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US3922385A Expired / Lapsed US ⏱️ 0.0 years remaining

Solderable multilayer contact for silicon semiconductor

Assignee: Motors Liquidation Co
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Filing: 1974-10-29
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Granted: 1975-11-25
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Expires: 1994-10-29
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Abstract

Abstract A multilayer solderable low resistance contact for N-type and Ptype regions on a semiconductor body comprising an aluminum layer directly on the semiconductor body, and a nickel alloy layer on the aluminum layer, in which the nickel alloy layer contains 1% 20% by weight manganese.

Inventors

  • 👤 Mark L Konantz
  • 👤 Ronald K Leisure

Bibliographic Details

Application Number —
Jurisdiction US
Data Source google_patents
Last Synchronized 2026-10-25 18:43
CPC Classifications
H; H10; H10P; H10P95/00; H10W; H10W20/00; H10W20/40; H10W72/00; H10W72/20

Claims Analysis

Total Claims: 4
Claim 1
Independent Claim 67 words
A METHOD OF FORMING AN IMPROVED SOLDERABLE MULTILAYER ELECTRODE ON A SILICON BODY COMPRISING THE STEPS OF: VACUUM DEPOSITING AN ALUMINUM LAYER AT LEAST ABOUT 3,000 ANGSTROMS THICK ONTO A SURFACE OF A SILICON BODY, HEATING SAID SILICON BODY AND SAID ALUMINUM LAYER TO SHALLOWLY ALLOY SAID SLUMINUM LAYER WITH SAID SILICON SURFACE AT THEIR INTERFACE AND REDUCE ELECTRICAL RESISTANCE BETWEEN SAID LAYER AND SAID SURFACE, AND
Claim 2
Independent Claim 67 words
A METHOD OF FORMING AN IMPROVED SOLDERABLE MULTILAYER ELECTRODE ON A SILICON BODY COMPRISING THE STEPS OF: VACUUM DEPOSITING AN ALUMINUM LAYER AT LEAST ABOUT 3,000 ANGSTROMS THICK ONTO A SURFACE OF A SILICON BODY, HEATING SAID SILICON BODY AND SAID ALUMINUM LAYER TO SHALLOWLY ALLOY SAID SLUMINUM LAYER WITH SAID SILICON SURFACE AT THEIR INTERFACE AND REDUCE ELECTRICAL RESISTANCE BETWEEN SAID LAYER AND SAID SURFACE, AND
Claim 3
Independent Claim 96 words
A method of forming a more adherent low resistance solderable multilayer electrode on a silicon surface comprising the steps of: vacuum depositing an aluminum layer about 5,000 - 15,000 angstroms thick onto a silicon surface, microalloying said aluminum layer to said silicon surface, wherein the electrical resistance therebetween is reduced and the aluminum layer is more intimately bonded to said silicon surface, and thereafter vacuum depositing an adherent solderable layer consisting essentially of nickel and about 1% - 10% by weight manganese onto said microalloyed aluminum layer to a thickness of about 3,000 - 5,000 angstroms.
Claim 4
Independent Claim 96 words
A method of forming a more adherent low resistance solderable multilayer electrode on a silicon surface comprising the steps of: vacuum depositing an aluminum layer about 5,000 - 15,000 angstroms thick onto a silicon surface, microalloying said aluminum layer to said silicon surface, wherein the electrical resistance therebetween is reduced and the aluminum layer is more intimately bonded to said silicon surface, and thereafter vacuum depositing an adherent solderable layer consisting essentially of nickel and about 1% - 10% by weight manganese onto said microalloyed aluminum layer to a thickness of about 3,000 - 5,000 angstroms.

References Cited (Backward Citations)

US3438120A Cited
US3794517A Cited
US3453501A Cited
US3623961A Cited
US3622385A Cited
US3480412A Cited
US3650826A Cited
US3579375A Cited

USPTO Annuity & Maintenance Windows

Annuity Stage Window Opens Payment Deadline Surcharge Period Until Estimated Fee Status
3.5 Years (Year 4) 1978-11-24 1979-05-26 1979-11-25 $2000.00 Window Closed / Lapsed
7.5 Years (Year 8) 1982-11-24 1983-05-26 1983-11-25 $3760.00 Window Closed / Lapsed
11.5 Years (Year 12) 1986-11-24 1987-05-26 1987-11-25 $7700.00 Window Closed / Lapsed

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