
A process for sensing without contact the width of an elongated element comprising: 1. producing a pair of coherent electromagnetic radiation beams of substantially the same size and intensity, one of said beams having a different frequency from said other beam, the frequency difference being within the radio frequency range; 2. converging said beams to form a laterally-moving fringe pattern having a first fringe period within the zone of convergence; 3. positioning said element within the interference zone, the longitudinal axis of said element being substantially normal to the plane of the convergent beams, said element being substantially spatially stationary relative to said zone, whereby the moving fringe pattern continuously sweeps across said element transversely; and 4. determining the ratio of the AC to DC components of the resulting radiation as the fringe pattern sweeps across the element; 5. said process including the step of adjusting the value of the fringe period of said pattern relative to the element width to a fringe period having a size capable of producing a minimum AC/DC ratio, wherein said AC/DC minimum ratio obtained at said fringe period size indicates an element width equal to said fringe period times a constant, or a whole integer multiple of said fringe period plus the fringe period times a constant, said constant being equal to the ratio of the width of said element and said fringe period.
Claim 3
Dependent Claim
29 words
The process of claim 1 wherein said fringe period having a size capable of producing a minimum AC/DC ratio is a single fringe period and said integer equals zero.
Claim 4
Dependent Claim
61 words
The process of claim 2 wherein said first fringe period is initially adjusted with respect to an element of given width so that the AC/DC minimum at said first fringe period indicates a first different element having said given width and a substantial shift of the AC/DC minimum from said first fringe period indicates a second different element of deviating width.
Claim 5
Dependent Claim
13 words
The process of claim 2 wherein the element being measured is a filament.
Claim 6
Dependent Claim
12 words
The process of claim 3 wherein the elements being measured are filaments.
Claim 7
Dependent Claim
13 words
The process of claim 2 wherein the element being measured is a slit.
Claim 8
Dependent Claim
12 words
The process of claim 3 wherein the elements being measured are slits.
Claim 9
Dependent Claim
15 words
The process of claim 4 wherein the element is continuously moved along its longitudinal axis.
Claim 10
Dependent Claim
16 words
The process of claim 5 wherein the different elements are continuously moved along their longitudinal axes.
Claim 11
Dependent Claim
15 words
The process of claim 6 wherein the element is continuously moved along its longitudinal axis.
Claim 12
Dependent Claim
16 words
The process of claim 7 wherein the different elements are continuously moved along their longitudinal axes.
Claim 13
Dependent Claim
25 words
The process of claim 5 wherein the signal produced by said shift is transmitted to size adjustment controls in a process for manufacturing the element.
Claim 14
Dependent Claim
25 words
The process of claim 7 wherein the signal produced by said shift is transmitted to size adjustment controls in a process for manufacturing the element.
Claim 15
Dependent Claim
25 words
The process of claim 9 wherein the signal produced by said shift is transmitted to size adjustment controls in a process for manufacturing the element.
Claim 16
Dependent Claim
25 words
The process of claim 11 wherein the signal produced by said shift is transmitted to size adjustment controls in a process for manufacturing the element.
Claim 17
Dependent Claim
61 words
The process of claim 5 wherein the size of said first fringe period is readjusted to that of a second fringe period which produces a second minimum AC/DC ratio with said second different element of deviating width, whereby the magnitude of width deviation of the element can be determined by the difference in size of said first and second fringe periods.
Claim 18
Dependent Claim
61 words
The process of claim 7 wherein the size of said first fringe period is readjusted to that of a second fringe period which produces a second minimum AC/DC ratio with said second different element of deviating width, whereby the magnitude of width deviation of the element can be determined by the difference in size of said first and second fringe periods.
Claim 19
Dependent Claim
61 words
The process of claim 9 wherein the size of said first fringe period is readjusted to that of a second fringe period which produces a second minimum AC/DC ratio with said second different element of deviating width, whereby the magnitude of width deviation of the element can be determined by the difference in size of said first and second fringe periods.
Claim 20
Dependent Claim
61 words
The process of claim 11 wherein the size of said first fringe period is readjusted to that of a second fringe period which produces a second minimum AC/DC ratio with said second different element of deviating width, whereby the magnitude of width deviation of the element can be determined by the difference in size of said first and second fringe periods.
Claim 21
Dependent Claim
32 words
The process of claim 16 wherein the determined magnitude of element width deviation is formed into a signal which is transmitted to size adjustment controls in a process for manufacturing the element.
Claim 22
Dependent Claim
32 words
The process of claim 17 wherein the determined magnitude of element width deviation is formed into a signal which is transmitted to size adjustment controls in a process for manufacturing the element.
Claim 23
Dependent Claim
32 words
The process of claim 18 wherein the determined magnitude of element width deviation is formed into a signal which is transmitted to size adjustment controls in a process for manufacturing the element.
Claim 24
Dependent Claim
32 words
The process of claim 19 wherein the determined magnitude of element width deviation is formed into a signal which is transmitted to size adjustment controls in a process for manufacturing the element.
Claim 25
Dependent Claim
24 words
The process of claim 1 wherein said AC/DC minimum ratio is substantially zero and the element width equals the fringe period at said minimum.
Claim 26
Dependent Claim
24 words
The process of claim 2 wherein said AC/DC minimum ratio is substantially zero and the element width equals the fringe period at said minimum.
Claim 27
Dependent Claim
29 words
The process of claim 3 wherein said AC/DC minimum at said first fringe period equals zero and the first different element width equals the fringe period at said minimum.
Claim 28
Dependent Claim
13 words
The process of claim 25 wherein the element being measured is a filament.
Claim 29
Dependent Claim
12 words
The process of claim 26 wherein the elements being measured are filaments.
Claim 30
Dependent Claim
13 words
The process of claim 25 wherein the element being measured is a slit.
Claim 31
Dependent Claim
12 words
The process of claim 26 wherein the elements being measured are slits.
Claim 32
Dependent Claim
15 words
The process of claim 27 wherein the element is continuously moved along its longitudinal axis.
Claim 33
Dependent Claim
16 words
The process of claim 28 wherein the different elements are continuously moved along their longitudinal axes.
Claim 34
Dependent Claim
15 words
The process of claim 29 wherein the element is continuously moved along its longitudinal axis.
Claim 35
Dependent Claim
16 words
The process of claim 30 wherein the different elements are continuously moved along their longitudinal axes.
Claim 36
Dependent Claim
25 words
The process of claim 28 wherein the signal produced by said shift is transmitted to size adjustment controls in a process for manufacturing the element.
Claim 37
Dependent Claim
25 words
The process of claim 30 wherein the signal produced by said shift is transmitted to size adjustment controls in a process for manufacturing the element.
Claim 38
Dependent Claim
25 words
The process of claim 32 wherein the signal produced by said shift is transmitted to size adjustment controls in a process for manufacturing the element.
Claim 39
Dependent Claim
25 words
The process of claim 34 wherein the signal produced by aid shift is transmitted to size adjustment controls in a process for manufacturing the element.
Claim 40
Dependent Claim
60 words
The process of claim 28 wherein the size of said first fringe period is readjusted to that of a second fringe period which produces a second minimum AC/DC ratio with said different element of deviating width, whereby the magnitude of width deviation of the element can be determined by the difference in size of said first and second fringe periods.
Claim 41
Dependent Claim
60 words
The process of claim 30 wherein the size of said first fringe period is readjusted to that of a second fringe period which produces a second minimum AC/DC ratio with said different element of deviating width, whereby the magnitude of width deviation of the element can be determined by the difference in size of said first and second fringe periods.
Claim 42
Dependent Claim
60 words
The process of claim 32 wherein the size of said first fringe period is readjusted to that of a second fringe period which produces a second minimum AC/DC ratio with said different element of deviating width, whereby the magnitude of width deviation of the element can be determined by the difference in size of said first and second fringe periods.
Claim 43
Dependent Claim
60 words
The process of claim 34 wherein the size of said first fringe period is readjusted to that of a second fringe period which produces a second minimum AC/DC ratio with said different element of deviating width, whereby the magnitude of width deviation of the element can be determined by the difference in size of said first and second fringe periods.
Claim 44
Dependent Claim
32 words
The process of claim 39 wherein the determined magnitude of element width deviation is formed into a signal which is transmitted to size adjustment controls in a process for manufacturing the element.
Claim 45
Dependent Claim
32 words
The process of claim 40 wherein the determined magnitude of element width deviation is formed into a signal which is transmitted to size adjustment controls in a process for manufacturing the element.
Claim 46
Dependent Claim
32 words
The process of claim 41 wherein the determined magnitude of element width deviation is formed into a signal which is transmitted to size adjustment controls in a process for manufacturing the element.
Claim 47
Dependent Claim
32 words
The process of claim 42 wherein the determined magnitude of element width deviation is formed into a signal which is transmitted to size adjustment controls in a process for manufacturing the element.
Claim 48
Dependent Claim
278 words
A process for sensing without contact the width of an elongated element, comprising: 1. producing a pair of coherent electromagnetic radiation beams of substantially the same size and intensity, one of said beams having a different frequency from said other beam, the frequency difference being within the radio frequency range; 2. converging said beams to form a laterally-moving fringe pattern having a first fringe period within the zone of convergence; 3. positioning said element within the interference zone, the longitudinal axis of said element being substantially normal to the plane of the convergent beams, said element being substantially spatially stationary relative to said zone, whereby the moving fringe pattern continuously sweeps across said element transversely; and 4. determining the AC signal component of the resulting radiation as the fringe pattern sweeps across the element; 5. said process including the step of adjusting the value of the fringe period of said pattern relative to the element width to a fringe period having a size capable of producing a minimum AC signal, wherein said AC minimum signal obtained at said fringe period size indicates an element width equal to said fringe period times a constant or a whole integer multiple of said fringe period plus the fringe period times a constant, said constant being equal to the ratio of the width of said element and said fringe period; 6. said process being employed when, during said step of adjusting the fringe period size, the magnitude of the DC component of said resulting radiation varies in an amount from substantially zero to an amount which results in an element width-sensing within a predetermined magnitude of width-sensing error for the given element.
Claim 49
Dependent Claim
278 words
A process for sensing without contact the width of an elongated element, comprising: 1. producing a pair of coherent electromagnetic radiation beams of substantially the same size and intensity, one of said beams having a different frequency from said other beam, the frequency difference being within the radio frequency range; 2. converging said beams to form a laterally-moving fringe pattern having a first fringe period within the zone of convergence; 3. positioning said element within the interference zone, the longitudinal axis of said element being substantially normal to the plane of the convergent beams, said element being substantially spatially stationary relative to said zone, whereby the moving fringe pattern continuously sweeps across said element transversely; and 4. determining the AC signal component of the resulting radiation as the fringe pattern sweeps across the element; 5. said process including the step of adjusting the value of the fringe period of said pattern relative to the element width to a fringe period having a size capable of producing a minimum AC signal, wherein said AC minimum signal obtained at said fringe period size indicates an element width equal to said fringe period times a constant or a whole integer multiple of said fringe period plus the fringe period times a constant, said constant being equal to the ratio of the width of said element and said fringe period; 6. said process being employed when, during said step of adjusting the fringe period size, the magnitude of the DC component of said resulting radiation varies in an amount from substantially zero to an amount which results in an element width-sensing within a predetermined magnitude of width-sensing error for the given element.
Claim 50
Dependent Claim
29 words
The process of claim 47 wherein said fringe period having a size capable of producing a minimum AC signal is a single fringe period and said integer equals zero.
Claim 51
Dependent Claim
61 words
The process of claim 48 wherein said first fringe period is initially adjusted with respect to an element of given width so that the AC minimum at said first fringe period indicates a first different element having said given width and a substantial shift of the AC minimum from said first fringe period indicates a second different element of deviating width.
Claim 52
Dependent Claim
13 words
The process of claim 48 wherein the element being measured is a filament.
Claim 53
Dependent Claim
13 words
The process of claim 49 wherein the different elements being measured are filaments.
Claim 54
Dependent Claim
13 words
The process of claim 48 wherein the element being measured is a slit.
Claim 55
Dependent Claim
13 words
The process of claim 49 wherein the different elements being measured are slits.
Claim 56
Dependent Claim
15 words
The process of claim 50 wherein the element is continuously moved along its longitudinal axis.
Claim 57
Dependent Claim
16 words
The process of claim 51 wherein the different elements are continuously moved along their longitudinal axes.
Claim 58
Dependent Claim
15 words
The process of claim 52 wherein the element is continuously moved along its longitudinal axis.
Claim 59
Dependent Claim
16 words
The process of claim 53 wherein the different elements are continuously moved along their longitudinal axes.
Claim 60
Dependent Claim
25 words
The process of claim 51 wherein the signal produced by said shift is transmitted to size adjustment controls in a process for manufacturing the element.
Claim 61
Dependent Claim
25 words
The process of claim 53 wherein the signal produced by said shift is transmitted to size adjustment controls in a process for manufacturing the element.
Claim 62
Dependent Claim
25 words
The process of claim 55 wherein the signal produced by said shift is transmitted to size adjustment controls in a process for manufacturing the element.
Claim 63
Dependent Claim
25 words
The process of claim 57 wherein the signal produced by said shift is transmitted to size adjustment controls in a process for manufacturing the element.
Claim 64
Dependent Claim
58 words
The process of claim 51 wherein the size of said first fringe period is readjusted to that of a second fringe period which produces a second minimum AC signal with said second different element of deviating width, whereby the magnitude of width deviation can be determined by the difference in size of said first and second fringe periods.
Claim 65
Dependent Claim
58 words
The process of claim 53 wherein the size of said first fringe period is readjusted to that of a second fringe period which produces a second minimum AC signal with said second different element of deviating width, whereby the magnitude of width deviation can be determined by the difference in size of said first and second fringe periods.
Claim 66
Dependent Claim
58 words
The process of claim 55 wherein the size of said first fringe period is readjusted to that of a second fringe period which produces a second minimum AC signal with said second different element of deviating width, whereby the magnitude of width deviation can be determined by the difference in size of said first and second fringe periods.
Claim 67
Dependent Claim
58 words
The process of claim 57 wherein the size of said first fringe period is readjusted to that of a second fringe period which produces a second minimum AC signal with said second different element of deviating width, whereby the magnitude of width deviation can be determined by the difference in size of said first and second fringe periods.
Claim 68
Dependent Claim
32 words
The process of claim 62 wherein the determined magnitude of element width deviation is formed into a signal which is transmitted to size adjustment controls in a process for manufacturing the element.
Claim 69
Dependent Claim
32 words
The process of claim 63 wherein the determined magnitude of element width deviation is formed into a signal which is transmitted to size adjustment controls in a process for manufacturing the element.
Claim 70
Dependent Claim
32 words
The process of claim 64 wherein the determined magnitude of element width deviation is formed into a signal which is transmited to size adjustment controls in a process for manufacturing the element.
Claim 71
Dependent Claim
32 words
The process of claim 65 wherein the determined magnitude of element width deviation is formed into a signal which is transmitted to size adjustment controls in a process for manufacturing the element.
Claim 72
Dependent Claim
23 words
The process of claim 47 wherein said AC minimum is substantially zero and the element width equals the fringe period at said minimum.
Claim 73
Dependent Claim
23 words
The process of claim 48 wherein said AC minimum is substantially zero and the element width equals the fringe period at said minimum.
Claim 74
Dependent Claim
29 words
The process of claim 49 wherein said AC minimum at said first fringe period equals zero and the first different element width equals the fringe period at said minimum.
Claim 75
Dependent Claim
13 words
The process of claim 71 wherein the element being measured is a filament.
Claim 76
Dependent Claim
13 words
The process of claim 72 wherein the different elements being measured are filaments.
Claim 77
Dependent Claim
13 words
The process of claim 71 wherein the element being measured is a slit.
Claim 78
Dependent Claim
13 words
The process of claim 72 wherein the different elements being measured are slits.
Claim 79
Dependent Claim
15 words
The process of claim 73 wherein the element is continuously moved along its longitudinal axis.
Claim 80
Dependent Claim
16 words
The process of claim 74 wherein the different elements are continuously moved along their longitudinal axes.
Claim 81
Dependent Claim
15 words
The process of claim 75 wherein the element is continuously moved along its longitudinal axis.
Claim 82
Dependent Claim
16 words
The process of claim 76 wherein the different elements are continuously moved along their longitudinal axes.
Claim 83
Dependent Claim
25 words
The process of claim 74 wherein the signal produced by said shift is transmitted to size adjustment controls in a process for manufacturing the element.
Claim 84
Dependent Claim
25 words
The process of claim 76 wherein the signal produced by said shift is transmitted to size adjustment controls in a process for manufacturing the element.
Claim 85
Dependent Claim
25 words
The process of claim 78 wherein the signal produced by said shift is transmitted to size adjustment controls in a process for manufacturing the element.
Claim 86
Dependent Claim
25 words
The process of claim 80 wherein the signal produced by said shift is transmitted to size adjustment controls in a process for manufacturing the element.
Claim 87
Dependent Claim
112 words
The process of claim 74 wherein the size of said first fringe period is readjusted to that of a second fringe period which produces a second minimum AC signal with said second different element of deviating width, whereby the magnitude of width deviation of the element can be determined by the difference in size of said first and second fringe periods, said process being employed when, during said step of readjusting the fringe period size, the magnitude of the DC component of said resulting radiation varies in an amount from substantially zero to an amount which results in an element width-sensing within a predetermined magnitude of width-sensing error for the given element.
Claim 88
Dependent Claim
112 words
The process of claim 76 wherein the size of said first fringe period is readjusted to that of a second fringe period which produces a second minimum AC signal with said second different element of deviating width, whereby the magnitude of width deviation of the element can be determined by the difference in size of said first and second fringe periods, said process being employed when, during said step of readjusting the fringe period size, the magnitude of the DC component of said resulting radiation varies in an amount from substantially zero to an amount which results in an element width-sensing within a predetermined magnitude of width-sensing error for the given element.
Claim 89
Dependent Claim
112 words
The process of claim 78 wherein the size of said first fringe period is readjusted to that of a second fringe period which produces a second minimum AC signal with said second different element of deviating width, whereby the magnitude of width deviation of the element can be determined by the difference in size of said first and second fringe periods, said process being employed when, during said step of readjusting the fringe period size, the magnitude of the DC component of said resulting radiation varies in an amount from substantially zero to an amount which results in an element width-sensing within a predetermined magnitude of width-sensing error for the given element.
Claim 90
Dependent Claim
112 words
The process of claim 80 wherein the size of said first fringe period is readjusted to that of a second fringe period which produces a second minimum AC signal with said second different element of deviating width, whereby the magnitude of width deviation of the element can be determined by the difference in size of said first and second fringe periods, said process being employed when, during said step of readjusting the fringe period size, the magnitude of the DC component of said resulting radiation varies in an amount from substantially zero to an amount which results in an element width-sensing within a predetermined magnitude of width-sensing error for the given element.
Claim 91
Dependent Claim
32 words
The process of claim 85 wherein the determined magnitude of element width deviation is formed into a signal which is transmitted to size adjustment controls in a process for manufacturing the element.
Claim 92
Dependent Claim
32 words
The process of claim 86 wherein the determined magnitude of element width deviation is formed into a signal which is transmitted to size adjustment controls in a process for manufacturing the element.
Claim 93
Dependent Claim
32 words
The process of claim 87 wherein the determined magnitude of element width deviation is formed into a signal which is transmitted to size adjustment controls in a process for manufacturing the element.
Claim 94
Dependent Claim
32 words
The process of claim 88 wherein the determined magnitude of element width deviation is formed into a signal which is transmitted to size adjustment controls in a process for manufacturing the element.
Claim 95
Dependent Claim
107 words
The process of claim 1 wherein said laterally moving fringe pattern is formed by: 1. producing said pair of coherent electromagnetic radiation beams; 2. first diverging and then converging said pair of beams onto a rotatable optical means which diverges said pair of beams at an angle determined by the angle of rotation of said rotatable optical means; 3. converging said pair of diverging beams formed by said optical means; 4. dividing said converged pair of beams substantially equally into a first beam pair which forms a test channel and a second beam pair; and 5. converging said first beam pair to form said laterally-moving fringe pattern.
Claim 96
Dependent Claim
58 words
The process of claim 2 wherein said laterally moving fringe pattern is formed by: 1. producing said pair of coherent electromagnetic radiation beams; 2. first diverging and then converging said pair of beams onto a rotatable optical means which diverges said pair of beams at an angle determined by the angle of rotation of said rotatable optical means;
Claim 97
Dependent Claim
48 words
converging said pair of diverging beams formed by said optical means; 4. dividing said converged pair of beams substantially equally into a first beam pair which forms a test channel and a second beam pair; and 5. converging said first beam pair to form said laterally-moving fringe pattern.
Claim 98
Dependent Claim
48 words
converging said pair of diverging beams formed by said optical means; 4. dividing said converged pair of beams substantially equally into a first beam pair which forms a test channel and a second beam pair; and 5. converging said first beam pair to form said laterally-moving fringe pattern.
Claim 99
Dependent Claim
107 words
The process of claim 3 wherein said laterally moving fringe pattern is formed by: 1. producing said pair of coherent electromagnetic radiation beams; 2. first diverging and then converging said pair of beams onto a rotatable optical means which diverges said pair of beams at an angle determined by the angle of rotation of said rotatable optical means; 3. converging said pair of diverging beams formed by said optical means; 4. dividing said converged pair of beams substantially equally into a first beam pair which forms a test channel and a second beam pair; and 5. converging said first beam pair to form said laterally-moving fringe pattern.
Claim 100
Dependent Claim
70 words
The process of claim 16 wherein said laterally moving fringe pattern is formed by: 1. producing said pair of coherent electromagnetic radiation beams; 2. first diverging and then converging said pair of beams onto a rotatable optical means which diverges said pair of beams at an angle determined by the angle of rotation of said rotatable optical means; 3. converging said pair of diverging beams formed by said optical means;
Claim 101
Dependent Claim
36 words
dividing said converged pair of beams substantially equally into a first beam pair which forms a test channel and a second beam pair; and 5. converging said first beam pair to form said laterally-moving fringe pattern.
Claim 102
Dependent Claim
36 words
dividing said converged pair of beams substantially equally into a first beam pair which forms a test channel and a second beam pair; and 5. converging said first beam pair to form said laterally-moving fringe pattern.
Claim 103
Dependent Claim
107 words
The process of claim 47 wherein said laterally moving fringe pattern is formed by: 1. producing said pair of coherent electromagnetic radiation beams; 2. first diverging and then converging said pair of beams onto a rotatable optical means which diverges said pair of beams at an angle determined by the angle of rotation of said rotatable optical means; 3. converging said pair of diverging beams formed by said optical means; 4. dividing said converged pair of beams substantially equally into a first beam pair which forms a test channel and a second beam pair; and 5. converging said first beam pair to form said laterally-moving fringe pattern.
Claim 104
Dependent Claim
95 words
The process of claim 48 wherein said laterally moving fringe pattern is formed by: 1. producing said pair of coherent electromagnetic radiation beams; 2. first diverging and then converging said pair of beams onto a rotatable optical means which diverges said pair of beams at an angle determined by the angle of rotation of said rotatable optical means; 3. converging said pair of diverging beams formed by said optical means; 4. dividing said converged pair of beams substantially equally into a first beam pair which forms a test channel and a second beam pair; and
Claim 105
Dependent Claim
11 words
converging said first beam pair to form said laterally-moving fringe pattern.
Claim 106
Dependent Claim
11 words
converging said first beam pair to form said laterally-moving fringe pattern.
Claim 107
Dependent Claim
107 words
The process of claim 49 wherein said laterally moving fringe pattern is formed by: 1. producing said pair of coherent electromagnetic radiation beams; 2. first diverging and then converging said pair of beams onto a rotatable optical means which diverges said pair of beams at an angle determined by the angle of rotation of said rotatable optical means; 3. converging said pair of diverging beams formed by said optical means; 4. dividing said converged pair of beams substantially equally into a first beam pair which forms a test channel and a second beam pair; and 5. converging said first beam pair to form said laterally-moving fringe pattern.
Claim 108
Dependent Claim
107 words
The process of claim 62 wherein said laterally moving fringe pattern is formed by: 1. producing said pair of coherent electromagnetic radiation beams; 2. first diverging and then converging said pair of beams onto a rotatable optical means which diverges said pair of beams at an angle determined by the angle of rotation of said rotatable optical means; 3. converging said pair of diverging beams formed by said optical means; 4. dividing said converged pair of beams substantially equally into a first beam pair which forms a test channel and a second beam pair; and 5. converging said first beam pair to form said laterally-moving fringe pattern.
Claim 109
Dependent Claim
26 words
The process of claim 93 wherein said second beam pair forms a reference channel and is converged to form a second, reference, laterally moving fringe pattern.
Claim 110
Dependent Claim
25 words
The process of claim 94 wherein said second beam pair forms a reference channel and is converged to form a second, reference, laterally-moving fringe pattern.
Claim 111
Dependent Claim
25 words
The process of claim 95 wherein said second beam pair forms a reference channel and is converged to form a second, reference, laterally-moving fringe pattern.
Claim 112
Dependent Claim
25 words
The process of claim 96 wherein said second beam pair forms a reference channel and is converged to form a second, reference, laterally-moving fringe pattern.
Claim 113
Dependent Claim
25 words
The process of claim 97 wherein said second beam pair forms a reference channel and is converged to form a second, reference, laterally-moving fringe pattern.
Claim 114
Dependent Claim
26 words
The process of claim 98 wherein said second beam pair forms a reference channel and is converged to form a second, reference, laterally moving fringe pattern.
Claim 115
Dependent Claim
26 words
The process of claim 99 wherein said second beam pair forms a reference channel and is converged to form a second, reference, laterally moving fringe pattern.
Claim 116
Dependent Claim
26 words
The process of claim 100 wherein said second beam pair forms a reference channel and is converged to form a second, reference, laterally moving fringe pattern.
Claim 117
Independent Claim
175 words
A system for measuring without contact the width of an elongated element which comprises: 1. means for producing a pair of coherent electromagnetic radiation beams of substantially the same size and intensity, one of said beams having a different frequency from said other beam, the frequency difference being within the radio frequency range; 2. means for converging said beams to form a laterally-moving fringe pattern having a first fringe period within the zone of convergence; 3. means for positioning said element within said first fringe period in a direction wherein the longitudinal axis of said element is substantially normal to the plane of the convergent beams, and holding it substantially spatially stationary relative to said zone; 4. means for detecting the radiation from said element and separating the detected radiation into AC and DC signal components; 5. means for determining the AC/DC ratio; and 6. adjustment means for adjusting the fringe period of said fringe pattern relative to the element width to a size capable of producing a minimum AC/DC ratio with a given element.
Claim 118
Independent Claim
175 words
A system for measuring without contact the width of an elongated element which comprises: 1. means for producing a pair of coherent electromagnetic radiation beams of substantially the same size and intensity, one of said beams having a different frequency from said other beam, the frequency difference being within the radio frequency range; 2. means for converging said beams to form a laterally-moving fringe pattern having a first fringe period within the zone of convergence; 3. means for positioning said element within said first fringe period in a direction wherein the longitudinal axis of said element is substantially normal to the plane of the convergent beams, and holding it substantially spatially stationary relative to said zone; 4. means for detecting the radiation from said element and separating the detected radiation into AC and DC signal components; 5. means for determining the AC/DC ratio; and 6. adjustment means for adjusting the fringe period of said fringe pattern relative to the element width to a size capable of producing a minimum AC/DC ratio with a given element.
Claim 119
Dependent Claim
13 words
The system of claim 109 wherein the element being measured is a filament.
Claim 120
Dependent Claim
13 words
The system of claim 109 wherein the element being measured is a slit.
Claim 121
Dependent Claim
16 words
The system of claim 110 which includes means for moving the element along its longitudinal axis.
Claim 122
Dependent Claim
16 words
The system of claim 111 which includes means for moving the element along its longitudinal axis.
Claim 123
Dependent Claim
29 words
The system of claim 110 which includes means for transmitting an AC/DC ratio signal different from said minimum to size adjustment controls in the process for manufacturing the element.
Claim 124
Dependent Claim
29 words
The system of claim 111 which includes means for transmitting an AC/DC ratio signal different from said minimum to size adjustment controls in the process for manufacturing the element.
Claim 125
Dependent Claim
29 words
The system of claim 112 which includes means for transmitting an AC/DC ratio signal different from said minimum to size adjustment controls in the process for manufacturing the element.
Claim 126
Dependent Claim
29 words
The system of claim 113 which includes means for transmitting an AC/DC ratio signal different from said minimum to size adjustment controls in the process for manufacturing the element.
Claim 127
Dependent Claim
37 words
The system of claim 110 which includes adjustment means for adjusting the size of the first fringe period to a second fringe period in amount sufficient to shift an initially obtained AC/DC minimum to a different minimum.
Claim 128
Dependent Claim
37 words
The system of claim 111 which includes adjustment means for adjusting the size of the first fringe period to a second fringe period in amount sufficient to shift an initially obtained AC/DC minimum to a different minimum.
Claim 129
Dependent Claim
37 words
The system of claim 112 which includes adjustment means for adjusting the size of the first fringe period to a second fringe period in amount sufficient to shift an initially obtained AC/DC minimum to a different minimum.
Claim 130
Dependent Claim
37 words
The system of claim 113 which includes adjustment means for adjusting the size of the first fringe period to a second fringe period in amount sufficient to shift an initially obtained AC/DC minimum to a different minimum.
Claim 131
Dependent Claim
29 words
The system of claim 118 which includes means for determining the magnitude of size deviation of the element from the size difference between the first and second fringe periods.
Claim 132
Dependent Claim
29 words
The system of claim 119 which includes means for determining the magnitude of size deviation of the element from the size difference between the first and second fringe periods.
Claim 133
Dependent Claim
29 words
The system of claim 120 which includes means for determining the magnitude of size deviation of the element from the size difference between the first and second fringe periods.
Claim 134
Dependent Claim
29 words
The system of claim 121 which includes means for determining the magnitude of size deviation of the element from the size difference between the first and second fringe periods.
Claim 135
Dependent Claim
28 words
The system of claim 122 which includes means for transmitting the determined magnitude of element size deviation to size adjustment controls in the process for manufacturing the element.
Claim 136
Dependent Claim
28 words
The system of claim 123 which includes means for transmitting the determined magnitude of element size deviation to size adjustment controls in the process for manufacturing the element.
Claim 137
Dependent Claim
28 words
The system of claim 124 which includes means for transmitting the determined magnitude of element size deviation to size adjustment controls in the process for manufacturing the element.
Claim 138
Dependent Claim
28 words
The system of claim 125 which includes means for transmitting the determined magnitude of element size deviation to size adjustment controls in the process for manufacturing the element.
Claim 139
Independent Claim
170 words
A system for measuring without contact the width of an elongated element which comprises: 1. means for producing a pair of coherent electromagnetic radiation beams of substantially the same size and intensity, one of said beams having a different frequency from said other beam, the frequency difference being within the radio frequency range; 2. means for converging said beams to form a laterally-moving fringe pattern having a first fringe period within the zone of convergence; 3. means for positioning said element within said first fringe period in a direction wherein the longitudinal axis of said element is substantially normal to the plane of the convergent beams, and holding it substantially spatially stationary relative to said zone; 4. means for detecting the radiation from said element and separating the AC signal component; 5. means for determining the AC signal; and 6. adjustment means for adjusting the fringe period of said fringe pattern relative to the element width to a size capable of producing a minimum AC signal with a given element.
Claim 140
Independent Claim
170 words
A system for measuring without contact the width of an elongated element which comprises: 1. means for producing a pair of coherent electromagnetic radiation beams of substantially the same size and intensity, one of said beams having a different frequency from said other beam, the frequency difference being within the radio frequency range; 2. means for converging said beams to form a laterally-moving fringe pattern having a first fringe period within the zone of convergence; 3. means for positioning said element within said first fringe period in a direction wherein the longitudinal axis of said element is substantially normal to the plane of the convergent beams, and holding it substantially spatially stationary relative to said zone; 4. means for detecting the radiation from said element and separating the AC signal component; 5. means for determining the AC signal; and 6. adjustment means for adjusting the fringe period of said fringe pattern relative to the element width to a size capable of producing a minimum AC signal with a given element.
Claim 141
Dependent Claim
13 words
The system of claim 130 wherein the element being measured is a filament.
Claim 142
Dependent Claim
13 words
The system of claim 130 wherein the element being measured is a slit.
Claim 143
Dependent Claim
16 words
The system of claim 131 which includes means for moving the element along its longitudinal axis.
Claim 144
Dependent Claim
16 words
The system of claim 132 which includes means for moving the element along its longitudinal axis.
Claim 145
Dependent Claim
28 words
The system of claim 131 which includes means for transmitting an AC signal different from said minimum to size adjustment controls in the process for manufacturing the element.
Claim 146
Dependent Claim
28 words
The system of claim 132 which includes means for transmitting an AC signal different from said minimum to size adjustment controls in the process for manufacturing the element.
Claim 147
Dependent Claim
28 words
The system of claim 133 which includes means for transmitting an AC signal different from said minimum to size adjustment controls in the process for manufacturing the element.
Claim 148
Dependent Claim
28 words
The system of claim 134 which includes means for transmitting an AC signal different from said minimum to size adjustment controls in the process for manufacturing the element.
Claim 149
Dependent Claim
37 words
The system of claim 131 which includes adjustment means for adjusting the size of the first fringe period to a second fringe period in amount sufficient to shift an initially obtained AC minimum to a different minimum.
Claim 150
Dependent Claim
37 words
The system of claim 132 which includes adjustment means for adjusting the size of the first fringe period to a second fringe period in amount sufficient to shift an initially obtained AC minimum to a different minimum.
Claim 151
Dependent Claim
37 words
The system of claim 133 which includes adjustment means for adjusting the size of the first fringe period to a second fringe period in amount sufficient to shift an initially obtained AC minimum to a different minimum.
Claim 152
Dependent Claim
37 words
The system of claim 134 which includes adjustment means for adjusting the size of the first fringe period to a second fringe period in amount sufficient to shift an initially obtained AC minimum to a different minimum.
Claim 153
Dependent Claim
29 words
The system of claim 139 which includes means for determining the magnitude of size deviation of the element from the size difference between the first and second fringe periods.
Claim 154
Dependent Claim
29 words
The system of claim 140 which includes means for determining the magnitude of size deviation of the element from the size difference between the first and second fringe periods.
Claim 155
Dependent Claim
29 words
The system of claim 141 which includes means for determining the magnitude of size deviation of the element from the size difference between the first and second fringe periods.
Claim 156
Dependent Claim
29 words
The system of claim 142 which includes means for determining the magnitude of size deviation of the element from the size difference between the first and second fringe periods.
Claim 157
Dependent Claim
28 words
The system of claim 143 which includes means for transmitting the determined magnitude of element size deviation to size adjustment controls in the process for manufacturing the element.
Claim 158
Dependent Claim
28 words
The system of claim 144 which includes means for transmitting the determined magnitude of element size deviation to size adjustment controls in the process for manufacturing the element.
Claim 159
Dependent Claim
28 words
The system of claim 145 which includes means for transmitting the determined magnitude of element size deviation to size adjustment controls in the process for manufacturing the element.
Claim 160
Dependent Claim
28 words
The system of claim 146 which includes means for transmitting the determined magnitude of element size deviation to size adjustment controls in the process for manufacturing the element.
Claim 161
Dependent Claim
116 words
The system of claim 109 wherein said moving fringe pattern is formed by means comprising: 1. means for producing said pair of coherent electromagnetic radiation beams; 2. means for first diverging and then converging said pair of beams onto a rotatable optical means adapted to diverge said beams at an angle determined by the angle of rotation of said rotatable optical means; 3. means for converging said pair of diverging beams formed by said optical means onto a beam splitter adapted to divide said beams substantially equally into a first beam pair adapted to form a test channel and a second beam pair; and 4. means for converging said first beam pair into said moving-fringe pattern.
Claim 162
Dependent Claim
116 words
The system of claim 130 wherein said moving fringe pattern is formed by means comprising: 1. means for producing said pair of coherent electromagnetic radiation beams; 2. means for first diverging and then converging said pair of beams onto a rotatable optical means adapted to diverge said beams at an angle determined by the angle of rotation of said rotatable optical means; 3. means for converging said pair of diverging beams formed by said optical means onto a beam splitter adapted to divide said beams substantially equally into a first beam pair adapted to form a test channel and a second beam pair; and 4. means for converging said first beam pair into said moving-fringe pattern.
Claim 163
Dependent Claim
16 words
The system of claim 151 which includes means for moving the element along its longitudinal axis.
Claim 164
Dependent Claim
16 words
The system of claim 152 which includes means for moving the element along its longitudinal axis.
Claim 165
Dependent Claim
28 words
The system of claim 151 which includes means for transmitting an AC/DC ratio different from said minimum to size adjustment controls in a process for manufacturing the element.
Claim 166
Dependent Claim
28 words
The system of claim 151 which includes means for transmitting an AC minimum different from said minimum to size adjustment controls in a process for manufacturing the element.
Claim 167
Dependent Claim
32 words
The system of claim 151 wherein said second beam pair forms a reference channel and the system includes means for converging said second beam pair to form a second, reference, moving-fringe pattern.
Claim 168
Dependent Claim
32 words
The system of claim 152 wherein said second beam pair forms a reference channel and the system includes means for converging said second beam pair to form a second, reference, moving-fringe pattern.
Claim 169
Dependent Claim
32 words
The system of claim 153 wherein said second beam pair forms a reference channel and the system includes means for converging said second beam pair to form a second, reference, moving-fringe pattern.
Claim 170
Dependent Claim
32 words
The system of claim 154 wherein said second beam pair forms a reference channel and the system includes means for converging said second beam pair to form a second, reference, moving-fringe pattern.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1979-04-27 | 1979-10-27 | 1980-04-27 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1983-04-27 | 1983-10-27 | 1984-04-27 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1987-04-27 | 1987-10-27 | 1988-04-27 | $7700.00 | Window Closed / Lapsed |