Patent US3920233A successfully refreshed from Google Patents.
US3920233A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Spherical support and translation device for wafers
Assignee: International Business Machines Corp
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Filing: 1974-06-11
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Granted: 1975-11-18
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Expires: 1994-06-11
Abstract
Abstract A spherical motion table is provided which is capable of moving in the X and Y directions. A wafer holding carriage locates the periphery of the top surface of the wafer accurately relative to the top surface of said spherical motion table and imparts to the back surface of the wafer a spherical contour which, in turn, imparts a substantially spherical contour to the front surface of the wafer to eliminate or minimize variations in wafer geometry from wafer to wafer and within an individual wafer as the spherical motion table is moved in the X and Y directions in, for example, a photoresist or electron beam resist exposure process.
Inventors
- 👤 Paul E Stuckert
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-29 06:35
CPC Classifications
G; G03; G03F; G03F7/00; G03F7/70; G03F7/70691; G03F7/70716
Claims Analysis
Total Claims: 9
Claim 1
Independent Claim
131 words
A support and translation device for wafers during an exposure process comprising a base having a curved surface, a table having an oppositely curved undersurface complementary to the curved surface of said base, bearing means disposed intermediate said base and Said table to support said table for movement relative to said base and carriage means mounted on said table, said carriage means including a backing plate having a continuous, non-perforated curved upper surface having the same center of curvature as the surface of said base for completely supporting a wafer and wafer clamping means mounted on said device and overlying said curved surface of said backing plate for holding a wafer against the curved surface of said backing plate to impart a curved configuration to the upper surface of said wafer.
Claim 2
Dependent Claim
131 words
A support and translation device for wafers during an exposure process comprising a base having a curved surface, a table having an oppositely curved undersurface complementary to the curved surface of said base, bearing means disposed intermediate said base and Said table to support said table for movement relative to said base and carriage means mounted on said table, said carriage means including a backing plate having a continuous, non-perforated curved upper surface having the same center of curvature as the surface of said base for completely supporting a wafer and wafer clamping means mounted on said device and overlying said curved surface of said backing plate for holding a wafer against the curved surface of said backing plate to impart a curved configuration to the upper surface of said wafer.
Claim 3
Dependent Claim
46 words
A support and translation device as set forth in claim 1 wherein said curved surfaces are spherical and said curved undersurface of said table is provided with a plurality of spherical surface areas with all of said spherical surfaces and surface areas having a common center.
Claim 4
Dependent Claim
48 words
A support and translation device as set forth in claim 2 wherein said bearing means is comprised of a plurality of spherical elements and means for retaining each of said elements in engagement with a respective one of said spherical surface areas on said undersurface of said table.
Claim 5
Dependent Claim
33 words
A support and translation device as set forth in claim 2 wherein said spherical surfaces in said base and said backing plate are convex and said spherical undersurface of said table is concave.
Claim 6
Dependent Claim
41 words
A support and translation device as set forth in claim 1 wherein said base is provided with a central vertically disposed aperture and said table is provided with a rod extending downwardly through said aperture for engagement with lateral translation means.
Claim 7
Dependent Claim
52 words
A support and translation device as set forth in claim 4 further comprising a plurality of conical support points disposed on the bottom surface of said carriage means and a plurality of complementary apertures in the upper surface of said table for securely and accurately locating said carriage means on said table.
Claim 8
Dependent Claim
79 words
A support and translation device as set forth in claim 1 wherein said carriage means further comprises a housing having a radially inwardly directed flange adjacent the upper edge thereof and means for biasing said backing plate into engagement with said flange; said backing plate and said flange each having a peripheral configuration complementary to the periphery of the wafer to be supported whereby the edge of the wafer will be clamped between said backing plate and said flange.
Claim 9
Dependent Claim
32 words
A support and translation device as set forth in claim 7 wherein said backing plate is disposed in intimate pressure contact with the said wafer to effectively remove heat generated during exposure.
References Cited (Backward Citations)
US1282037A
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US2441472A
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US2585287A
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US2736993A
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US2887334A
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1978-11-17 | 1979-05-19 | 1979-11-18 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1982-11-17 | 1983-05-19 | 1983-11-18 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1986-11-17 | 1987-05-19 | 1987-11-18 | $7700.00 | Window Closed / Lapsed |