Hot sub-stage for a scanning electron microscope

Claim 1

A hot sub-stage for supporting and heating a sample in a scanning electron microscope wherein an electron beam impinges on a sample and secondary electrons emitted from the beam impact area are collected for image formation, the collection means having a field for accelerating electrons from said impact region, said hot-stage comprising: a boat for supporting and heating said sample in a position allowing secondary electrons emitted from said impact area to pursue both rectilinear and curved propagation paths to said collection means, said boat being formed of a flexible, reflective, refractory, conductive foil, deformable to enclose said sample in a heat confining manner while avoiding interference with said beam or said propagation paths, said foil having current conducting cross-sections selected for electrically heating said sample, terminal means arranged to provide two point electrical contact for heating and mechanically supporting said boat, and a conductive grid in close proximity to said boat, embracing said propagation paths and oriented in a plane perpendicular thereto, said grid having a potential in respect to said boat which is selected to prevent thermionically emitted electrons from penetrating said grid and entering said collection field while permitting secondary electrons to enter said collection field.