Step and repeat controller

Claim 2

Means for locating electrode image positions on a photomask to be used in the construction of acoustic surface wave devices comprising an acoustic surface wave device having a surface over which signals are propagated, an input transducer located on said surface, means connected to excite said input transducer to propagate a signal therefrom over the surface, means for sensing a propagated signal at different locatiOns on the surface including a sensor member movable relative to the surface, other means forming a photomask and means fixedly connecting the photomask to the surface wave device for movement therewith relative to the sensor member, camera means including means for exposing the photomask to an image to be formed thereon, circuit means having separate input connections to the sensor member and to the input transducer, said circuit means including means for indicating a predetermined relationship between the signal applied at the input transducer and the propagated signal as sensed at different locations by the sensor member, said last named means including means for establishing different positions on the photomask for exposure to the camera means, said different positions establishing positions for exposing the photomask to the optical image.

Claim 3

Means for locating electrode images on a photomask comprising a crystal member having a surface formed thereon over which signals are propagated, means forming an input transducer on said surface from which signals are propagated over the surface, said input transducer including spaced parallel electrodes formed on said surface and extending transversely to the direction of signal propagation, means forming a reference transducer on the surface at a location spaced from the input transducer in the direction of signal propagation, a variable transducer positioned adjacent to the surface and movable relative thereto, said variable transducer responding to a signal being propagated at different positions as it is being propagated, a photomask member, means mounting the crystal member and the photomask member for movement in concert relative to the variable transducer, means for applying a drive signal to the input transducer for propagation over the surface of the crystal member, and other means including phase sensitive means having a first connection to the reference transducer and a second connection to the variable transducer, said phasemeter including means to indicate the relative phase between the propagated signal as sensed at the reference transducer and as sensed by the variable transducer, and camera means including a pictorial repesentation of an electrode and means for exposing the photomask to the pictorial representation in different preselected positions of the crystal member relative to the variable transducer depending on particular phase relationships indicated on the phasemeter.

Claim 4

Means for locating electrode images on a photomask comprising a crystal member having a surface formed thereon over which signals are propagated, means forming an input transducer on said surface from which signals are propagated over the surface, said input transducer including spaced parallel electrodes formed on said surface and extending transversely to the direction of signal propagation, means forming a reference transducer on the surface at a location spaced from the input transducer in the direction of signal propagation, a variable transducer positioned adjacent to the surface and movable relative thereto, said variable transducer responding to a signal being propagated at different positions as it is being propagated, a photomask member, means mounting the crystal member and the photomask member for movement in concert relative to the variable transducer, means for applying a drive signal to the input transducer for propagation over the surface of the crystal member, and other means including phase sensitive means having a first connection to the reference transducer and a second connection to the variable transducer, said phasemeter including means to indicate the relative phase between the propagated signal as sensed at the reference transducer and as sensed by the variable transducer, and camera means including a pictorial repesentation of an electrode and means for exposing the photomask to the pictorial representation in different preselected positions of the crystal member relative to the variable transducer depending on particular phase relationships indicated on the phasemeter.

Claim 5

The means for locating electrode images defined in claim 2 wherein the particular relationships as indicated by the phasemeter are for the same phase but for different positions of the variable transducer relative to the crystal member.

Claim 6

The means for locating electrode images defined in claim 2 including means for counting cycles of the propagated signals for movements of the variable transducer relative to the crystal member, the phasemeter being used to establish preselected phase indications for different locations of the variable transducer relative to the crystal member as determined by the cycle counting means.

Claim 7

The means for locating electrode images defined in claim 4 wherein the variable transducer is coarse located relative to the input transducer on the crystal member at different spaced positions corresponding to different predetermined numbers of cycles of the propagated signals as measured during movements of the variable transducer toward and away from the input transducer.

Claim 8

Means for locating electrode positions in the construction of an acoustic surface wave device comprising a crystal member having a surface formed thereon over which signals are propagated, input transducer means at which signals to be propagated are introduced, means forming a reference transducer on said surface spaced from the input transducer in the direction therefrom of signal propagation, means connected to the reference transducer for sensing a propagated signal at the time it moves thereby and producing an output, an adjustAble transducer located closely adjacent to the surface and movable relative thereto toward and away from the reference transducer in the direction of signal propagation, output means connected to the adjustable transducer for producing an output response at the time when a propagated signal moves thereby, means for comparing the time of occurrence of the propagated signal as sensed at the reference transducer and at the adjustable transducer to determine the phase relationship therebetween, and means for producing an output indication when the compared responses have a preestablished phase relationship.

Claim 9

Means for locating electrode positions in the construction of an acoustic surface wave device comprising a crystal member having a surface formed thereon over which signals are propagated, input transducer means at which signals to be propagated are introduced, means forming a reference transducer on said surface spaced from the input transducer in the direction therefrom of signal propagation, means connected to the reference transducer for sensing a propagated signal at the time it moves thereby and producing an output, an adjustAble transducer located closely adjacent to the surface and movable relative thereto toward and away from the reference transducer in the direction of signal propagation, output means connected to the adjustable transducer for producing an output response at the time when a propagated signal moves thereby, means for comparing the time of occurrence of the propagated signal as sensed at the reference transducer and at the adjustable transducer to determine the phase relationship therebetween, and means for producing an output indication when the compared responses have a preestablished phase relationship.

Claim 10

The means defined in claim 6 wherein a second crystal member having structural and electrical characteristics similar to the aforesaid crystal member is fixedly attached to the aforesaid crystal member for movement therewith relative to the adjustable transducer, and camera means associated with said second crystal member and movable relative thereto in concert with the adjustable transducer, said camera means including means for exposing the surface of the second crystal member to an image of an electrode to be located thereon at positions corresponding to predetermined positions of the adjustable transducer relative to the crystal member.

Claim 11

The means defined in claim 6 including a dual beam oscilloscope having a first input connected to receive responses sensed by the reference transducer and a second input connected to receive responses sensed by the adjustable transducer.

Claim 12

The means defined in claim 8 including a precision oscillator and a pulse generator connected to the input transducer to excite said transducer to propagate a signal over the surface of the crystal member, and digital delay means connected to the precision oscillator including means to connect the output of the delay means to the oscilloscope.

Claim 13

Means for accurately locating images of electrodes on a photomask to be used in the construction of an acoustic surface wave device including a photomask, a crystal member similar in structural and operational characteristics to that for which the photomask is being prepared, means mounting said crystal and photomask members for movement in concert, camera means associated with the photomask member including means for exposing selected areas of the surface of said photomask member to an image of an electrode to be formed thereon, said crystal member having an input transducer formed on the surface thereof, means for applying a signal to the input transducer for propagation thereby over the crystal surface, sensor means positioned adjacent to the surface of said crystal member and means for moving the crystal member relative thereto in a direction to move the sensor means toward or away from the input transducer to sense a signal being propagated at different locations therealong, means for moving the camera means in concert with the sensor means and relative to the photomask member to establish different optical relationships between the camera means and the surface of the photomask member, means for making phase comparisons between the signal applied to the input transducer for propagation and the signal sensed by the sensor means, and means for exposing the photomask member to the electrode image at preselected positions as determined by the phase comparison means.

Claim 14

Means for accurately locating images of electrodes on a photomask to be used in the construction of an acoustic surface wave device including a photomask, a crystal member similar in structural and operational characteristics to that for which the photomask is being prepared, means mounting said crystal and photomask members for movement in concert, camera means associated with the photomask member including means for exposing selected areas of the surface of said photomask member to an image of an electrode to be formed thereon, said crystal member having an input transducer formed on the surface thereof, means for applying a signal to the input transducer for propagation thereby over the crystal surface, sensor means positioned adjacent to the surface of said crystal member and means for moving the crystal member relative thereto in a direction to move the sensor means toward or away from the input transducer to sense a signal being propagated at different locations therealong, means for moving the camera means in concert with the sensor means and relative to the photomask member to establish different optical relationships between the camera means and the surface of the photomask member, means for making phase comparisons between the signal applied to the input transducer for propagation and the signal sensed by the sensor means, and means for exposing the photomask member to the electrode image at preselected positions as determined by the phase comparison means.

Claim 15

The means defined in claim 10 wherein the means for applying signals to the input transducer for propagation include means for applying continuous wave signals, and cycle counting means connected to said sensor means for counting cycles of a propagated signal as the sensor means moves toward or away from the input transducer.

Claim 16

The means defined in claim 10 wherein said sensor means is mounted in a fixed position and the crystal and photomask members are mounted for movement relative thereto.

Claim 17

The means defined in claim 10 including means for maintaining the sensor means closely adjacent to the surface of the crystal member during relative movements therebetweeN.

Claim 18

The means defined in claim 13 wherein the means for maintaining the sensor means closely adjacent to the surface of the crystal member include track means formed on one of the members for engagement by the other.

Claim 19

The means defined in claim 10 wherein the camera means includes a pictorial representation of an electrode location for producing on the photomask member, said pictorial representation including a plurality of closely spaced parallel members, and means connecting opposite ends of alternate ones of the spaced parallel members together.

Claim 20

The means for accurately locating images of electrodes on a photomask defined in claim 10 wherein the photomask is a glass plate having a photosensitized coating applied thereto.

Claim 21

Means for accurately locating images of electrodes on a photomask to be used in the construction of an acoustic surface wave device including first and second crystal members of similar structural and operational characteristics, means mounting said first and second crystal members for movement in concert, camera means associated with the first crystal member including means for exposing selected areas of the surface of said first crystal member to an image of an electrode to be formed thereon, said second crystal member having an input transducer formed on the surface thereof, means for applying a signal to the input transducer for propagation thereby over the crystal surface of said second crystal member, sensor means positioned adjacent to the surface of said second crystal member and means for moving the second crystal member relative thereto in a direction to move the sensor means toward or away from the input transducer to sense a signal being propagated at different locations therealong, means for moving the camera means in concert with the sensor means and relative to the first crystal member to establish a different optical relationship between the camera means and the surface of the first crystal member, means for making phase comparisons between the signal applied to the input transducer for propagation and the signal sensed by the sensor means, and means for exposing the first crystal member to the electrode image at preselected positions of said first and second crystal members as determined by the phase comparison means.

Claim 22

Means for accurately locating images of electrodes on a photomask to be used in the construction of an acoustic surface wave device including first and second crystal members of similar structural and operational characteristics, means mounting said first and second crystal members for movement in concert, camera means associated with the first crystal member including means for exposing selected areas of the surface of said first crystal member to an image of an electrode to be formed thereon, said second crystal member having an input transducer formed on the surface thereof, means for applying a signal to the input transducer for propagation thereby over the crystal surface of said second crystal member, sensor means positioned adjacent to the surface of said second crystal member and means for moving the second crystal member relative thereto in a direction to move the sensor means toward or away from the input transducer to sense a signal being propagated at different locations therealong, means for moving the camera means in concert with the sensor means and relative to the first crystal member to establish a different optical relationship between the camera means and the surface of the first crystal member, means for making phase comparisons between the signal applied to the input transducer for propagation and the signal sensed by the sensor means, and means for exposing the first crystal member to the electrode image at preselected positions of said first and second crystal members as determined by the phase comparison means.

Claim 23

Means for accurately locating images of electrodes on a photomask to be used in construction of acoustic surface wave devices comprising a photomask member, a reference piezoelectric member having structural and operational characteristics similar to that for which the photomask is being prepared, means for mounting said reference and said photomask members in fixed relationship to each other, means for exposing selected areas of the photomask member to an image of an electrode to be formed thereon including camera means and means in the camera means forming an optical image of the electrode to be formed, and means for selectively relocating the photomask member relative to the camera means to expose the surface of said photomask member to the image in different positions thereof whereby locations for spaced electrodes are photographically recorded on the surface of said photomask member, said last named means including means for propagating a signal along the surface of the reference crystal member commencing at a predetermined location thereon, and means for sensing the propagated signal at different locations along the surface of the reference crystal including means for comparing the phase of the signal being propagated at at least two different locations on the surface of the reference signal as it is being propagated, said phase comparison means including means for producing relative movement between the photomask member and the reference crystal member relative to the sensing means and the camera means, and means for optically exposing the photomask member to the image of the electrode in preselected positions as determined by phase comparison means.

Claim 24

Means for accurately locating images of electrodes on a photomask to be used in construction of acoustic surface wave devices comprising a photomask member, a reference piezoelectric member having structural and operational characteristics similar to that for which the photomask is being prepared, means for mounting said reference and said photomask members in fixed relationship to each other, means for exposing selected areas of the photomask member to an image of an electrode to be formed thereon including camera means and means in the camera means forming an optical image of the electrode to be formed, and means for selectively relocating the photomask member relative to the camera means to expose the surface of said photomask member to the image in different positions thereof whereby locations for spaced electrodes are photographically recorded on the surface of said photomask member, said last named means including means for propagating a signal along the surface of the reference crystal member commencing at a predetermined location thereon, and means for sensing the propagated signal at different locations along the surface of the reference crystal including means for comparing the phase of the signal being propagated at at least two different locations on the surface of the reference signal as it is being propagated, said phase comparison means including means for producing relative movement between the photomask member and the reference crystal member relative to the sensing means and the camera means, and means for optically exposing the photomask member to the image of the electrode in preselected positions as determined by phase comparison means.

Claim 25

The means defined in claim 18 wherein the phase comparison means includes means connected to the reference crystal at the location where the signal is propagated and to the sensing means.

Claim 26

The means defined in claim 18 wherein a reference transducer is located on the reference crystal member at a location on the surface thereof spaced from the location where the signal to be propagated is introduced, and means connecting the reference transducer and the sensing means to the phase comparison means.

Claim 27

The means defined in claim 18 wherein said sensing means include a sensor member having a transducer formed thereon, and means for producing relative movement between the surface of the reference crystal member and the transducer on the sensor member.

Claim 28

The means defined in claim 21 including means to maintain a predetermined spaced relationship between the transducer on the sensor member and the surface of the reference crystal member during relative movements therebetween.