US3919768A — Method of tunnel containing structures

Claim 1

Independent Claim 111 words

THE METHOD OF MAKING A THREE DIMENSIONAL STRUCTURE OF SELECTED SIZEE IN EACH DIMENSION FORMED OF A POLYMERIZABLE RADIATION ACTIVATABLE MATERIAL, SAID METHOD COMPRISING: A. DEPOSITING A FIRST LAYER OF A RADIATION ACTIVE MATERIAL ON A SUBSTRATE, B. EXPOSING SAID FIRST LAYER TO A SOURCE OF RADIATION HAVING A SPECTRAL DISTRIBUTION COMPATIBLE WITH THE SPECTRAL RESPONSE OF SAID RADIATION ACTIVE MATERIAL TO ONLY PARTIALLY ACTIVE SAID LAYER, C. IMMEDIATELY THEREAFTER DEPOSITING A SECOND LAYER OF RADIATION ACTIVE MATERIAL ON SAID FIRST LAYER TO PERMIT CO-POLYMERIZATION OF SAID TWO LAYERS BEWEEN THE INTERFACE THEREBETWEEN TO THEREBY PERMANTENTLY BOND SAID TWO LAYERS, B. BAKING SAID STRUCTURE TO HOMOGENIZE THE INTERFACE BETWEEN SAID LAYERS,

Claim 2

Independent Claim 111 words

THE METHOD OF MAKING A THREE DIMENSIONAL STRUCTURE OF SELECTED SIZEE IN EACH DIMENSION FORMED OF A POLYMERIZABLE RADIATION ACTIVATABLE MATERIAL, SAID METHOD COMPRISING: A. DEPOSITING A FIRST LAYER OF A RADIATION ACTIVE MATERIAL ON A SUBSTRATE, B. EXPOSING SAID FIRST LAYER TO A SOURCE OF RADIATION HAVING A SPECTRAL DISTRIBUTION COMPATIBLE WITH THE SPECTRAL RESPONSE OF SAID RADIATION ACTIVE MATERIAL TO ONLY PARTIALLY ACTIVE SAID LAYER, C. IMMEDIATELY THEREAFTER DEPOSITING A SECOND LAYER OF RADIATION ACTIVE MATERIAL ON SAID FIRST LAYER TO PERMIT CO-POLYMERIZATION OF SAID TWO LAYERS BEWEEN THE INTERFACE THEREBETWEEN TO THEREBY PERMANTENTLY BOND SAID TWO LAYERS, B. BAKING SAID STRUCTURE TO HOMOGENIZE THE INTERFACE BETWEEN SAID LAYERS,

Claim 3

Dependent Claim 35 words

The method of making the structure of claim 1 further characterized in that the method includes bonding an additional member to an exposed surface of said second layer parallel to the surface of the substrate.

Claim 4

Dependent Claim 34 words

The method of making the structure of claim 1 further characterized in that the second layer is exposed to said source of radiation through a mask which permits exposure of only said selected portion.

Claim 5

Dependent Claim 33 words

The method of making the structure of claim 1 further characterized in that the treating of the material comprises washing the material in a solvent so that the unexposed portions are washed away.

Claim 6

Independent Claim 157 words

The method of making a device having a plurality of spaced apart tunnels therein, said method comprising: a. coating a radiation active resist material on one planar surface of a substrate having a pair of opposite planar surfaces; b. exposing a plurality of spaced apart selected areas of said resist material to a source of radiation, c. treating the resist material with an agent capable of removing portions thereof not exposed to the source of radiation to thereby form a plurality of spaced apart recesses separated by a plurality of spaced apart ridges and in which said recesses have walls extending between said ridges which are substantially parallel to the first named planar surface, d. coating a material capable of bonding action on one planar surface of a cover member, e. and bonding said cover member to the outwardly presented surface of said ridges through the material capable of bonding actIon to form tunnels with said recesses.

Claim 7

Independent Claim 157 words

The method of making a device having a plurality of spaced apart tunnels therein, said method comprising: a. coating a radiation active resist material on one planar surface of a substrate having a pair of opposite planar surfaces; b. exposing a plurality of spaced apart selected areas of said resist material to a source of radiation, c. treating the resist material with an agent capable of removing portions thereof not exposed to the source of radiation to thereby form a plurality of spaced apart recesses separated by a plurality of spaced apart ridges and in which said recesses have walls extending between said ridges which are substantially parallel to the first named planar surface, d. coating a material capable of bonding action on one planar surface of a cover member, e. and bonding said cover member to the outwardly presented surface of said ridges through the material capable of bonding actIon to form tunnels with said recesses.

Claim 8

Dependent Claim 93 words

The method of claim 5 further characterized in that the coating of radiation active resist material on the substrate is accomplished by applying a first layer of such material to the planar surface of said substrate and exposing said first layer to said source of radiation to effect only partial activation thereof, and a second layer of radiation active resist material is thereafter applied to said partially activated first layer, whereby copolymerization occurs between the two layers to effect bonding therebetween, said device then being baked to homogenize the interface between said layers.

Claim 9

Dependent Claim 32 words

The method of claim 6 further characterized in that said second layer is exposed to said source of radiation through a mask which permits exposure of only said selected spaced apart areas.

Claim 10

Dependent Claim 43 words

The method of claim 5 further characterized in that said cover member is integral with and initially substantially coplanar with said substrate and folded over and bonded to said ridges after coating with said resist material and exposure to cause partial activation thereof.

Claim 11

Dependent Claim 56 words

The method of claim 5 further characterized in that the material capable of bonding action is a radiation active resist material and the last named coating is exposed to a source of radiation to cause partial activation thereof immediiatelly prior to bonding whereby copolymerization occurs between the last named coating and the material of said ridges.

Claim 12

Dependent Claim 28 words

The method of claim 7 further characterized in that the method includes the applying of heat and pressure to the ridges and cover member during the bonding operation.

Claim 13

Independent Claim 196 words

The method of fabricating a magnetic memory device comprising: a. coating a radiation active resist material on one planar surface of a substrate also having a plurality of electrical conductors located with respect to one planar surface thereof, b. exposing a plurality of spaced apart selected areas of said resist material to a source of radiation in such manner that the exposed selected areas are angularly located with respect to said electrical conductors, c. treating the resist material with an agent capable of removing portions thereof not exposed to the source of radiation to thereby form a plurality of spaced apart recesses separated by a plurality of spaced apart ridges and in which said ridges are substantially parallel to the first named planar surface and angularly located with respect to the electrical conductors, d. bonding a cover member having a plurality of electrical conductors thereon to the surfaces of said ridges parallel to said substrate planar surface to form tunnels with said recesses, so that respective ones of the conductors on said cover member and substrate are in substantial registry and capable of being in electrical contact, e. and inserting electrically conductive elements in said tunnels.

Claim 14

Independent Claim 196 words

The method of fabricating a magnetic memory device comprising: a. coating a radiation active resist material on one planar surface of a substrate also having a plurality of electrical conductors located with respect to one planar surface thereof, b. exposing a plurality of spaced apart selected areas of said resist material to a source of radiation in such manner that the exposed selected areas are angularly located with respect to said electrical conductors, c. treating the resist material with an agent capable of removing portions thereof not exposed to the source of radiation to thereby form a plurality of spaced apart recesses separated by a plurality of spaced apart ridges and in which said ridges are substantially parallel to the first named planar surface and angularly located with respect to the electrical conductors, d. bonding a cover member having a plurality of electrical conductors thereon to the surfaces of said ridges parallel to said substrate planar surface to form tunnels with said recesses, so that respective ones of the conductors on said cover member and substrate are in substantial registry and capable of being in electrical contact, e. and inserting electrically conductive elements in said tunnels.

Claim 15

Dependent Claim 66 words

The method of claim 11 further characterized in that the surface of the cover member which is bonded to the surfaces of said ridges is first coated with a radiation active resist material and exposed to a source of radiation to cause partial activation thereof prior to bonding to said ridges, whereby copolymerization occurs at the interface between the ridges and the last mentioned resist material.

Claim 16

Dependent Claim 37 words

The method of claim 11 further characterized in that the radiation active resist material is applied to a planar surface of said substrate which is opposite to the planar surface on which said electrical conductors are located.

Claim 17

Dependent Claim 62 words

The method of claim 11 further characterized in that the electrical conductors on said cover member are located on one planar surface thereof and that the opposite planar surface of said cover member is first coated with a bondable material so that said cover member is bonded to the surfaces of said ridges parallel to said substrate surface through said bondable material.

Claim 18

Dependent Claim 87 words

The method of claim 14 further charaCterized in that the electrical conductors on said cover member are located with respect to one planar surface thereof and that the same planar surface of said cover member is first coated with a bondable material so that said cover member is bonded to the surfaces of said ridges through said last named coating of bondable material, and the radiation active resist material applied to said substratee is applied to the same planar surface on which said electrical conductors are located.

Claim 19

Dependent Claim 39 words

The method of claim 12 further characterized in that said cover member is integral with and initially substantially coplanar with said substrate and folded over and bonded to said ridges after coating with said resist material and exposure thereof.

Annuity Stage	Window Opens	Payment Deadline	Surcharge Period Until	Estimated Fee	Status
3.5 Years (Year 4)	1978-11-17	1979-05-19	1979-11-18	$2000.00	Window Closed / Lapsed
7.5 Years (Year 8)	1982-11-17	1983-05-19	1983-11-18	$3760.00	Window Closed / Lapsed
11.5 Years (Year 12)	1986-11-17	1987-05-19	1987-11-18	$7700.00	Window Closed / Lapsed

Method of tunnel containing structures

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