US3943557A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Semiconductor package with integral hermeticity detector
Assignee: Plessey Inc
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Filing: 1974-10-31
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Granted: 1976-03-09
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Expires: 1994-10-31
Abstract
Abstract The operation of relative humidity sensors made from cobalt oxide on a non-conductive ceramic substrate is improved by heating the sensor for a short period to a high temperature in a reducing atmosphere. This reduces the specific resistance of the device. With a lower resistivity, it is possible to reduce the size of the sensor to the point where it can be included along with a semiconductive device in standard hermetic packages. This makes possible the continuous, one-line monitoring of hermeticity for the life of the circuit without the necessity fo applying a load to the circuit.
Inventors
- 👤 Lawrence E. Frazee
- 👤 Anthony V. Fraioli
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-31 18:28
CPC Classifications
G; G01; G01N; G01N27/00; G01N27/02; G01N27/04; G01N27/12; G01N27/121; H; H05; H05K; H05K5/00; H05K5/0091; H05K5/0095; H10; H10W; H10W76/00; H10W76/10; H10W76/12; H10W76/15; H10W76/157
Claims Analysis
Total Claims: 5
Claim 1
Independent Claim
108 words
A hermetically-sealable package for a semiconductive device including an integral hermeticity detector comprising: means forming a cavity adapted to retain said semiconductive device and including a dielectric substrate; a plurality of metallic leads extending from within said cavity to the outside of said package; a humidity sensor within said cavity, said sensor comprising a double-fired layer of cobalt oxide, said layer having a lower than normal resistivity as a result of a second firing in a reducing atmosphere at about 1500°C. for a brief period; a pair of electrodes on said double-fired layer connected to a pair of said leads; and seal means for hermetically sealing said cavity.
Claim 2
Dependent Claim
108 words
A hermetically-sealable package for a semiconductive device including an integral hermeticity detector comprising: means forming a cavity adapted to retain said semiconductive device and including a dielectric substrate; a plurality of metallic leads extending from within said cavity to the outside of said package; a humidity sensor within said cavity, said sensor comprising a double-fired layer of cobalt oxide, said layer having a lower than normal resistivity as a result of a second firing in a reducing atmosphere at about 1500°C. for a brief period; a pair of electrodes on said double-fired layer connected to a pair of said leads; and seal means for hermetically sealing said cavity.
Claim 3
Dependent Claim
21 words
The package as claimed in claim 1, wherein said sensor is a discrete element formed on a high-temperature resistant, dielectric substrate.
Claim 4
Dependent Claim
16 words
The package as claimed in claim 1, wherein said sensor is formed on said dielectric substrate.
Claim 5
Dependent Claim
16 words
The package as claimed in claim 1, wherein said sensor is formed on said seal means.
References Cited (Backward Citations)
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1979-03-09 | 1979-09-08 | 1980-03-09 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1983-03-09 | 1983-09-08 | 1984-03-09 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1987-03-09 | 1987-09-08 | 1988-03-09 | $7700.00 | Window Closed / Lapsed |