Patent US2527583A successfully refreshed from Google Patents.
Patent US3900600A successfully refreshed from Google Patents.
US3900600A
Expired / Lapsed
US
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Paraxylylene-silane dielectric films
Assignee: International Business Machines Corp
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Filing: 1973-06-29
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Granted: 1975-08-19
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Expires: 1993-06-29
Abstract
Abstract Halogen substituted paraxylylene dimers admixed with bifunctional silanes and vapor deposited on a substrate or used as an encapsulant produce dielectric films having improved adherence, resistance to electromigration, and thermal stability.
Inventors
- 👤 Edward C Spaulding
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-30 10:00
CPC Classifications
B; B05; B05D; B05D1/00; B05D1/60; Y; Y10; Y10S; Y10S148/00; Y10S148/025
Claims Analysis
Total Claims: 9
Claim 1
Independent Claim
46 words
A METHOD FOR PRODUCING DIELECTRIC FILMS COMPRISING ADMIXING HALOGEN SUBSTITUTED PARAXYLYLENE DIMERS AND SILYL AMINES IN A RATIO OF 1:1 TO 5:1 BY WEIGHT OF DIMER TO AMINE, HEATING THE ADMIXTURE TO VAPORIZE THE ADMIXTURE AND VAPOR DEPOSITING SAID ADMIXTURE UPON A SUBSTRATE UNDER REDUCED PRESSURE.
Claim 2
Independent Claim
46 words
A METHOD FOR PRODUCING DIELECTRIC FILMS COMPRISING ADMIXING HALOGEN SUBSTITUTED PARAXYLYLENE DIMERS AND SILYL AMINES IN A RATIO OF 1:1 TO 5:1 BY WEIGHT OF DIMER TO AMINE, HEATING THE ADMIXTURE TO VAPORIZE THE ADMIXTURE AND VAPOR DEPOSITING SAID ADMIXTURE UPON A SUBSTRATE UNDER REDUCED PRESSURE.
Claim 3
Dependent Claim
18 words
A method in accordance with claim 1 wherein said halogen substituted paraxylylene dimer is mono chlorine substituted paraxylylene.
Claim 4
Dependent Claim
19 words
A method in accordance with claim 1 wherein said halogen substituted paraxylylene dimer is a di chlorine substituted paraxylylene.
Claim 5
Dependent Claim
15 words
A method in accordance with claim 1 wherein said silyl amine is a single compound.
Claim 6
Dependent Claim
19 words
A method in accordance with claim 1 wherein said silyl amine admixture is at least two silyl amine compounds.
Claim 7
Dependent Claim
14 words
A method in accordance with claim 1 wherein said substrate in an electronic module.
Claim 8
Dependent Claim
13 words
A method in accordance with claim 1 wherein said silyl amine is g-aminopropyltriethoxysilane.
Claim 9
Dependent Claim
16 words
A method in accordance with claim 1 wherein said silyl amine is N- Beta (aminoethyl) gamma-aminopropyltrimethoxysilane.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1978-08-18 | 1979-02-17 | 1979-08-19 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1982-08-18 | 1983-02-17 | 1983-08-19 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1986-08-18 | 1987-02-17 | 1987-08-19 | $7700.00 | Window Closed / Lapsed |