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US3919968A
Expired / Lapsed
US
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Reaction device for pyrolytic deposition of semiconductor material
Assignee: Siemens AG
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Filing: 1974-11-20
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Granted: 1975-11-18
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Expires: 1994-11-20
Abstract
Abstract A reaction device for the pyrolytic deposition of semiconductor material from a gaseous phase onto heated mandrel surfaces and which comprises a metallic base plate having openings therein for electrodes and gas conduits, a glass-like dome for resting on the base plate, a pressure-resistant housing encompassing the dome and base plate and a pressure-sensitive safety control device interconnected between the interior of the dome and/or the interior of the pressure-resistant housing for controlling the energy input to the electrodes within the dome and controlling the gaseous pressure within the dome and/or the pressureresistant housing.
Inventors
- 👤 Herbert Sandmann
- 👤 Wolfgang Dietze
- 👤 Ulrich Rucha
- 👤 Gerhard Barowski
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-25 11:34
CPC Classifications
C; C30; C30B; C30B25/00; C30B25/02; C30B25/08
Claims Analysis
Total Claims: 10
Claim 1
Independent Claim
241 words
In a reaction device for the deposition of a semiconductor material onto a heated surface from a reaction gas having a gaseous compound of said semiconductor material therein, including a base plate having means for supporting at least one pair of spaced-apart mandrels which are electrically interconnected with an operational current source capablE of heating said mandrels to a select temperature, a dome composed of a glass-like material and positioned in contact with said base plate so as to enclose a reaction chamber about said mandrels, means for supplying a pressurized reaction gas from a source thereof to said reaction chamber, a pressure-resistant container having a pressure chamber therein surrounding said dome and at least a portion of said base plate and a means for suppplying a pressurized inert gas from a source thereof to said pressure chamber for applying a gas pressure onto said dome to hold said dome in a gas impermeable relation with said base plate; the improvement comprising: a pressure-sensing control means operationally interconected between said operational current source and said mandrels and between said pressure chamber and said means for supplying a pressurized reaction gas from a source thereof to said reaction chamber so that when the pressure within said pressure chamber drops below a predetermined minimum value said control means generate a signal to block the current flow to said mandrels and generate a signal to block the reaction gas flow to said reaction chamber.
Claim 2
Dependent Claim
241 words
In a reaction device for the deposition of a semiconductor material onto a heated surface from a reaction gas having a gaseous compound of said semiconductor material therein, including a base plate having means for supporting at least one pair of spaced-apart mandrels which are electrically interconnected with an operational current source capablE of heating said mandrels to a select temperature, a dome composed of a glass-like material and positioned in contact with said base plate so as to enclose a reaction chamber about said mandrels, means for supplying a pressurized reaction gas from a source thereof to said reaction chamber, a pressure-resistant container having a pressure chamber therein surrounding said dome and at least a portion of said base plate and a means for suppplying a pressurized inert gas from a source thereof to said pressure chamber for applying a gas pressure onto said dome to hold said dome in a gas impermeable relation with said base plate; the improvement comprising: a pressure-sensing control means operationally interconected between said operational current source and said mandrels and between said pressure chamber and said means for supplying a pressurized reaction gas from a source thereof to said reaction chamber so that when the pressure within said pressure chamber drops below a predetermined minimum value said control means generate a signal to block the current flow to said mandrels and generate a signal to block the reaction gas flow to said reaction chamber.
Claim 3
Dependent Claim
33 words
In a reaction device as defined in claim 1 including an alarm system operationally interconnected with said control means, said alarm system being activated by a pressure-responsive signal generated by said control means.
Claim 4
Dependent Claim
35 words
In a reaction device as defined in claim 1 wherein said pressure-sensing control means includes a contact manometer which senses the gas pressure within said pressure chamber and generates an electronic signal in response thereto.
Claim 5
Dependent Claim
82 words
In a reaction device as defined in claim 1 wherein said pressure-sensing control means is also operationally interconnected between said reaction chamber and said means for supplying a pressurized reaction gas from a source thereof to said reaction chamber so that when the pressure within said reaction chamber increases above the predetermined maximum value said control means generates a signal to block the current flow to said mandrels and generates a signal to block the reaction gas flow to said reaction chamber.
Claim 6
Dependent Claim
35 words
In a reaction device as defined in claim 4 wherein said pressure-sensing control means includes a contact manometer which senses the gas pressure within said reaction chamber and generates an electronic signal in response thereto.
Claim 7
Dependent Claim
70 words
In a reaction device as defined in claim 1 wherein said pressure-sensing control means is also operationally interconnected between said pressure chamber and said reaction chamber so that when the difference in pressure between said chambers drops below a predetermined minimum value said control means generates a signal to block the current flow to said mandrels and generates a signal to block the reaction gas flow to said reaction chamber.
Claim 8
Dependent Claim
99 words
In a reaction device as defined in claim 6 including an elastic gas impermeable membrane and positioned in communication with said pressure chamber and said reaction chamber and a pressure-sensitive electronic signal generating element operationally coupled to said membrane and said pressure-sensing control means so that when the difference in pressure between said chambers drops below a predetermined minimum value said membrane exerts a pressure on said pressure-sensitive electronic signal generating element which generates a signal actuating said control means to block the current flow to said mandrels and to block the reaction gas flow to said reaction chamber.
Claim 9
Dependent Claim
84 words
In a reaction device as defined in claim 7 wherein said pressure-sensing control means is also operationally interconnected between said pressure chamber and said means for supplying a pressurized inert gas from a source thereof to said pressure chamber so that when the difference in pressure between said chambers exceeds a predetermined maximum value said membrane exerts a pressure on said pressure-sensitive electronic signal generating element which produces a signal actuating said control means to increase the inert gas flow to said pressure chamber.
Claim 10
Dependent Claim
79 words
In a reaction device as defined in claim 6 including a capillary interconnection between said reaction chamber and said pressure chamber and a flow meter operationally interconnected between said capillary and said control means capable of generating a signal when the speed of gas flow past said flow meter drops below a predetermined minimum value for activating said control means to block the current flow to said mandrels and to block the reaction gas flow to said reaction chamber.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1978-11-17 | 1979-05-19 | 1979-11-18 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1982-11-17 | 1983-05-19 | 1983-11-18 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1986-11-17 | 1987-05-19 | 1987-11-18 | $7700.00 | Window Closed / Lapsed |