Claims Analysis
Total Claims: 4
Claim 1
Independent Claim
166 words
A method of optically monitoring the image of the melting zone of a semiconductor rod in a crucible free melting process comprising the steps of generating an electron beam, scanning the image with the electron beam (2, 12) under the control of line scanning pulses, modulating the electron beam with electrical pulses, for producing measuring marks M1, M2 representing the edges of the image, including controlling the beam with a beam control circuit, coupling the electrical pulses to the control circuit with a coupling circuit (9) and generating the electrical pulses with an auxiliary circuit which includes a pair of three-terminal semiconductor switches (22, 25) in series with the coupling circuit and a direct current voltage source (23) by applying switching pulses having an adjustable period to one of the three-terminal semiconductor switches (22) which switching pulses are equal to each other and shorter in duration than the scanning duration of one line, and applying the line scanning pulses to the other three-terminal semiconductor switch (25).
Claim 2
Independent Claim
166 words
A method of optically monitoring the image of the melting zone of a semiconductor rod in a crucible free melting process comprising the steps of generating an electron beam, scanning the image with the electron beam (2, 12) under the control of line scanning pulses, modulating the electron beam with electrical pulses, for producing measuring marks M1, M2 representing the edges of the image, including controlling the beam with a beam control circuit, coupling the electrical pulses to the control circuit with a coupling circuit (9) and generating the electrical pulses with an auxiliary circuit which includes a pair of three-terminal semiconductor switches (22, 25) in series with the coupling circuit and a direct current voltage source (23) by applying switching pulses having an adjustable period to one of the three-terminal semiconductor switches (22) which switching pulses are equal to each other and shorter in duration than the scanning duration of one line, and applying the line scanning pulses to the other three-terminal semiconductor switch (25).
Claim 3
Dependent Claim
165 words
Apparatus for optically monitoring the image of the melting zone of a semiconductor rod in a crucible free melting process comprising means for generating an electron beam means for geneRating electrical pulses, a beam control circuit for controlling scanning the image including modulating means for modulating the beam with the electrical pulses to produce measuring marks M1, M2 representing the edges of the image, a coupling circuit (9) for coupling the electrical pulses from said pulse generating means to said beam control circuit, said pulse generating means including an auxiliary circuit including a pair of three-terminal semiconductor switches (22, 25) connected in series with said coupling circuit and a direct current voltage supply, means for applying adjustable period switching pulses to one of said semiconductor switches (22), said switching pulses being equal to each other and shorter in duration than the scanning duration of one line a source of the scanning pulses, and means for applying line scanning pulses to the other semiconductor switch (25).
Claim 4
Dependent Claim
165 words
Apparatus for optically monitoring the image of the melting zone of a semiconductor rod in a crucible free melting process comprising means for generating an electron beam means for geneRating electrical pulses, a beam control circuit for controlling scanning the image including modulating means for modulating the beam with the electrical pulses to produce measuring marks M1, M2 representing the edges of the image, a coupling circuit (9) for coupling the electrical pulses from said pulse generating means to said beam control circuit, said pulse generating means including an auxiliary circuit including a pair of three-terminal semiconductor switches (22, 25) connected in series with said coupling circuit and a direct current voltage supply, means for applying adjustable period switching pulses to one of said semiconductor switches (22), said switching pulses being equal to each other and shorter in duration than the scanning duration of one line a source of the scanning pulses, and means for applying line scanning pulses to the other semiconductor switch (25).